| Patent | Date |
|---|
Selective Gas Etching For Self-aligned Pattern Transfer
App 20220262636 - Arnold; John Christopher ; et al. | 2022-08-18 |
Selective gas etching for self-aligned pattern transfer
Grant 11,302,533 - Arnold , et al. April 12, 2 | 2022-04-12 |
Self-aligned pattern formation for a semiconductor device
Grant 11,227,793 - Burns , et al. January 18, 2 | 2022-01-18 |
Alternating Hardmasks For Tight-pitch Line Formation
App 20210335619 - Burns; Sean D. ; et al. | 2021-10-28 |
Self Aligned Pattern Formation Post Spacer Etchback In Tight Pitch Configurations
App 20210280422 - Burns; Sean D. ; et al. | 2021-09-09 |
Selective Gas Etching For Self-aligned Pattern Transfer
App 20210183653 - Arnold; John Christopher ; et al. | 2021-06-17 |
Alternating hardmasks for tight-pitch line formation
Grant 11,031,248 - Burns , et al. June 8, 2 | 2021-06-08 |
Self aligned pattern formation post spacer etchback in tight pitch configurations
Grant 11,018,007 - Burns , et al. May 25, 2 | 2021-05-25 |
Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs
Grant 10,957,583 - Burns , et al. March 23, 2 | 2021-03-23 |
Selective gas etching for self-aligned pattern transfer
Grant 10,930,504 - Arnold , et al. February 23, 2 | 2021-02-23 |
Self-aligned patterning methods which implement directed self-assembly
Grant 10,613,438 - Burns , et al. | 2020-04-07 |
Self-aligned Pattern Formation For A Semiconductor Device
App 20200090985 - Burns; Sean D. ; et al. | 2020-03-19 |
Selective Gas Etching For Self-aligned Pattern Transfer
App 20200083045 - ARNOLD; John Christopher ; et al. | 2020-03-12 |
Self Aligned Pattern Formation Post Spacer Etchback In Tight Pitch Configurations
App 20200075336 - Burns; Sean D. ; et al. | 2020-03-05 |
Selective gas etching for self-aligned pattern transfer
Grant 10,559,467 - Arnold , et al. Feb | 2020-02-11 |
Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs
Grant 10,546,774 - Burns , et al. Ja | 2020-01-28 |
Self aligned pattern formation post spacer etchback in tight pitch configurations
Grant 10,529,569 - Burns , et al. J | 2020-01-07 |
Self-aligned Quadruple Patterning (saqp) For Routing Layouts Including Multi-track Jogs
App 20190393082 - Burns; Sean D. ; et al. | 2019-12-26 |
Alternating Hardmasks For Tight-pitch Line Formation
App 20190333774 - Burns; Sean D. ; et al. | 2019-10-31 |
Alternating hardmasks for tight-pitch line formation
Grant 10,410,875 - Burns , et al. Sept | 2019-09-10 |
Self aligned conductive lines with relaxed overlay
Grant 10,395,985 - Burns , et al. A | 2019-08-27 |
Multi-angled deposition and masking for custom spacer trim and selected spacer removal
Grant 10,388,525 - Bergendahl , et al. A | 2019-08-20 |
Multi-angled deposition and masking for custom spacer trim and selected spacer removal
Grant 10,361,079 - Bergendahl , et al. | 2019-07-23 |
Self-aligned Patterning Methods Which Implement Directed Self-assembly
App 20190221428 - Burns; Sean D. ; et al. | 2019-07-18 |
Alternating hardmasks for tight-pitch line formation
Grant 10,312,103 - Burns , et al. | 2019-06-04 |
Self Aligned Pattern Formation Post Spacer Etchback In Tight Pitch Configurations
App 20180350599 - Burns; Sean D. ; et al. | 2018-12-06 |
Self aligned pattern formation post spacer etchback in tight pitch configurations
Grant 10,121,661 - Burns , et al. November 6, 2 | 2018-11-06 |
Selective Gas Etching For Self-aligned Pattern Transfer
App 20180286682 - ARNOLD; John Christopher ; et al. | 2018-10-04 |
Self aligned conductive lines with relaxed overlay
Grant 10,083,864 - Burns , et al. September 25, 2 | 2018-09-25 |
Alternating Hardmasks For Tight-pitch Line Formation
App 20180247824 - Burns; Sean D. ; et al. | 2018-08-30 |
Alternating Hardmasks For Tight-pitch Line Formation
