Patent | Date |
---|
Selective nanotube growth inside vias using an ion beam Grant 9,099,537 - Babich , et al. August 4, 2 | 2015-08-04 |
Filling narrow openings using ion beam etch Grant 8,497,212 - Babich , et al. July 30, 2 | 2013-07-30 |
High performance CMOS circuits, and methods for fabricating same Grant 8,383,483 - Arnold , et al. February 26, 2 | 2013-02-26 |
TiC as a thermally stable p-metal carbide on high k SiO.sub.2 gate stacks Grant 8,288,237 - Callegari , et al. October 16, 2 | 2012-10-16 |
Filling Narrow Openings Using Ion Beam Etch App 20120217590 - Babich; Katherina E. ;   et al. | 2012-08-30 |
Method of forming metal/high-.kappa. gate stacks with high mobility Grant 8,153,514 - Andreoni , et al. April 10, 2 | 2012-04-10 |
Selective Nanotube Growth Inside Vias Using An Ion Beam App 20110048930 - Babich; Katherina E. ;   et al. | 2011-03-03 |
Dual metal gate self-aligned integration Grant 7,872,317 - Callegari , et al. January 18, 2 | 2011-01-18 |
High temperature processing compatible metal gate electrode for pFETS and methods for fabrication Grant 7,863,083 - Amos , et al. January 4, 2 | 2011-01-04 |
Method of fabricating a semiconductor structure including one device region having a metal gate electrode located atop a thinned polygate electrode Grant 7,833,849 - Callegari , et al. November 16, 2 | 2010-11-16 |
Metal oxynitride as a pFET material Grant 7,776,701 - Callegari , et al. August 17, 2 | 2010-08-17 |
Method for composition control of a metal compound film Grant 7,772,016 - Allen , et al. August 10, 2 | 2010-08-10 |
DUV laser annealing and stabilization of SiCOH films Grant 7,755,159 - Callegari , et al. July 13, 2 | 2010-07-13 |
METAL GATES WITH LOW CHARGE TRAPPING AND ENHANCED DIELECTRIC RELIABILITY CHARACTERISTICS FOR HIGH-k GATE DIELECTRIC STACKS App 20100044805 - Callegari; Alessandro C. ;   et al. | 2010-02-25 |
TiC as a thermally stable p-metal carbide on high k SiO.sub.2 gate stacks Grant 7,667,277 - Callegari , et al. February 23, 2 | 2010-02-23 |
High Performance Cmos Circuits, And Methods For Fabricating Same App 20100041221 - Arnold; John C. ;   et al. | 2010-02-18 |
TiC AS A THERMALLY STABLE p-METAL CARBIDE ON HIGH k SiO2 GATE STACKS App 20100015790 - Callegari; Alessandro C. ;   et al. | 2010-01-21 |
Dual Metal Gate Self-aligned Integration App 20090283830 - Callegari; Alessandro C. ;   et al. | 2009-11-19 |
Metal gates with low charge trapping and enhanced dielectric reliability characteristics for high-k gate dielectric stacks Grant 7,611,979 - Callegari , et al. November 3, 2 | 2009-11-03 |
Dual metal gate self-aligned integration Grant 7,569,466 - Callegari , et al. August 4, 2 | 2009-08-04 |
Deposition of hafnium oxide and/or zirconium oxide and fabrication of passivated electronic structures Grant 7,566,938 - Cabral, Jr. , et al. July 28, 2 | 2009-07-28 |
DUV laser annealing and stabilization of SiCOH films Grant 7,560,794 - Callegari , et al. July 14, 2 | 2009-07-14 |
Method of forming HfSiN metal for n-FET applications Grant 7,521,346 - Callegari , et al. April 21, 2 | 2009-04-21 |
High Temperature Processing Compatible Metal Gate Electrode For pFETS and Methods For Fabrication App 20080311745 - Amos; Ricky ;   et al. | 2008-12-18 |
METAL OXYNITRIDE AS A pFET MATERIAL App 20080299730 - Callegari; Alessandro C. ;   et al. | 2008-12-04 |
METHOD OF FORMING METAL/HIGH-k GATE STACKS WITH HIGH MOBILITY App 20080293259 - Andreoni; Wanda ;   et al. | 2008-11-27 |
Metal oxynitride as a pFET material Grant 7,436,034 - Callegari , et al. October 14, 2 | 2008-10-14 |
Method For Composition Control Of A Metal Compound Film App 20080249650 - Allen; Russell D. ;   et al. | 2008-10-09 |
METHOD OF FORMING HfSiN METAL FOR n-FET APPLICATIONS App 20080245658 - Callegari; Alessandro C. ;   et al. | 2008-10-09 |
DUV LASER ANNEALING AND STABILIZATION OF SiCOH FILMS App 20080230875 - Callegari; Alessandro C. ;   et al. | 2008-09-25 |
METAL GATES WITH LOW CHARGE TRAPPING AND ENHANCED DIELECTRIC RELIABILITY CHARACTERISTICS FOR HIGH-k GATE DIELECTRIC STACKS App 20080191292 - Callegari; Alessandro C. ;   et al. | 2008-08-14 |
METHOD OF FORMING HfSiN METAL FOR n-FET APPLICATIONS App 20080038905 - Callegari; Alessandro C. ;   et al. | 2008-02-14 |
DUV LASER ANNEALING AND STABILIZATION OF SiCOH FILMS App 20070284698 - Callegari; Alessandro C. ;   et al. | 2007-12-13 |
High pretilt homogeneous alignment and tilted vertical alignment by surface modification of thin films with nitrogen ion beam App 20070224365 - Callegari; Alessandro C. ;   et al. | 2007-09-27 |
