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Patent applications and USPTO patent grants for Burkhart; Christopher William.The latest application filed is for "moving substrate transfer chamber".
Patent | Date |
---|---|
Moving substrate transfer chamber Grant 11,282,737 - Brown , et al. March 22, 2 | 2022-03-22 |
Moving Substrate Transfer Chamber App 20200381285 - BROWN; Daniel Arthur ;   et al. | 2020-12-03 |
Additively manufactured gas distribution manifold Grant 10,794,519 - Burkhart , et al. October 6, 2 | 2020-10-06 |
Vacuum robot positioning system with reduced sensitivity to chamber pressure Grant 10,483,142 - Tan , et al. Nov | 2019-11-19 |
Additively Manufactured Gas Distribution Manifold App 20190211955 - Burkhart; Christopher William ;   et al. | 2019-07-11 |
Additively manufactured gas distribution manifold Grant 10,215,317 - Burkhart , et al. Feb | 2019-02-26 |
Additively manufactured gas distribution manifold Grant 9,879,795 - Burkhart , et al. January 30, 2 | 2018-01-30 |
Additively Manufactured Gas Distribution Manifold App 20170203511 - Burkhart; Christopher William ;   et al. | 2017-07-20 |
Additively Manufactured Gas Distribution Manifold App 20170204989 - Burkhart; Christopher William ;   et al. | 2017-07-20 |
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