Burrows; Brian H.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Burrows; Brian H..The latest application filed is for "multi-thermal cvd chambers with shared gas delivery and exhaust system".
Company Profile
7.11.32
- Burrows; Brian H. - San Jose CA
- Burrows; Brian H. - Campbell CA
Patent Activity
| Patent | Date |
|---|---|
| Purged viewport for quartz dome in epitaxy reactor Grant 11,189,508 - Hu , et al. November 30, 2 | 2021-11-30 |
| Multi-thermal Cvd Chambers With Shared Gas Delivery And Exhaust System App 20210324514 - YE; Zhiyuan ; et al. | 2021-10-21 |
| Methods and apparatus for gallium nitride deposition Grant 10,995,419 - Burrows , et al. May 4, 2 | 2021-05-04 |
| Methods And Apparatus For Gallium Nitride Deposition App 20200332437 - BURROWS; Brian H. ; et al. | 2020-10-22 |
| Methods And Apparatus For Depositing Materials On A Continuous Substrate App 20200290932 - ISHIKAWA; David Masayuki ; et al. | 2020-09-17 |
| Continuous Chemical Vapor Deposition (cvd) Multi-zone Process Kit App 20200291523 - ISHIKAWA; David M. ; et al. | 2020-09-17 |
| Purged Viewport For Quartz Dome In Epitaxy Reactor App 20200105554 - HU; Ji-Dih ; et al. | 2020-04-02 |
| Chamber Injector App 20200071832 - LAU; Shu-Kwan ; et al. | 2020-03-05 |
| Tool Architecture Using Variable Frequency Microwave For Residual Moisture Removal Of Electrodes App 20190132910 - DELMAS; Jean ; et al. | 2019-05-02 |
| Process gas preheating systems and methods for double-sided multi-substrate batch processing Grant 9,982,364 - Ishikawa , et al. May 29, 2 | 2018-05-29 |
| Parallel Plate Inline Substrate Processing Tool App 20170244006 - BURROWS; BRIAN H. ; et al. | 2017-08-24 |
| High Speed Epitaxy System And Methods App 20170221751 - BURROWS; Brian H. ; et al. | 2017-08-03 |
| Multi-gas straight channel showerhead Grant 9,644,267 - Burrows , et al. May 9, 2 | 2017-05-09 |
| High Speed Epi System And Chamber Concepts App 20160348240 - BURROWS; Brian H. ; et al. | 2016-12-01 |
| Process Gas Preheating Systems And Methods For Double-sided Multi-substrate Batch Processing App 20160298263 - ISHIKAWA; DAVID MASAYUKI ; et al. | 2016-10-13 |
| Methods For Substrate Processing App 20150155407 - SCUDDER; LANCE A. ; et al. | 2015-06-04 |
| Multi-gas Straight Channel Showerhead App 20140014745 - BURROWS; Brian H. ; et al. | 2014-01-16 |
| Multi-gas straight channel showerhead Grant 8,481,118 - Burrows , et al. July 9, 2 | 2013-07-09 |
| Methods for fabricating group III nitride structures with a cluster tool Grant 8,183,132 - Nijhawan , et al. May 22, 2 | 2012-05-22 |
| Multi-gas Straight Channel Showerhead App 20120024388 - Burrows; Brian H. ; et al. | 2012-02-02 |
| Multi-gas straight channel showerhead Grant 7,976,631 - Burrows , et al. July 12, 2 | 2011-07-12 |
| Cvd Apparatus App 20110121503 - BURROWS; BRIAN H. ; et al. | 2011-05-26 |
| Nanocrystalline Diamond-structured Carbon Coating Of Silicon Carbide App 20110076400 - Kryliouk; Olga ; et al. | 2011-03-31 |
| Substrate Carrier Design For Improved Photoluminescence Uniformity App 20110049779 - EGAMI; GLEN ERIC ; et al. | 2011-03-03 |
| Cluster Tool For Leds App 20100261340 - NIJHAWAN; SANDEEP ; et al. | 2010-10-14 |
| Hvpe Showerhead Design App 20100215854 - Burrows; Brian H. ; et al. | 2010-08-26 |
| High temperature anneal with improved substrate support Grant 7,704,327 - Waldhauer , et al. April 27, 2 | 2010-04-27 |
| Processing System For Fabricating Compound Nitride Semiconductor Devices App 20090194026 - BURROWS; BRIAN H. ; et al. | 2009-08-06 |
| Cvd Apparatus App 20090194024 - Burrows; Brian H. ; et al. | 2009-08-06 |
| Multi-gas Straight Channel Showerhead App 20090098276 - BURROWS; Brian H. ; et al. | 2009-04-16 |
| Showerhead Design With Precursor Pre-mixing App 20080314317 - BURROWS; BRIAN H. ; et al. | 2008-12-25 |
| Hvpe Showerhead Design App 20080314311 - Burrows; Brian H. ; et al. | 2008-12-25 |
| Methods And Apparatus For Depositing A Group Iii-v Film Using A Hydride Vapor Phase Epitaxy Process App 20080289575 - Burrows; Brian H. ; et al. | 2008-11-27 |
| Cross Flow Apparatus And Method For Hydride Vapor Phase Deposition App 20080276860 - BURROWS; BRIAN H. ; et al. | 2008-11-13 |
| Modular Cvd Epi 300mm Reactor App 20080072820 - Burrows; Brian H. ; et al. | 2008-03-27 |
| Substrate Support With Adjustable Lift And Rotation Mount App 20080017117 - CAMPBELL; JEFFREY ; et al. | 2008-01-24 |
| Substrate Support With Adjustable Lift And Rotation Mount App 20080017116 - Campbell; Jeffrey ; et al. | 2008-01-24 |
| Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber Grant 6,807,972 - Chiu , et al. October 26, 2 | 2004-10-26 |
| High temperature anneal with improved substrate support App 20040060512 - Waldhauer, Ann P. ; et al. | 2004-04-01 |
| Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber App 20030183250 - Rodney Chiu, Ho-Man ; et al. | 2003-10-02 |
| Apparatus for performing work in a nuclear reactor Grant 5,878,099 - Burrows , et al. March 2, 1 | 1999-03-02 |
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