| Patent | Date |
|---|
Systems and methods for treating substrates with cryogenic fluid mixtures
Grant 11,355,376 - Butterbaugh , et al. June 7, 2 | 2022-06-07 |
System And Method For Monitoring Treatment Of Microelectronic Substrates With Fluid Sprays Such As Cryogenic Fluid Sprays
App 20220088647 - Butterbaugh; Jeffery W. ; et al. | 2022-03-24 |
System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays
Grant 11,207,715 - Butterbaugh , et al. December 28, 2 | 2021-12-28 |
Systems and methods for treating substrates with cryogenic fluid mixtures
Grant 10,991,610 - Butterbaugh , et al. April 27, 2 | 2021-04-27 |
Systems And Methods For Treating Substrates With Cryogenic Fluid Mixtures
App 20210050233 - Mbanaso; Chimaobi W. ; et al. | 2021-02-18 |
Systems and Methods for Rotating and Translating a Substrate in a Process Chamber
App 20210023591 - Butterbaugh; Jeffery W. | 2021-01-28 |
Systems and methods for rotating and translating a substrate in a process chamber
Grant 10,843,236 - Butterbaugh November 24, 2 | 2020-11-24 |
Systems and methods for treating substrates with cryogenic fluid mixtures
Grant 10,748,789 - Mbanaso , et al. A | 2020-08-18 |
System And Method For Monitoring Treatment Of Microelectronic Substrates With Fluid Sprays Such As Cryogenic Fluid Sprays
App 20190337026 - Butterbaugh; Jeffery W. ; et al. | 2019-11-07 |
Systems And Methods For Treating Substrates With Cryogenic Fluid Mixtures
App 20180308720 - Mbanso; Chimaobi W. ; et al. | 2018-10-25 |
Systems and methods for treating substrates with cryogenic fluid mixtures
Grant 10,062,596 - Butterbaugh , et al. August 28, 2 | 2018-08-28 |
Systems and Methods for Rotating and Translating a Substrate in a Process Chamber
App 20180214915 - Butterbaugh; Jeffery W. | 2018-08-02 |
Systems and methods for treating substrates with cryogenic fluid mixtures
Grant 10,020,217 - Butterbaugh , et al. July 10, 2 | 2018-07-10 |
Recipe Selectable Dispense System And Method Of Operating
App 20180190517 - DeKraker; David ; et al. | 2018-07-05 |
Systems and methods for treating substrates with cryogenic fluid mixtures
Grant 10,014,191 - Mbanaso , et al. July 3, 2 | 2018-07-03 |
Process for silicon nitride removal selective to SiGe.sub.x
Grant 9,691,628 - Butterbaugh , et al. June 27, 2 | 2017-06-27 |
Systems and Methods for Treating Substrates with Cryogenic Fluid Mixtures
App 20160303617 - Mbanaso; Chimaobi W. ; et al. | 2016-10-20 |
Method For Wet Stripping Silicon-containing Organic Layers
App 20160284535 - Lauerhaas; Jeffrey M. ; et al. | 2016-09-29 |
Systems and Methods for Treating Substrates with Cryogenic Fluid Mixtures
App 20160096209 - Butterbaugh; Jeffery W. ; et al. | 2016-04-07 |
Systems and Methods for Treating Substrates with Cryogenic Fluid Mixtures
App 20160096210 - Butterbaugh; Jeffery W. ; et al. | 2016-04-07 |
Systems and Methods for Treating Substrates with Cryogenic Fluid Mixtures
App 20160096207 - Butterbaugh; Jeffery W. ; et al. | 2016-04-07 |
Systems and Methods for Treating Substrates with Cryogenic Fluid Mixtures
App 20160096206 - Butterbaugh; Jeffery W. ; et al. | 2016-04-07 |
Process for silicon nitride removal selective to SiGe.sub.x
Grant 9,299,570 - Butterbaugh , et al. March 29, 2 | 2016-03-29 |
Process for Silicon Nitride Removal Selective to SiGex
App 20160013068 - Butterbaugh; Jeffery W. ; et al. | 2016-01-14 |
Process for selectively removing nitride from substrates
Grant 9,059,104 - Ratkovich , et al. June 16, 2 | 2015-06-16 |
Process for treatment of substrates with water vapor or steam
Grant 08920577 - | 2014-12-30 |
Process for treatment of substrates with water vapor or steam
Grant 8,920,577 - DeKraker , et al. December 30, 2 | 2014-12-30 |
Process for Silicon Nitride Removal Selective to SiGex
App 20130203262 - Butterbaugh; Jeffery W. ; et al. | 2013-08-08 |
Process For Selectively Removing Nitride From Substrates
App 20120145672 - Ratkovich; Anthony S. ; et al. | 2012-06-14 |
Wet Processing Of Microelectronic Substrates With Controlled Mixing Of Fluids Proximal To Substrate Surfaces
App 20110259376 - Wagener; Thomas J. ; et al. | 2011-10-27 |
Liquid Aerosol Particle Removal Method
App 20110180114 - BUTTERBAUGH; JEFFERY W. ; et al. | 2011-07-28 |
Process For Treatment Of Substrates With Water Vapor Or Steam
App 20100326477 - DeKraker; David ; et al. | 2010-12-30 |
Process for treatment of substrates with water vapor or steam
Grant 7,819,984 - DeKraker , et al. October 26, 2 | 2010-10-26 |
Process for treatment of substrates with water vapor or steam
App 20080283090 - DeKraker; David ; et al. | 2008-11-20 |
Liquid aersol particle removal method
App 20080006303 - Butterbaugh; Jeffery W. ; et al. | 2008-01-10 |
Apparatus for surface conditioning
Grant 7,025,831 - Butterbaugh , et al. April 11, 2 | 2006-04-11 |
Cleaning method
Grant 6,124,211 - Butterbaugh , et al. September 26, 2 | 2000-09-26 |
Method and apparatus for surface conditioning
Grant 6,015,503 - Butterbaugh , et al. January 18, 2 | 2000-01-18 |
Cleaning method
Grant 5,716,495 - Butterbaugh , et al. February 10, 1 | 1998-02-10 |
Apparatus for surface conditioning
Grant 5,580,421 - Hiatt , et al. December 3, 1 | 1996-12-03 |
UV-enhanced dry stripping of silicon nitride films
Grant 5,534,107 - Gray , et al. July 9, 1 | 1996-07-09 |
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