Patent | Date |
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Lithographic apparatus and device manufacturing method involving a heater Grant 11,378,893 - Cadee , et al. July 5, 2 | 2022-07-05 |
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20210063898 - CADEE; Theodorus Petrus Maria ;   et al. | 2021-03-04 |
Lithographic apparatus and device manufacturing method involving a heater Grant 10,838,310 - Cadee , et al. November 17, 2 | 2020-11-17 |
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20190235397 - CADEE; Theodorus Petrus Maria ;   et al. | 2019-08-01 |
Lithographic apparatus and device manufacturing method involving a heater Grant 10,254,663 - Cadee , et al. | 2019-04-09 |
Thermal conditioning method Grant 10,095,128 - Cadee , et al. October 9, 2 | 2018-10-09 |
Sensor, object positioning system, lithographic apparatus and device manufacturing method Grant 10,061,213 - Akkermans , et al. August 28, 2 | 2018-08-28 |
Radiation collector, radiation source and lithographic apparatus Grant 9,983,482 - Loopstra , et al. May 29, 2 | 2018-05-29 |
Lithographic apparatus comprising an actuator, and method for protecting such actuator Grant 9,921,494 - Cadee , et al. March 20, 2 | 2018-03-20 |
Thermal Conditioning Method App 20180024446 - CADEE; Theodorus Petrus Maria ;   et al. | 2018-01-25 |
Lithographic apparatus and device manufacturing method Grant 9,811,005 - Huang , et al. November 7, 2 | 2017-11-07 |
Sensor, Object Positioning System, Lithographic Apparatus And Device Manufacturing Method App 20170277042 - AKKERMANS; Johannes Antonius Gerardus ;   et al. | 2017-09-28 |
Thermal Conditioning Fluid Pump App 20170261866 - CADEE; Theodorus Petrus Maria | 2017-09-14 |
Stage system and a lithographic apparatus Grant 9,726,985 - Van De Ven , et al. August 8, 2 | 2017-08-08 |
Lithographic apparatus Grant 9,696,640 - Koevoets , et al. July 4, 2 | 2017-07-04 |
Lithographic apparatus with a metrology system for measuring a position of a substrate table Grant 9,684,249 - Koevoets , et al. June 20, 2 | 2017-06-20 |
Lithographic apparatus and device manufacturing method Grant 9,618,859 - Koevoets , et al. April 11, 2 | 2017-04-11 |
Lithographic apparatus, method for maintaining a lithographic apparatus and device manufacturing method Grant 9,513,561 - Bleeker , et al. December 6, 2 | 2016-12-06 |
Rotatable Frame, Lithographic Apparatus, Projection System, Method For Focusing Radiation And Device Manufacturing Method App 20160349628 - BLEEKER; Arno Jan ;   et al. | 2016-12-01 |
Lithographic apparatus and device manufacturing method Grant 9,494,869 - Butler , et al. November 15, 2 | 2016-11-15 |
Support, lithographic apparatus and device manufacturing method Grant 9,470,969 - Cadee , et al. October 18, 2 | 2016-10-18 |
Lithographic apparatus and method Grant 9,410,796 - Beerens , et al. August 9, 2 | 2016-08-09 |
Lithographic Apparatus and Device Manufacturing Method App 20160154322 - Huang; Yang-Shan ;   et al. | 2016-06-02 |
Lithographic apparatus, method of deforming a substrate table and device manufacturing method Grant 9,329,501 - Huang , et al. May 3, 2 | 2016-05-03 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor Grant 9,268,242 - Cadee , et al. February 23, 2 | 2016-02-23 |
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20160048085 - CADEE; Theodorus Petrus Maria ;   et al. | 2016-02-18 |
Lithographic apparatus and device manufacturing method Grant 9,261,798 - Huang , et al. February 16, 2 | 2016-02-16 |
Radiation Collector, Radiation Source and Lithographic Apparatus App 20160026091 - LOOPSTRA; Erik Roelof ;   et al. | 2016-01-28 |
