Burkhart; Christopher W.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Burkhart; Christopher W..The latest application filed is for "reduced footprint wafer handling platform".
- Burkhart; Christopher W. - Los Gatos CA
- Burkhart; Christopher W - Los Gatos CA
- Burkhart; Christopher W. - San Jose CA
- Burkhart; Christopher W. - Los Altos CA
| Patent | Date |
|---|---|
| Reduced Footprint Wafer Handling Platform App 20210272832 - Burkhart; Christopher W. ; et al. | 2021-09-02 |
| Dual-mode Autonomous Guided Vehicle App 20210080968 - Burkhart; Christopher W. ; et al. | 2021-03-18 |
| Gas-purged vacuum valve Grant 7,754,014 - Gochberg , et al. July 13, 2 | 2010-07-13 |
| Gas-purged Vacuum Valve App 20090291207 - Gochberg; Lawrence A. ; et al. | 2009-11-26 |
| Gas-purged vacuum valve Grant 7,585,370 - Gochberg , et al. September 8, 2 | 2009-09-08 |
| Gas-purged Vacuum Valve App 20080168947 - Gochberg; Lawrence A. ; et al. | 2008-07-17 |
| MESC seal, O-ring carrier Grant 6,722,665 - Burkhart , et al. April 20, 2 | 2004-04-20 |
| Flatted object passive aligner Grant 6,682,295 - Blank , et al. January 27, 2 | 2004-01-27 |
| Gas-purged vacuum valve App 20040007188 - Burkhart, Christopher W. ; et al. | 2004-01-15 |
| Gas-purged vacuum valve Grant 6,602,346 - Gochberg , et al. August 5, 2 | 2003-08-05 |
| Flatted object passive aligner App 20020197144 - Blank, Richard M. ; et al. | 2002-12-26 |
| Gas-based substrate deposition protection Grant 5,925,411 - van de Ven , et al. July 20, 1 | 1999-07-20 |
| Apparatus for preventing deposition on frontside peripheral region and edge of wafer in chemical vapor deposition apparatus Grant 5,882,417 - van de Ven , et al. March 16, 1 | 1999-03-16 |
| Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus Grant 5,843,233 - van de Ven , et al. December 1, 1 | 1998-12-01 |
| Device for removing dissolved gas from a liquid Grant 5,772,736 - van Schravendijk , et al. June 30, 1 | 1998-06-30 |
| Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus Grant 5,769,951 - van de Ven , et al. June 23, 1 | 1998-06-23 |
| Device for removing dissolved gas from a liquid Grant 5,645,625 - van Schravendijk , et al. July 8, 1 | 1997-07-08 |
| Apparatus for supporting a substrate and introducing gas flow doximate to an edge of the substrate Grant 5,620,525 - van de Ven , et al. April 15, 1 | 1997-04-15 |
| Wafer surface protection in a gas deposition process Grant 5,578,532 - van de Ven , et al. November 26, 1 | 1996-11-26 |
| Device for removing dissolved gas from a liquid Grant 5,425,803 - van Schravendijk , et al. June 20, 1 | 1995-06-20 |
| Gas-based backside protection during substrate processing Grant 5,374,594 - van de Ven , et al. December 20, 1 | 1994-12-20 |
| Gas-based substrate protection during processing Grant 5,238,499 - van de Ven , et al. August 24, 1 | 1993-08-24 |
| Gas-based backside protection during substrate processing Grant 5,230,741 - van de Ven , et al. * July 27, 1 | 1993-07-27 |
| Sheet feeding mechanism Grant 4,575,069 - Burkhart March 11, 1 | 1986-03-11 |
| Gas separation chamber and portable leak detection system Grant 4,459,844 - Burkhart July 17, 1 | 1984-07-17 |
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