Buurman; Erik Petrus

Patent Applications and Registrations

Patent applications and USPTO patent grants for Buurman; Erik Petrus.The latest application filed is for "radiation source".

Company Profile

1.21.20

Buurman; Erik Petrus - Veldhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Radiation source Grant 10,222,702 - Bleeker , et al.	2019-03-05
Radiation Source App 20180031979 - BLEEKER; Arno Jan ; et al.	2018-02-01
Lithographic apparatus, excimer laser and device manufacturing method Grant 9,316,924 - De Kruif , et al. April 19, 2	2016-04-19
Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method Grant 9,110,377 - Loopstra , et al. August 18, 2	2015-08-18
Radiation source, method of controlling a radiation source, lithographic apparatus, and method for manufacturing a device Grant 8,663,881 - Buurman , et al. March 4, 2	2014-03-04
EUV radiation source comprising a droplet accelerator and lithographic apparatus Grant 8,598,551 - Mestrom , et al. December 3, 2	2013-12-03
Laser device Grant 8,462,826 - Loopstra , et al. June 11, 2	2013-06-11
Lithographic Apparatus, Euv Radiation Generation Apparatus And Device Manufacturing Method App 20130141709 - Loopstra; Erik Roelof ; et al.	2013-06-06
Radiation source and lithographic apparatus Grant 8,431,916 - Loopstra , et al. April 30, 2	2013-04-30
Radiation Source, Method Of Controlling A Radiation Source, Lithographic Apparatus, And Method For Manufacturing A Device App 20130022901 - BUURMAN; Erik Petrus ; et al.	2013-01-24
Euv Radiation Source And Lithographic Apparatus App 20120280148 - Loopstra; Erik Roelof ; et al.	2012-11-08
Euv Radiation Source Comprising A Droplet Accelerator And Lithographic Apparatus App 20120280149 - Mestrom; Wilbert Jan ; et al.	2012-11-08
Lithographic Apparatus, Excimer Laser And Device Manufacturing Method App 20120057144 - DE KRUIF; Robertus Cornelis Martinus ; et al.	2012-03-08
Lithographic apparatus, excimer laser and device manufacturing method Grant 8,089,613 - De Kruif , et al. January 3, 2	2012-01-03
Radiation Source, Method Of Controlling A Radiation Source, Lithographic Apparatus, And Method For Manufacturing A Device App 20110273691 - BUURMAN; Erik Petrus ; et al.	2011-11-10
Lithographic apparatus, source, source controller and control method Grant 7,868,999 - Heintze , et al. January 11, 2	2011-01-11
Lithographic Apparatus, Excimer Laser And Device Manufacturing Method App 20100329290 - DE KRUIF; Robertus Cornelis Martinus ; et al.	2010-12-30
Lithographic apparatus, excimer laser and device manufacturing method Grant 7,817,247 - De Kruif , et al. October 19, 2	2010-10-19
Laser Device App 20100182579 - Loopstra; Erik Roelof ; et al.	2010-07-22
Radiation Source And Lithographic Apparatus App 20100110405 - LOOPSTRA; Erik Roelof ; et al.	2010-05-06
Lithographic Apparatus And Device Manufacturing Method App 20100091260 - Buurman; Erik Petrus ; et al.	2010-04-15
Lithographic apparatus and device manufacturing method Grant 7,655,367 - Buurman , et al. February 2, 2	2010-02-02
Lithographic apparatus, excimer laser and device manufacturing method Grant 7,595,863 - Kruif , et al. September 29, 2	2009-09-29
Lithographic apparatus and device manufacturing method Grant 7,525,638 - Buurman , et al. April 28, 2	2009-04-28
Lithographic apparatus and device manufacturing method Grant 7,491,478 - Buurman , et al. February 17, 2	2009-02-17
Increasing pulse-to-pulse radiation beam uniformity Grant 7,453,551 - Noordman , et al. November 18, 2	2008-11-18
Increasing pulse-to-pulse radiation beam uniformity App 20080111982 - Noordman; Oscar Franciscus Jozephus ; et al.	2008-05-15
Lithographic apparatus, source, source controller and control method App 20080036991 - Heintze; Johannes ; et al.	2008-02-14
Lithographic apparatus and device manufacturing method App 20060227310 - Buurman; Erik Petrus ; et al.	2006-10-12
Lithographic apparatus and device manufacturing method App 20060215134 - Buurman; Erik Petrus ; et al.	2006-09-28
Lithographic apparatus, excimer laser and device manufacturing method App 20060170899 - De Kruif; Robertus Cornelis Martinus ; et al.	2006-08-03
Lithographic apparatus, excimer laser and device manufacturing method App 20060146310 - De Kruif; Robertus Cornelis Martinus ; et al.	2006-07-06
Lithographic apparatus and device manufacturing method App 20060017906 - Buurman; Erik Petrus ; et al.	2006-01-26

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