Lithographic apparatus comprising a support for holding an object, and a support for use therein Grant 9,195,150 - Cadee , et al. November 24, 2 | 2015-11-24 |
Lithographic apparatus and device manufacturing method involving a heater Grant 9,188,880 - Cadee , et al. November 17, 2 | 2015-11-17 |
Lithographic Apparatus App 20150098067 - Koevoets; Adrianus Hendrik ;   et al. | 2015-04-09 |
Lithographic Apparatus Comprising An Actuator, And Method For Protecting Such Actuator App 20150070678 - Cadee; Theodorus Petrus Maria ;   et al. | 2015-03-12 |
Lithographic apparatus and removable member Grant 8,976,335 - Beerens , et al. March 10, 2 | 2015-03-10 |
Rotatable Frame For a Lithographic Apparatus App 20150034788 - Bleeker; Arno Jan ;   et al. | 2015-02-05 |
Lithographic apparatus, device manufacturing method, and substrate exchanging method Grant 8,947,636 - Cadee , et al. February 3, 2 | 2015-02-03 |
Lithographic apparatus and device manufacturing method Grant 8,932,042 - Vermeulen , et al. January 13, 2 | 2015-01-13 |
Lithographic Apparatus Comprising a Support for Holding an Object, and a Support for Use therein App 20150002832 - Cadee; Theodorus Petrus Maria ;   et al. | 2015-01-01 |
Stage System and a Lithographic Apparatus App 20140375975 - Van De Ven; Bastiaan Lambertus Wilhelmus Marinus ;   et al. | 2014-12-25 |
Lithographic apparatus and device manufacturing method Grant 8,913,228 - Wijckmans , et al. December 16, 2 | 2014-12-16 |
Lithographic Apparatus And Device Manufacturing Method App 20140340666 - Butler; Hans ;   et al. | 2014-11-20 |
Lithographic Apparatus and Device Manufacturing Method App 20140340659 - Van Schoot; Jan Bernard Plechelmus ;   et al. | 2014-11-20 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 8,830,441 - Cadee , et al. September 9, 2 | 2014-09-09 |
Lithographic apparatus, a method for removing material of one or more protrusions on a support surface, and an article support system Grant 8,810,777 - Cadee , et al. August 19, 2 | 2014-08-19 |
Lithographic Apparatus, Method For Maintaining A Lithographic Apparatus And Device Manufacturing Method App 20140009746 - Bleeker; Arno Jan ;   et al. | 2014-01-09 |
Electrostatic Clamp Apparatus And Lithographic Apparatus App 20140002805 - Banine; Vadim Yevgenyevich ;   et al. | 2014-01-02 |
Apparatus and method for contactless handling of an object Grant 08616598 - | 2013-12-31 |
Apparatus and method for contactless handling of an object Grant 8,616,598 - Cadee , et al. December 31, 2 | 2013-12-31 |
Actuator Grant 8,597,014 - Cadee , et al. December 3, 2 | 2013-12-03 |
Lithographic Apparatus and Device Manufacturing Method App 20130314684 - HUANG; Yang-Shan ;   et al. | 2013-11-28 |
Measuring method, measuring apparatus, lithographic apparatus and device manufacturing method Grant 8,593,646 - Den Boef , et al. November 26, 2 | 2013-11-26 |
Stage apparatus and lithographic apparatus comprising such stage apparatus Grant 8,587,769 - Akkermans , et al. November 19, 2 | 2013-11-19 |
Support, Lithographic Apparatus and Device Manufacturing Method App 20130164688 - CADEE; Theodorus Petrus Maria ;   et al. | 2013-06-27 |
Lithographic Apparatus and Method App 20130162966 - BEERENS; Ruud Antonius Catharina Maria ;   et al. | 2013-06-27 |
Actuator, positioning system and lithographic apparatus Grant 8,472,010 - Hol , et al. June 25, 2 | 2013-06-25 |
Lithographic Apparatus And Substrate Handling Method App 20130107241 - LAFARRE; Raymond Wilhelmus Louis ;   et al. | 2013-05-02 |
Lithographic apparatus and positioning apparatus Grant 8,411,247 - Gilissen , et al. April 2, 2 | 2013-04-02 |
