| Patent | Date |
|---|
Method and Apparatus for EUV Mask Inspection
App 20220260928 - Milshtein; Erel ; et al. | 2022-08-18 |
Droplet generation for a laser produced plasma light source
Grant 11,343,899 - Ahr , et al. May 24, 2 | 2022-05-24 |
Methods and systems for characterization of an x-ray beam with high spatial resolution
Grant 11,073,487 - Bykanov , et al. July 27, 2 | 2021-07-27 |
Droplet Generation For A Laser Produced Plasma Light Source
App 20210105886 - Ahr; Brian ; et al. | 2021-04-08 |
X-ray metrology system with broadband laser produced plasma illuminator
Grant 10,959,318 - Khodykin , et al. March 23, 2 | 2021-03-23 |
Droplet generation for a laser produced plasma light source
Grant 10,880,979 - Ahr , et al. December 29, 2 | 2020-12-29 |
Multilayer targets for calibration and alignment of X-ray based measurement systems
Grant 10,816,486 - Artemiev , et al. October 27, 2 | 2020-10-27 |
Multilayer Targets For Calibration And Alignment Of X-Ray Based Measurement Systems
App 20190302039 - Artemiev; Nikolay ; et al. | 2019-10-03 |
Beam shaping slit for small spot size transmission small angle X-ray scatterometry
Grant 10,359,377 - Bykanov , et al. | 2019-07-23 |
X-Ray Metrology System With Broadband Laser Produced Plasma Illuminator
App 20190215940 - Khodykin; Oleg ; et al. | 2019-07-11 |
Methods And Systems For Characterization Of An X-Ray Beam With High Spatial Resolution
App 20180328868 - Bykanov; Alexander ; et al. | 2018-11-15 |
Plasma-based light source
Grant 10,034,362 - Kuritsyn , et al. July 24, 2 | 2018-07-24 |
Debris protection system for reflective optic utilizing gas flow
Grant 9,989,758 - Kuritsyn , et al. June 5, 2 | 2018-06-05 |
Beam Shaping Slit For Small Spot Size Transmission Small Angle X-Ray Scatterometry
App 20170307548 - Bykanov; Alexander ; et al. | 2017-10-26 |
Droplet Generation for a Laser Produced Plasma Light Source
App 20170131129 - Ahr; Brian ; et al. | 2017-05-11 |
System and method for generation of extreme ultraviolet light
Grant 9,544,984 - Bykanov , et al. January 10, 2 | 2017-01-10 |
Plasma-Based Light Source
App 20160249442 - Kuritsyn; Alexey ; et al. | 2016-08-25 |
System and method for producing an exclusionary buffer gas flow in an EUV light source
Grant 9,420,678 - Bykanov , et al. August 16, 2 | 2016-08-16 |
EUV light source using cryogenic droplet targets in mask inspection
Grant 9,295,147 - Bykanov , et al. March 22, 2 | 2016-03-22 |
System and Method for Generation of Extreme Ultraviolet Light
App 20150076359 - Bykanov; Alexander ; et al. | 2015-03-19 |
System And Method For Producing An Exclusionary Buffer Gas Flow In An Euv Light Source
App 20150008335 - Bykanov; Alexander ; et al. | 2015-01-08 |
Debris Protection System For Reflective Optic Utilizing Gas Flow
App 20140306115 - Kuritsyn; Alexey ; et al. | 2014-10-16 |
Euv Light Source Using Cryogenic Droplet Targets In Mask Inspection
App 20140246607 - Bykanov; Alexander ; et al. | 2014-09-04 |
Dense plasma focus radiation source
Grant 7,002,168 - Jacob , et al. February 21, 2 | 2006-02-21 |
Dense plasma focus radiation source
App 20040071267 - Jacob, Jonah ; et al. | 2004-04-15 |
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