Byun; Iksu
Patent Applications and Registrations
Patent applications and USPTO patent grants for Byun; Iksu.The latest application filed is for "plasma processing apparatus and semiconductor device manufacturing method using the same".
- Byun; Iksu - Seoul KR
- Byun; Iksu - Hwaseong-si KR
| Patent | Date |
|---|---|
| Plasma Processing Apparatus And Semiconductor Device Manufacturing Method Using The Same App 20220223385 - Oh; Sejin ; et al. | 2022-07-14 |
| Method of etching at low temperature and plasma etching apparatus Grant 10,818,503 - Lee , et al. October 27, 2 | 2020-10-27 |
| Method Of Etching At Low Temperature And Plasma Etching Apparatus App 20190385860 - LEE; CHEONKYU ; et al. | 2019-12-19 |
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