App 20180247825 - Burns; Sean D. ; et al. | 2018-08-30 |
Self-aligned Pattern Formation For A Semiconductor Device
App 20180247864 - Burns; Sean D. ; et al. | 2018-08-30 |
Self-aligned pattern formation for a semiconductor device
Grant 10,056,290 - Burns , et al. August 21, 2 | 2018-08-21 |
Self-aligned Quadruple Patterning (saqp) For Routing Layouts Including Multi-track Jogs
App 20180233403 - Burns; Sean D. ; et al. | 2018-08-16 |
Self Aligned Conductive Lines With Relaxed Overlay
App 20180233408 - Burns; Sean D. ; et al. | 2018-08-16 |
Selective gas etching for self-aligned pattern transfer
Grant 10,032,632 - Arnold , et al. July 24, 2 | 2018-07-24 |
Self Aligned Pattern Formation Post Spacer Etchback In Tight Pitch Configurations
App 20180197738 - Burns; Sean D. ; et al. | 2018-07-12 |
Multi-angled deposition and masking for custom spacer trim and selected spacer removal
Grant 10,002,762 - Bergendahl , et al. June 19, 2 | 2018-06-19 |
Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs
Grant 9,991,156 - Burns , et al. June 5, 2 | 2018-06-05 |
Aligning conductive vias with trenches
Grant 9,972,533 - Burns , et al. May 15, 2 | 2018-05-15 |
Selective Gas Etching For Self-aligned Pattern Transfer
App 20180096846 - ARNOLD; John Christopher ; et al. | 2018-04-05 |
Self aligned pattern formation post spacer etchback in tight pitch configurations
Grant 9,934,970 - Burns , et al. April 3, 2 | 2018-04-03 |
Multi-angled Deposition And Masking For Custom Spacer Trim And Selected Spacer Removal
App 20180076033 - Bergendahl; Marc A. ; et al. | 2018-03-15 |
Multi-angled Deposition And Masking For Custom Spacer Trim And Selected Spacer Removal
App 20180076035 - Bergendahl; Marc A. ; et al. | 2018-03-15 |
Multi-angled Deposition And Masking For Custom Spacer Trim And Selected Spacer Removal
App 20180076034 - Bergendahl; Marc A. ; et al. | 2018-03-15 |
Self aligned conductive lines
Grant 9,911,647 - Burns , et al. March 6, 2 | 2018-03-06 |
Aligning Conductive Vias With Trenches
App 20180025943 - Burns; Sean D. ; et al. | 2018-01-25 |
Self Aligned Conductive Lines With Relaxed Overlay
App 20180005885 - Burns; Sean D. ; et al. | 2018-01-04 |
Self-aligned Pattern Formation For A Semiconductor Device
App 20180005875 - Burns; Sean D. ; et al. | 2018-01-04 |
Self aligned conductive lines
Grant 9,852,946 - Burns , et al. December 26, 2 | 2017-12-26 |
Self Aligned Conductive Lines
App 20170358492 - Burns; Sean D. ; et al. | 2017-12-14 |
Self Aligned Conductive Lines
App 20170358487 - Burns; Sean D. ; et al. | 2017-12-14 |
Self-aligned Quadruple Patterning (saqp) For Routing Layouts Including Multi-track Jogs
App 20170352585 - Burns; Sean D. ; et al. | 2017-12-07 |
Self aligned conductive lines
Grant 9,786,554 - Burns , et al. October 10, 2 | 2017-10-10 |
Method and structure for cut material selection
Grant 9,779,944 - Burns , et al. October 3, 2 | 2017-10-03 |
Aligning conductive vias with trenches
Grant 9,773,700 - Burns , et al. September 26, 2 | 2017-09-26 |
Self aligned conductive lines with relaxed overlay
Grant 9,607,886 - Burns , et al. March 28, 2 | 2017-03-28 |
Chimney cap
Grant 9,377,196 - Burns , et al. June 28, 2 | 2016-06-28 |
Dual hard mask lithography process
Grant 9,373,580 - Arnold , et al. June 21, 2 | 2016-06-21 |
Process of multiple exposures with spin castable films
Grant 9,058,997 - Burkhardt , et al. June 16, 2 | 2015-06-16 |
Dual hard mask lithography process
Grant 8,916,337 - Arnold , et al. December 23, 2 | 2014-12-23 |
Sidewall image transfer process
Grant 8,883,649 - Yin , et al. November 11, 2 | 2014-11-11 |
Chimney Cap
App 20140323025 - Burns; Sean D. ; et al. | 2014-10-30 |
Chimney cap
Grant 8,734,209 - Burns , et al. May 27, 2 | 2014-05-27 |
Dual Hard Mask Lithography Process
App 20140110846 - Arnold; John C. ; et al. | 2014-04-24 |
