Cambridge NanoTech, Inc.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Cambridge NanoTech, Inc..The latest application filed is for "ald coating system".
- Cambridge NanoTech, Inc. - Cambridge MA
- Cambridge NanoTech Inc - Cambridge MA
| Patent | Date |
|---|---|
| Vapor deposition systems and methods Grant 8,202,575 - Monsma , et al. June 19, 2 | 2012-06-19 |
| Ald Coating System App 20120141676 - Sershen; Michael J. ; et al. | 2012-06-07 |
| Ald Systems And Methods App 20120064245 - Coutu; Roger R. ; et al. | 2012-03-15 |
| Method And Apparatus For Precursor Delivery App 20110311726 - Liu; Guo ; et al. | 2011-12-22 |
| Reaction Chamber With Removable Liner App 20100247763 - Coutu; Roger R. ; et al. | 2010-09-30 |
| Plasma Atomic Layer Deposition System And Method App 20100183825 - Becker; Jill S. ; et al. | 2010-07-22 |
| System And Method For Thin Film Deposition App 20100166955 - Becker; Jill S. ; et al. | 2010-07-01 |
| Vapor deposition systems and methods App 20060021573 - Monsma; Douwe J. ; et al. | 2006-02-02 |
| NCAGE Code | 3UGV3 | CAMBRIDGE NANOTECH, INC. |
| CAGE Code | 3UGV3 | CAMBRIDGE NANOTECH, INC. |
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