BURKHART; Vincent

Patent Applications and Registrations

Patent applications and USPTO patent grants for BURKHART; Vincent.The latest application filed is for "systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber".

Company Profile

5.5.9

BURKHART; Vincent - Cupertino CA
Burkhart; Vincent - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Systems And Methods For Filtering Radio Frequencies From A Signal Of A Thermocouple And Controlling A Temperature Of An Electrode In A Plasma Chamber App 20220084776 - BURKHART; Vincent ; et al.	2022-03-17
Electrostatic chucking pedestal with substrate backside purging and thermal sinking Grant 11,232,966 - Thomas , et al. January 25, 2	2022-01-25
Protective Coating For Electrostatic Chucks App 20210333715 - TOPPING; Stephen ; et al.	2021-10-28
Protective coating for electrostatic chucks Grant 11,086,233 - Topping , et al. August 10, 2	2021-08-10
Electrostatic Chuck (esc) Pedestal Voltage Isolation App 20210043490 - Vasquez; Miguel Benjamin ; et al.	2021-02-11
Substrate support with increasing areal density and corresponding method of fabricating Grant 10,832,936 - Woytowitz , et al. November 10, 2	2020-11-10
Chemical Vapor Deposition Tool For Preventing Or Suppressing Arcing App 20200048770 - SAKIYAMA; Yukinori ; et al.	2020-02-13
Protective Coating For Electrostatic Chucks App 20190294050 - TOPPING; Stephen ; et al.	2019-09-26
Electrostatic Chucking Pedestal With Substrate Backside Purging And Thermal Sinking App 20190237353 - THOMAS; Timothy S. ; et al.	2019-08-01
Substrate Support With Increasing Areal Density And Corresponding Method Of Fabricating App 20180033672 - Woytowitz; Peter ; et al.	2018-02-01
Anode impedance control through electrolyte flow control Grant 6,855,235 - Herchen , et al. February 15, 2	2005-02-15
Anode slime reduction method while maintaining low current Grant 6,843,897 - Herchen , et al. January 18, 2	2005-01-18
Anode slime reduction method while maintaining low current App 20030221956 - Herchen, Harald ; et al.	2003-12-04
Anode impedance control through electrolyte flow control App 20030221957 - Herchen, Harald ; et al.	2003-12-04

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