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Plasma resistant coating of porous body by atomic layer deposition Grant 10,975,469 - Firouzdor , et al. April 13, 2 | 2021-04-13 |
Diamide Compounds Having Muscarinic Receptor Antagonist and Beta2 Adrenergic Receptor Agonist Activity App 20210024493 - HUGHES; Adam D. ;   et al. | 2021-01-28 |
Diamide compounds having muscarinic receptor antagonist and .beta.2 adrenergic receptor agonist activity Grant 10,836,744 - Hughes , et al. November 17, 2 | 2020-11-17 |
Plasma resistant coating of porous body by atomic layer deposition Grant 10,745,805 - Firouzdor , et al. A | 2020-08-18 |
Diamide Compounds Having Muscarinic Receptor Antagonist and Beta2 Adrenergic Receptor Agonist Activity App 20200165223 - HUGHES; Adam D. ;   et al. | 2020-05-28 |
Diamide compounds having muscarinic receptor antagonist and Beta2 adrenergic receptor agonist activity Grant 10,590,107 - Hughes , et al. | 2020-03-17 |
Diamide Compounds Having Muscarinic Receptor Antagonist and Beta2 Adrenergic Receptor Agonist Activity App 20190300504 - HUGHES; Adam D. ;   et al. | 2019-10-03 |
Diamide compounds having muscarinic receptor antagonist and .beta.2 adrenergic receptor agonist activity Grant 10,358,433 - Hughes , et al. | 2019-07-23 |
Diamide Compounds Having Muscarinic Receptor Antagonist and Beta2 Adrenergic Receptor Agonist Activity App 20190047984 - HUGHES; Adam D. ;   et al. | 2019-02-14 |
Diamide compounds having muscarinic receptor antagonis and beta2 adrenergic receptor agonist activity Grant 10,138,220 - Hughes , et al. Nov | 2018-11-27 |
Erosion Resistant Atomic Layer Deposition Coatings App 20180337026 - Firouzdor; Vahid ;   et al. | 2018-11-22 |
Plasma Resistant Coating Of Porous Body By Atomic Layer Deposition App 20180265973 - Firouzdor; Vahid ;   et al. | 2018-09-20 |
Plasma Resistant Coating Of Porous Body By Atomic Layer Deposition App 20180265972 - Firouzdor; Vahid ;   et al. | 2018-09-20 |
Diamide compounds having muscarinic receptor antagonist and Beta2 adrenergic receptor agonist activity Grant 9,975,875 - Hughes , et al. May 22, 2 | 2018-05-22 |
Diamide Compounds Having Muscarinic Receptor Antagonist and Beta2 Adrenergic Receptor Agonist Activity App 20170362200 - HUGHES; Adam D. ;   et al. | 2017-12-21 |
Diamide compounds having muscarinic receptor antagonist and .beta..sub.2 adrenergic receptor agonist activity Grant 9,771,350 - Hughes , et al. September 26, 2 | 2017-09-26 |
Diamide Compounds Having Muscarinic Receptor Antagonist and Beta2 Adrenergic Receptor Agonist Activity App 20170226082 - HUGHES; Adam D. ;   et al. | 2017-08-10 |
Diamide compounds having muscarinic receptor antagonist and .beta..sub.2 adrenergic receptor agonist activity Grant 9,682,957 - Hughes , et al. June 20, 2 | 2017-06-20 |
Diamide Compounds Having Muscarinic Receptor Antagonist and Beta2 Adrenergic Receptor Agonist Activity App 20170096412 - HUGHES; Adam D. ;   et al. | 2017-04-06 |
Diamide compounds having muscarinic receptor antagonist and .beta..sub.2 adrenergic receptor agonist activity Grant 9,572,802 - Hughes , et al. February 21, 2 | 2017-02-21 |
Diamide Compounds Having Muscarinic Receptor Antagonist and Beta2 Adrenergic Receptor Agonist Activity App 20160361304 - HUGHES; Adam D. ;   et al. | 2016-12-15 |
Shelter Deployment Handles App 20160290002 - MICHAELIS; Susan L. ;   et al. | 2016-10-06 |
Diamide compounds having muscarinic receptor antagonist and BETA2 adrenergic receptor agonist activity Grant 9,394,275 - Hughes , et al. July 19, 2 | 2016-07-19 |
Diamide Compounds Having Muscarinic Receptor Antagonist And Beta2 Adrenergic Receptor Agonist Activity App 20150274697 - Hughes; Adam D. ;   et al. | 2015-10-01 |
Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potential Grant 8,797,705 - Valcore, Jr. , et al. August 5, 2 | 2014-08-05 |
Diamide Compounds Having Muscarinic Receptor Antagonist And Beta2 Adrenergic Receptor Agonist Activity App 20130137665 - Hughes; Adam ;   et al. | 2013-05-30 |
Diamide compounds having muscarinic receptor antagonist and .beta..sub.2 adrenergic receptor agonist activity Grant 8,138,345 - Hughes , et al. March 20, 2 | 2012-03-20 |
Methods And Arrangement For Plasma Dechuck Optimization Based On Coupling Of Plasma Signaling To Substrate Position And Potential App 20110058302 - Valcore, JR.; John C. ;   et al. | 2011-03-10 |
Light-up Prevention In Electrostatic Chucks App 20110024049 - Stevenson; Tom ;   et al. | 2011-02-03 |
Diamide Compounds Having Muscarinic Receptor Antagonist And Beta2 Adrenergic Receptor Agonist Activity App 20100273755 - Hughes; Adam ;   et al. | 2010-10-28 |