Burkhart; Vincent E.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Burkhart; Vincent E..The latest application filed is for "rf tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks".

Company Profile

1.24.12

Burkhart; Vincent E. - Cupertino CA
Burkhart; Vincent E. - San Jose CA US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Rf Tuning Systems Including Tuning Circuits Having Impedances For Setting And Adjusting Parameters Of Electrodes In Electrostatic Chucks App 20220044909 - French; David ; et al.	2022-02-10
RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks Grant 11,183,368 - French , et al. November 23, 2	2021-11-23
Rf Tuning Systems Including Tuning Circuits Having Impedances For Setting And Adjusting Parameters Of Electrodes In Electrostati App 20200043703 - French; David ; et al.	2020-02-06
Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery Grant 9,447,499 - Roy , et al. September 20, 2	2016-09-20
High temperature electrostatic chuck with radial thermal chokes Grant 9,337,067 - Roy , et al. May 10, 2	2016-05-10
Apparatus And Method For Uniform Irradiation Using Secondary Irradiant Energy From A Single Light Source App 20150163860 - Burkhart; Vincent E. ; et al.	2015-06-11
Mechanism for continuously varying radial position of a magnetron Grant 8,685,215 - Miller , et al. April 1, 2	2014-04-01
Dual Plenum, Axi-symmetric Showerhead With Edge-to-center Gas Delivery App 20130341433 - Roy; Shambhu N. ; et al.	2013-12-26
High Temperature Electrostatic Chuck With Radial Thermal Chokes App 20120285658 - Roy; Shambhu N. ; et al.	2012-11-15
Mechanism for continuously varying radial position of a magnetron App 20100243440 - Miller; Keith A. ; et al.	2010-09-30
Magnetron having continuously variable radial position Grant 7,736,473 - Miller , et al. June 15, 2	2010-06-15
Liquid isolation of contact rings Grant 7,138,039 - Burkhart , et al. November 21, 2	2006-11-21
Method and apparatus for sealing electrical contacts during an electrochemical deposition process Grant 7,067,045 - Keigler , et al. June 27, 2	2006-06-27
Magnetron having continuously variable radial position App 20060076232 - Miller; Keith A. ; et al.	2006-04-13
Selectable dual position magnetron Grant 7,018,515 - Gung , et al. March 28, 2	2006-03-28
Selectable dual position magnetron App 20050211548 - Gung, Tza-Jing ; et al.	2005-09-29
Method for removing electrolyte from electrical contacts and wafer touching areas Grant 6,869,516 - Lubomirsky , et al. March 22, 2	2005-03-22
Liquid isolation of contact rings App 20040140203 - Burkhart, Vincent E. ; et al.	2004-07-22
Method for removing electrolyte from electrical contacts and wafer touching areas App 20040074777 - Lubomirsky, Dmitry ; et al.	2004-04-22
Method and apparatus for sealing electrical contacts during an electrochemical deposition process App 20040074762 - Keigler, Arthur ; et al.	2004-04-22
Method and apparatus for reducing migration of conductive material on a component Grant 6,488,820 - Burkhart December 3, 2	2002-12-03
Method and apparatus for reducing thermal gradients within a substrate support Grant 6,469,283 - Burkhart , et al. October 22, 2	2002-10-22
Laminated ceramic with multilayer electrodes and method of fabrication Grant 6,303,879 - Burkhart October 16, 2	2001-10-16
Apparatus for wafer detection Grant 6,075,375 - Burkhart , et al. June 13, 2	2000-06-13
Electrostatic chuck with improved spacing mask and workpiece detection device Grant D425,919 - Burkhart , et al. May 30, 2	2000-05-30
Electrostatic chuck with improved spacing and charge migration reduction mask Grant D420,022 - Burkhart , et al. February 1, 2	2000-02-01
Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck Grant 5,923,521 - Burkhart July 13, 1	1999-07-13
Method and apparatus for predicting failure of an eletrostatic chuck Grant 5,886,865 - Parkhe , et al. March 23, 1	1999-03-23
Insulated wafer spacing mask for a substrate support chuck and method of fabricating same Grant 5,825,607 - Burkhart October 20, 1	1998-10-20
Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck Grant 5,764,471 - Burkhart June 9, 1	1998-06-09
Monopolar electrostatic chuck having an electrode in contact with a workpiece Grant 5,745,332 - Burkhart , et al. April 28, 1	1998-04-28
Wafer spacing mask for a substrate support chuck and method of fabricating same Grant 5,656,093 - Burkhart , et al. August 12, 1	1997-08-12

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