Buttgereit; Ute

Patent Applications and Registrations

Patent applications and USPTO patent grants for Buttgereit; Ute.The latest application filed is for "method for measuring photomasks".

Company Profile

7.6.13

Buttgereit; Ute - Jena DE
Buttgereit; Ute - Jen DE
Buttgereit; Ute - Zella-Mehlis DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method For Measuring Photomasks App 20210255541 - Simakov; Dmitry ; et al.	2021-08-19
Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out Grant 10,788,748 - Thaler , et al. September 29, 2	2020-09-29
Method and device for characterizing a mask for microlithography Grant 10,698,318 - Seitz , et al.	2020-06-30
Method for correcting the critical dimension uniformity of a photomask for semiconductor lithography Grant 10,578,975 - Thaler , et al.	2020-03-03
Method and device for determining an OPC model Grant 10,539,865 - Seitz , et al. Ja	2020-01-21
Method for Correcting the Critical Dimension Uniformity of a Photomask for Semiconductor Lithography App 20190107783 - Thaler; Thomas ; et al.	2019-04-11
Method And Appliance For Predicting The Imaging Result Obtained With A Mask When A Lithography Process Is Carried Out App 20190107776 - Thaler; Thomas ; et al.	2019-04-11
Method And Device For Characterizing A Mask For Microlithography App 20190011839 - Seitz; Holger ; et al.	2019-01-10
Method And Device For Determining An Opc Model App 20180095358 - Seitz; Holger ; et al.	2018-04-05
Method and device for examining a mask Grant 9,869,640 - Trautzsch , et al. January 16, 2	2018-01-16
Method and device for examining a mask App 20150198541 - Trautzsch; Thomas ; et al.	2015-07-16
Mask blank and photomask having antireflective properties App 20070128528 - Hess; Gunter ; et al.	2007-06-07
Attenuated phase shift mask blank and photomask App 20070076833 - Becker; Hans ; et al.	2007-04-05
Attenuating phase shift mask blank and photomask Grant 7,029,803 - Becker , et al. April 18, 2	2006-04-18
Mask blank having a protection layer App 20050260504 - Becker, Hans ; et al.	2005-11-24
Ultra high transmission phase shift mask blanks App 20050190450 - Becker, Hans ; et al.	2005-09-01
Attenuating phase shift mask blank and photomask App 20050053845 - Becker, Hans ; et al.	2005-03-10
Photo mask blank, photo mask, method and apparatus for manufacturing of a photo mask blank App 20040231971 - Becker, Hans ; et al.	2004-11-25
Photo mask blank, photo mask, method and apparatus for manufacturing of a photo mask blank App 20040159538 - Becker, Hans ; et al.	2004-08-19

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