Burkart; Stefan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Burkart; Stefan.The latest application filed is for "method for producing facet mirrors and projection exposure apparatus".

Company Profile

0.7.7

Burkart; Stefan - Heidenheim DE
Burkart; Stefan - Schermbeck N/A DE
Burkart; Stefan - Rottenberg DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Optical integrator for an illumination system of a microlithographic projection exposure apparatus Grant 8,520,307 - Wolf , et al. August 27, 2	2013-08-27
Method For Producing Facet Mirrors And Projection Exposure Apparatus App 20130100426 - Warm; Berndt ; et al.	2013-04-25
Rotor-shaft integrated generator drive apparatus Grant 8,358,029 - Burkart January 22, 2	2013-01-22
Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elements Grant 8,163,632 - Weiser , et al. April 24, 2	2012-04-24
Optical Integrator For An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20110083542 - Wolf; Oliver ; et al.	2011-04-14
Rotor-shaft Integrated Generator Drive Apparatus App 20110068583 - Burkart; Stefan	2011-03-24
Optical integrator for an illumination system of a microlithographic projection exposure apparatus Grant 7,880,969 - Wolf , et al. February 1, 2	2011-02-01
Method And Apparatus For Producing An Element Having At Least One Freeform Surface Having A High Accuracy Of Form And A Low Surface Roughness App 20100033696 - BOEHM; Thure ; et al.	2010-02-11
Method For Producing Facet Mirrors And Projection Exposure Apparatus App 20100007866 - Warm; Berndt ; et al.	2010-01-14
Optical Integrator For An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20090021839 - Wolf; Oliver ; et al.	2009-01-22
Irradiation With High Energy Ions For Surface Structuring And Treatment Of Surface Proximal Sections Of Optical Elements App 20080149858 - Weiser; Martin ; et al.	2008-06-26
Caston piston Grant 6,739,239 - Burkart , et al. May 25, 2	2004-05-25

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