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless Grant 8,368,868 - Vermeulen , et al. February 5, 2 | 2013-02-05 |
Lithographic Apparatus, Method Of Deforming A Substrate Table And Device Manufacturing Method App 20120327386 - Huang; Yang-Shan ;   et al. | 2012-12-27 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20120249982 - CADEE; Theodorus Petrus Maria ;   et al. | 2012-10-04 |
Lithographic Apparatus And Removable Member App 20120162621 - Beerens; Ruud Antonius Catharina Maria ;   et al. | 2012-06-28 |
Lithographic Apparatus and Device Manufacturing Method App 20120153543 - Vermeulen; Johannes Petrus Martinus Bernardus ;   et al. | 2012-06-21 |
Lithographic Apparatus And Device Manufacturing Method App 20120113402 - CADEE; Theodorus Petrus Maria ;   et al. | 2012-05-10 |
Stage Apparatus And Lithographic Apparatus Comprising Such Stage Apparatus App 20110299057 - AKKERMANS; Johannes Antonius Gerardus ;   et al. | 2011-12-08 |
Apparatus And Method For Contactless Handling Of An Object App 20110280703 - CADEE; Theodorus Petrus Maria ;   et al. | 2011-11-17 |
Lithographic Apparatus, Device Manufacturing Method, And Substrate Exchanging Method App 20110242518 - Cadee; Theodorus Petrus Maria ;   et al. | 2011-10-06 |
Actuator, Positioning System And Lithographic Apparatus App 20110069293 - Hol; Sven Antoin Johan ;   et al. | 2011-03-24 |
Lithographic Apparatus And Device Manufacturing Method App 20100321650 - CADEE; THEODORUS PETRUS MARIA ;   et al. | 2010-12-23 |
Actuator App 20100272846 - Cadee; Theodorus Petrus Maria ;   et al. | 2010-10-28 |
Lithographic apparatus and device manufacturing method having liquid evaporation control Grant 7,804,575 - Cadee , et al. September 28, 2 | 2010-09-28 |
Lithographic Apparatus, A Method For Removing Material Of One Or More Protrusions On A Support Surface, And An Article Support System App 20100214549 - Cadee; Theodorus Petrus Maria ;   et al. | 2010-08-26 |
Lithographic Apparatus With Gas Pressure Means For Controlling A Planar Position Of A Patterning Device Contactless App 20100159399 - VERMEULEN; Johannes Petrus Martinus Bernardus ;   et al. | 2010-06-24 |
Lithographic Apparatus And Positioning Apparatus App 20100141914 - GILISSEN; Noud Jan ;   et al. | 2010-06-10 |
Radiation System And Lithographic Apparatus App 20100141909 - Wassink; Arnoud Cornelis ;   et al. | 2010-06-10 |
Radiation system and lithographic apparatus Grant 7,696,492 - Wassink , et al. April 13, 2 | 2010-04-13 |
Radiation system and lithographic apparatus App 20080142736 - Wassink; Arnoud Cornelis ;   et al. | 2008-06-19 |
Lithographic apparatus and device manufacturing method Grant 7,342,237 - Severijns , et al. March 11, 2 | 2008-03-11 |
Lithographic apparatus and device manufacturing method Grant 7,304,715 - Cadee , et al. December 4, 2 | 2007-12-04 |
Lithographic apparatus and device manufacturing method App 20070242245 - Wijckmans; Maurice ;   et al. | 2007-10-18 |
Lithographic projection apparatus and actuator Grant 7,180,571 - Cadee February 20, 2 | 2007-02-20 |
Lithographic apparatus and device manufacturing method App 20060197036 - Severijns; Ronald Walther Jeanne ;   et al. | 2006-09-07 |
Lithographic apparatus and apparatus adjustment method Grant 7,078,715 - Vink , et al. July 18, 2 | 2006-07-18 |
Lithographic projection apparatus and actuator App 20060119810 - Cadee; Theodorus Petrus Maria | 2006-06-08 |
Lithographic apparatus and device manufacturing method App 20060033898 - Cadee; Theodorus Petrus Maria ;   et al. | 2006-02-16 |
Lithographic apparatus and device manufacturing method App 20060033892 - Cadee; Theodorus Petrus Maria ;   et al. | 2006-02-16 |