Sidewall image transfer process with multiple critical dimensions
Grant 8,673,165 - Raghunathan , et al. March 18, 2 | 2014-03-18 |
Organic graded spin on BARC compositions for high NA lithography
Grant 8,652,762 - Goldfarb , et al. February 18, 2 | 2014-02-18 |
Process of making a lithographic structure using antireflective materials
Grant 8,609,322 - Angelopoulos , et al. December 17, 2 | 2013-12-17 |
Self aligning via patterning
Grant 8,518,824 - Arnold , et al. August 27, 2 | 2013-08-27 |
Dual Hard Mask Lithography Process
App 20130216776 - Arnold; John C. ; et al. | 2013-08-22 |
Tone Inversion With Partial Underlayer Etch For Semiconductor Device Formation
App 20130175658 - Arnold; John C. ; et al. | 2013-07-11 |
Tone inversion with partial underlayer etch for semiconductor device formation
Grant 8,470,711 - Arnold , et al. June 25, 2 | 2013-06-25 |
Sidewall Image Transfer Process With Multiple Critical Dimensions
App 20130089984 - Raghunathan; Sudharshanan ; et al. | 2013-04-11 |
Process Of Making A Lithographic Structure Using Antireflective Materials
App 20130017486 - Angelopoulos; Marie ; et al. | 2013-01-17 |
Antireflective hardmask composition and a method of preparing a patterned material using same
Grant 8,323,871 - Burns , et al. December 4, 2 | 2012-12-04 |
Self Aligning Via Patterning
App 20120302057 - Arnold; John Christopher ; et al. | 2012-11-29 |
Sidewall Image Transfer Process Employing A Cap Material Layer For A Metal Nitride Layer
App 20120282779 - Arnold; John C. ; et al. | 2012-11-08 |
Self aligning via patterning
Grant 8,298,943 - Arnold , et al. October 30, 2 | 2012-10-30 |
Sidewall image transfer process employing a cap material layer for a metal nitride layer
Grant 8,298,954 - Arnold , et al. October 30, 2 | 2012-10-30 |
Performing optical proximity correction by incorporating critical dimension correction
Grant 8,302,034 - Burns , et al. October 30, 2 | 2012-10-30 |
Process of making a lithographic structure using antireflective materials
Grant 8,293,454 - Angelopoulos , et al. October 23, 2 | 2012-10-23 |
Sidewall Image Transfer Process
App 20120244711 - Yin; Yunpeng ; et al. | 2012-09-27 |
Process of Multiple Exposures With Spin Castable Films
App 20120214311 - Burkhardt; Martin ; et al. | 2012-08-23 |
Organic Graded Spin On Barc Compositions For High Na Lithography
App 20120205787 - Goldfarb; Dario L. ; et al. | 2012-08-16 |
Tone Inversion With Partial Underlayer Etch
App 20120126358 - Arnold; John C. ; et al. | 2012-05-24 |
Organic graded spin on BARC compositions for high NA lithography
Grant 8,137,874 - Goldfarb , et al. March 20, 2 | 2012-03-20 |
Mask and etch process for pattern assembly
Grant 8,119,531 - Arnold , et al. February 21, 2 | 2012-02-21 |
Substrate planarization with imprint materials and processes
Grant 8,084,185 - Burns , et al. December 27, 2 | 2011-12-27 |
Characterizing films using optical filter pseudo substrate
Grant 8,080,849 - Zangooie , et al. December 20, 2 | 2011-12-20 |
Method for removing residues from a patterned substrate
Grant 8,053,368 - Burns , et al. November 8, 2 | 2011-11-08 |
Photolithography Focus Improvement By Reduction Of Autofocus Radiation Transmission Into Substrate
App 20110256486 - Brunner; Timothy A. ; et al. | 2011-10-20 |
Antireflective Hardmask Composition and a Method of Preparing a Patterned Material Using Same
App 20110207047 - Burns; Sean D. ; et al. | 2011-08-25 |
Dual exposure track only pitch split process
Grant 7,994,060 - Burns , et al. August 9, 2 | 2011-08-09 |
Process of making a semiconductor device using multiple antireflective materials
Grant 7,968,270 - Angelopoulos , et al. June 28, 2 | 2011-06-28 |
Multiple exposure lithography method incorporating intermediate layer patterning
