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Patent applications and USPTO patent grants for Buttinger; Richard.The latest application filed is for "method and device for cleaning and then bonding substrates".
Patent | Date |
---|---|
Method and device for cleaning and then bonding substrates Grant 7,168,607 - Ehrke , et al. January 30, 2 | 2007-01-30 |
Device for aligning masks in photolithography Grant 6,891,602 - Maier , et al. May 10, 2 | 2005-05-10 |
Method and device for cleaning and then bonding substrates App 20040014298 - Ehrke, Hans-Ulrich ;   et al. | 2004-01-22 |
Device for aligning masks in photolithography App 20030086069 - Maier, Nikolaus ;   et al. | 2003-05-08 |
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