High performance CMOS circuits, and methods for fabricating the same App 20070152276 - Arnold; John C. ;   et al. | 2007-07-05 |
High performance circuit with metal and polygate electrodes App 20070152273 - Callegari; Alessandro C. ;   et al. | 2007-07-05 |
Dual metal gate self-aligned integration App 20070138563 - Callegari; Alessandro C. ;   et al. | 2007-06-21 |
Metal oxynitride as a pFET material App 20070138578 - Callegari; Alessandro C. ;   et al. | 2007-06-21 |
DUV laser annealing and stabilization of SiCOH films Grant 7,223,670 - Callegari , et al. May 29, 2 | 2007-05-29 |
Method of forming metal/high-k gate stacks with high mobility App 20060289903 - Andreoni; Wanda ;   et al. | 2006-12-28 |
Method of forming metal/high-k gate stacks with high mobility Grant 7,115,959 - Andreoni , et al. October 3, 2 | 2006-10-03 |
Stability of ion beam generated alignment layers by surface modification Grant 7,097,884 - Callegari , et al. August 29, 2 | 2006-08-29 |
TiC as a thermally stable p-metal carbide on high k SiO2 gate stacks App 20060163630 - Callegari; Alessandro C. ;   et al. | 2006-07-27 |
Method of forming HfSiN metal for n-FET applications App 20060151846 - Callegari; Alessandro C. ;   et al. | 2006-07-13 |
Deposition of hafnium oxide and/or zirconium oxide and fabrication of passivated electronic structures App 20060138603 - Cabral; Cyril JR. ;   et al. | 2006-06-29 |
Method of film deposition, and fabrication of structures Grant 7,015,152 - Callegari , et al. March 21, 2 | 2006-03-21 |
DUV laser annealing and stabilization of SiCOH films App 20060040513 - Callegari; Alessandro C. ;   et al. | 2006-02-23 |
Deposition of hafnium oxide and/or zirconium oxide and fabrication of passivated electronic structures Grant 6,982,230 - Cabral, Jr. , et al. January 3, 2 | 2006-01-03 |
Method of forming metal/high-k gate stacks with high mobility App 20050280105 - Andreoni, Wanda ;   et al. | 2005-12-22 |
CVD tantalum compounds for FET gate electrodes App 20050250318 - Narayanan, Vijay ;   et al. | 2005-11-10 |
CVD tantalum compounds for FET get electrodes App 20050104142 - Narayanan, Vijav ;   et al. | 2005-05-19 |
Deposition of hafnium oxide and/or zirconium oxide and fabrication of passivated electronic structures App 20040092073 - Cabral, Cyril JR. ;   et al. | 2004-05-13 |
Stability of ion beam generated alignment layers by surface modification App 20040086662 - Callegari, Alessandro C. ;   et al. | 2004-05-06 |
Method of film deposition, and fabrication of structures App 20040071879 - Callegari, Alessandro C. ;   et al. | 2004-04-15 |
Liquid crystal display cell having liquid crystal molecules in vertical or substantially vertical alignment Grant 6,682,786 - Lien , et al. January 27, 2 | 2004-01-27 |
Method for forming alignment layer by ion beam surface modification Grant 6,665,033 - Callegari , et al. December 16, 2 | 2003-12-16 |
Method of film deposition, and fabrication of structures Grant 6,664,186 - Callegari , et al. December 16, 2 | 2003-12-16 |
Self alignment of substrates by magnetic alignment Grant 6,583,847 - Callegari , et al. June 24, 2 | 2003-06-24 |
Thermally stable poly-Si/high dielectric constant material interfaces Grant 6,573,197 - Callegari , et al. June 3, 2 | 2003-06-03 |
High temperature processing compatible metal gate electrode for pFETS and methods for fabrication App 20030098489 - Amos, Ricky ;   et al. | 2003-05-29 |
High mobility FETS using A1203 as a gate oxide Grant 6,511,876 - Buchanan , et al. January 28, 2 | 2003-01-28 |
High Mobility Fets Using Al2o3 As A Gate Oxide App 20020197789 - Buchanan, Douglas A. ;   et al. | 2002-12-26 |
Self alignment of substrates App 20020191143 - Callegari, Alessandro C. ;   et al. | 2002-12-19 |
Thermally stable poly-Si/high dielectric constant material interfaces App 20020151142 - Callegari, Alessandro C. ;   et al. | 2002-10-17 |
Stability of ion beam generated alignment layers by surface modification App 20020063830 - Callegari, Alessandro C. ;   et al. | 2002-05-30 |
Diamond-like carbon films from a hydrocarbon helium plasma Grant 5,569,501 - Bailey , et al. October 29, 1 | 1996-10-29 |
Diamond-like carbon films from a hydrocarbon helium plasma Grant 5,470,661 - Bailey , et al. November 28, 1 | 1995-11-28 |
Method for passivating a compound semiconductor surface and device having improved semiconductor-insulator interface Grant 4,859,253 - Buchanan , et al. August 22, 1 | 1989-08-22 |