Busche; Matthew

Patent Applications and Registrations

Patent applications and USPTO patent grants for Busche; Matthew.The latest application filed is for "thermal switch".

Company Profile

3.12.10

Busche; Matthew - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Thermal switch Grant 11,204,206 - Busche December 21, 2	2021-12-21
Thermal Switch App 20210356220 - Busche; Matthew	2021-11-18
Thermal switch Grant 11,041,682 - Busche June 22, 2	2021-06-22
Edge seal configurations for a lower electrode assembly Grant 10,892,197 - Gaff , et al. January 12, 2	2021-01-12
Thermal switch Grant 10,866,036 - Busche December 15, 2	2020-12-15
Thermal Switch App 20200333091 - Busche; Matthew	2020-10-22
Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers Grant 10,736,182 - Busche , et al.	2020-08-04
Optical fiber temperature sensors, temperature monitoring apparatus, and manufacturing methods Grant 10,520,371 - Busche Dec	2019-12-31
Edge Seal Configurations For A Lower Electrode Assembly App 20180366379 - GAFF; Keith William ; et al.	2018-12-20
Edge seal for lower electrode assembly Grant 10,090,211 - Gaff , et al. October 2, 2	2018-10-02
Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods Grant 9,986,598 - Busche , et al. May 29, 2	2018-05-29
Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods Grant 9,698,041 - Busche , et al. July 4, 2	2017-07-04
Optical Fiber Temperature Sensors, Temperature Monitoring Apparatus, And Manufacturing Methods App 20170115169 - Busche; Matthew	2017-04-27
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods Grant 9,558,981 - Boyd, Jr. , et al. January 31, 2	2017-01-31
Temperature Control Apparatus Including Groove-routed Optical Fiber Heating, Substrate Temperature Control Systems, Electronic Device Processing Systems, And Processing Methods App 20160007411 - Busche; Matthew ; et al.	2016-01-07
Apparatus, Systems, And Methods For Temperature Control Of Substrates Using Embedded Fiber Optics And Epoxy Optical Diffusers App 20160007412 - Busche; Matthew ; et al.	2016-01-07
Substrate Temperature Control Apparatus Including Optical Fiber Heating, Substrate Temperature Control Systems, Electronic Device Processing Systems, And Methods App 20150357228 - Busche; Matthew ; et al.	2015-12-10
Edge Seal For Lower Electrode Assembly App 20150187614 - Gaff; Keith William ; et al.	2015-07-02
Control Systems Employing Deflection Sensors To Control Clamping Forces Applied By Electrostatic Chucks, And Related Methods App 20150138687 - BOYD, JR.; Wendell ; et al.	2015-05-21
Apparatus and method for temperature control of a semiconductor substrate support Grant 8,410,393 - Ricci , et al. April 2, 2	2013-04-02
Apparatus And Method For Temperature Control Of A Semiconductor Substrate Support App 20110284505 - Ricci; Anthony ; et al.	2011-11-24

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