Cabot Microelectronics
Patent Applications and Registrations
Patent applications and USPTO patent grants for Cabot Microelectronics.The latest application filed is for "polishing composition and method for high silicon nitride to silicon oxide removal rate ratios".
- Cabot Microelectronics -
| Patent | Date |
|---|---|
| Polishing composition and method for high silicon nitride to silicon oxide removal rate ratios App 20060108326 - Dysard; Jeffrey M. ; et al. | 2006-05-25 |
| Compositions and methods for tantalum CMP App 20060030158 - Carter; Phillip W. ; et al. | 2006-02-09 |
| Metal oxide coated carbon black for CMP App 20030226998 - Grumbine, Steven K. | 2003-12-11 |
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