Patent | Date |
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Introducing nanotubes in trenches and structures formed thereby Grant 7,666,465 - Fischer , et al. February 23, 2 | 2010-02-23 |
Method of improving chemical mechanical polish endpoint signals by use of chemical additives Grant 7,182,882 - Feller , et al. February 27, 2 | 2007-02-27 |
Abrasives for chemical mechanical polishing Grant 7,087,188 - Cadien , et al. August 8, 2 | 2006-08-08 |
Methods for the plasma formation of a microelectronic barrier layer App 20060141780 - Cadien; Kenneth C. | 2006-06-29 |
Introducing nanotubes in trenches and structures formed thereby App 20060141222 - Fischer; Paul B. ;   et al. | 2006-06-29 |
Copper containing abrasive particles to modify reactivity and performance of copper CMP slurries App 20060138087 - Simka; Harsono S. ;   et al. | 2006-06-29 |
Interconnects having a recessed capping layer and methods of fabricating the same App 20060128144 - Park; Hyun-Mog ;   et al. | 2006-06-15 |
Processing electronic devices using a combination of supercritical fluid and sonic energy App 20060065627 - Clarke; James ;   et al. | 2006-03-30 |
Abrasives for chemical mechanical polishing Grant 6,881,674 - Cadien , et al. April 19, 2 | 2005-04-19 |
Ceric-ion slurry for use in chemical-mechanical polishing App 20040203227 - Miller, Anne E. ;   et al. | 2004-10-14 |
Ceric-ion slurry for use in chemical-mechanical polishing App 20040203245 - Miller, Anne E. ;   et al. | 2004-10-14 |
Ceric-ion slurry for use in chemical-mechanical polishing Grant 6,752,844 - Miller , et al. June 22, 2 | 2004-06-22 |
Slurry and method for chemical mechanical polishing of copper Grant 6,740,591 - Miller , et al. May 25, 2 | 2004-05-25 |
Method and chemistry for cleaning of oxidized copper during chemical mechanical polishing Grant 6,719,614 - Miller , et al. April 13, 2 | 2004-04-13 |
Slurry and method for chemical mechanical polishing of copper App 20030211745 - Miller, Anne E. ;   et al. | 2003-11-13 |
Abrasives for chemical mechanical polishing App 20030143851 - Cadien, Kenneth C. ;   et al. | 2003-07-31 |
Abrasives For Chemical Mechanical Polishing App 20030129838 - CADIEN, KENNETH C. ;   et al. | 2003-07-10 |
Method of improving chemical mechanical polish endpoint signals by use of chemical additives App 20030124855 - Feller, Allen D. ;   et al. | 2003-07-03 |
Slurry and method for chemical mechanical polishing of copper App 20020177316 - Miller, Anne E. ;   et al. | 2002-11-28 |
Method and chemistry for cleaning of oxidized copper during chemical mechanical polishing Grant 6,443,814 - Miller , et al. September 3, 2 | 2002-09-03 |
Method And Chemistry For Cleaning Of Oxidized Copper During Chemical Mechanical Polishing App 20020106976 - Miller, Anne E. ;   et al. | 2002-08-08 |
Method and chemistry for cleaning of oxidized copper during chemical mechanical polishing App 20020107155 - Miller, Anne E. ;   et al. | 2002-08-08 |
Method And Chemistry For Cleaning Of Oxidized Copper During Chemical Mechanical Polishing App 20020102922 - Miller, Anne E. ;   et al. | 2002-08-01 |
Ceric-ion Slurry For Use In Chemical-mechanical Polishing App 20020053656 - MILLER, ANNE E. ;   et al. | 2002-05-09 |
Ceria based slurry for chemical-mechanical polishing Grant 6,358,853 - Cadien , et al. March 19, 2 | 2002-03-19 |
Ceria Based Slurry For Chemical-mechanical Polishing App 20020004317 - CADIEN, KENNETH C. ;   et al. | 2002-01-10 |
Slurries for chemical mechanical polishing Grant 6,178,585 - Cadien , et al. January 30, 2 | 2001-01-30 |
Sacrificial erosion control features for chemical-mechanical polishing process Grant 6,087,733 - Maxim , et al. July 11, 2 | 2000-07-11 |
Method of frabricating a MOS transistor having a composite gate electrode Grant 5,783,478 - Chau , et al. July 21, 1 | 1998-07-21 |
Slurries and methods for chemical mechanical polish of aluminum and titanium aluminide Grant 5,700,383 - Feller , et al. December 23, 1 | 1997-12-23 |
MOS transistor having a composite gate electrode and method of fabrication Grant 5,625,217 - Chau , et al. April 29, 1 | 1997-04-29 |
Method and apparatus for conditioning of chemical-mechanical polishing pads Grant 5,611,943 - Cadien , et al. March 18, 1 | 1997-03-18 |
Integrated tungsten/tungsten silicide plug process Grant 5,604,158 - Cadien , et al. February 18, 1 | 1997-02-18 |
Slurries for chemical mechanical polishing Grant 5,516,346 - Cadien , et al. May 14, 1 | 1996-05-14 |
Chemical mechanical polishing slurry delivery and mixing system Grant 5,407,526 - Danielson , et al. April 18, 1 | 1995-04-18 |
Slurries for chemical mechanical polishing Grant 5,340,370 - Cadien , et al. August 23, 1 | 1994-08-23 |