Butschke; Jorg
Patent Applications and Registrations
Patent applications and USPTO patent grants for Butschke; Jorg.The latest application filed is for "multi-beam deflector array device for maskless particle-beam processing".
- Butschke; Jorg - Stuttgart DE
| Patent | Date |
|---|---|
| Multi-beam deflector array device for maskless particle-beam processing Grant 7,687,783 - Platzgummer , et al. March 30, 2 | 2010-03-30 |
| Multi-beam Deflector Array Device For Maskless Particle-beam Processing App 20080203317 - Platzgummer; Elmar ; et al. | 2008-08-28 |
| Method of producing large-area membrane masks by dry etching Grant 6,864,182 - Butschke , et al. March 8, 2 | 2005-03-08 |
| Large-area membrane mask and method for fabricating the mask Grant 6,835,508 - Butschke , et al. December 28, 2 | 2004-12-28 |
| Large-area membrane mask and method for fabricating the mask App 20030031939 - Butschke, Jorg ; et al. | 2003-02-13 |
| Method of producing large-area membrane masks by dry etching App 20030003739 - Butschke, Jorg ; et al. | 2003-01-02 |
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