Grant 7,914,975 - Burns , et al. March 29, 2 | 2011-03-29 |
Dual Exposure Track Only Pitch Split Process
App 20110049680 - Burns; Sean D. ; et al. | 2011-03-03 |
Photomask and method of making thereof
Grant 7,892,705 - Burns , et al. February 22, 2 | 2011-02-22 |
Graded spin-on organic antireflective coating for photolithography
Grant 7,816,069 - Brodsky , et al. October 19, 2 | 2010-10-19 |
Performing Optical Proximity Correction By Incorporating Critical Dimension Correction
App 20100199256 - Burns; Ryan L. ; et al. | 2010-08-05 |
Substrate Planarization With Imprint Materials And Processes
App 20100173247 - Burns; Sean D. ; et al. | 2010-07-08 |
Method For Removing Residues From A Patterned Substrate
App 20090246958 - Burns; Sean D. ; et al. | 2009-10-01 |
Graded spin-on organic antireflective coating for photolithography
Grant 7,588,879 - Brodsky , et al. September 15, 2 | 2009-09-15 |
Photolithography Focus Improvement By Reduction Of Autofocus Radiation Transmission Into Substrate
App 20090208865 - Brunner; Timothy A. ; et al. | 2009-08-20 |
Characterizing Films Using Optical Filter Pseudo Substrate
App 20090186427 - Zangooie; Shahin ; et al. | 2009-07-23 |
Organic Graded Spin On Barc Compositions For High Na Lithography
App 20090186294 - Goldfarb; Dario L. ; et al. | 2009-07-23 |
Process of multiple exposures with spin castable film
App 20090104566 - Burkhardt; Martin ; et al. | 2009-04-23 |
Photomask And Method Of Making Thereof
App 20090087755 - Burns; Sean D. ; et al. | 2009-04-02 |
Process Of Making A Lithographic Structure Using Antireflective Materials
App 20090061355 - Angelopoulos; Marie ; et al. | 2009-03-05 |
Process of making a semiconductor device using multiple antireflective materials
Grant 7,485,573 - Angelopoulos , et al. February 3, 2 | 2009-02-03 |
Process Of Making A Semiconductor Device Using Multiple Antireflective Materials
App 20080311508 - Angelopoulos; Marie ; et al. | 2008-12-18 |
Low refractive index polymers as underlayers for silicon-containing photoresists
Grant 7,439,302 - Huang , et al. October 21, 2 | 2008-10-21 |
Multiple Exposure Lithography Method Incorporating Intermediate Layer Patterning
App 20080254633 - Burns; Sean D. ; et al. | 2008-10-16 |
Graded Spin-on Organic Antireflective Coating for Photolithography
App 20080213707 - Brodsky; Colin J. ; et al. | 2008-09-04 |
Antireflective composition and process of making a lithographic structure
Grant 7,326,442 - Babich , et al. February 5, 2 | 2008-02-05 |
Low refractive index polymers as underlayers for silicon-containing photoresists
Grant 7,326,523 - Huang , et al. February 5, 2 | 2008-02-05 |
Silicon containing TARC/barrier layer
Grant 7,320,855 - Huang , et al. January 22, 2 | 2008-01-22 |
Graded spin-on organic antireflective coating for photolithography
App 20080008955 - Brodsky; Colin J. ; et al. | 2008-01-10 |
Chimney cap
App 20070202790 - Burns; Sean D. ; et al. | 2007-08-30 |
Process of making a semiconductor device using multiple antireflective materials
App 20070196748 - Angelopoulos; Marie ; et al. | 2007-08-23 |
Process of making a lithographic structure using antireflective materials
App 20070015082 - Angelopoulos; Marie ; et al. | 2007-01-18 |
Antireflective composition and process of making a lithographic structure
App 20070015083 - Babich; Katherina E. ; et al. | 2007-01-18 |
Low refractive index polymers as underlayers for silicon-containing photoresists
App 20060134547 - Huang; Wu-Song ; et al. | 2006-06-22 |
Low refractive index polymers as underlayers for silicon-containing photoresists
App 20060134546 - Huang; Wu-Song ; et al. | 2006-06-22 |
Silicon containing TARC / barrier layer
App 20060093959 - Huang; Wu-Song S. ; et al. | 2006-05-04 |
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