Burgess; Stephen Robert
Patent Applications and Registrations
Patent applications and USPTO patent grants for Burgess; Stephen Robert.The latest application filed is for "methods of depositing sio2 films".
- Burgess; Stephen Robert - Ebbw Vale GB
- Burgess; Stephen Robert - Gwent GB
| Patent | Date |
|---|---|
| Methods Of Depositing Sio2 Films App 20110318502 - Giles; Kathrine ; et al. | 2011-12-29 |
| Method of forming amorphous TiN by thermal chemical vapor deposition (CVD) Grant 7,732,307 - Burgess , et al. June 8, 2 | 2010-06-08 |
| Magnetron sputtering Grant 7,378,001 - Goergens , et al. May 27, 2 | 2008-05-27 |
| Method of processing a workpiece Grant 7,282,158 - Burgess , et al. October 16, 2 | 2007-10-16 |
| Amorphus TiN App 20050275101 - Burgess, Stephen Robert ; et al. | 2005-12-15 |
| Film deposition App 20050269200 - Burgess, Stephen Robert ; et al. | 2005-12-08 |
| Method of processing a workpiece App 20050211666 - Burgess, Stephen Robert ; et al. | 2005-09-29 |
| Method of forming a patterned metal layer Grant 6,933,099 - O'Sullivan , et al. August 23, 2 | 2005-08-23 |
| Barrier layer and method of depositing a barrier layer Grant 6,860,975 - Donohue , et al. March 1, 2 | 2005-03-01 |
| Methods of forming tungsten or tungsten containing films App 20040214417 - Rich, Paul ; et al. | 2004-10-28 |
| Magnetron sputtering App 20040099524 - Georgens, Carsten ; et al. | 2004-05-27 |
| Magnetron sputtering apparatus App 20040050690 - Green, Gordon Robert ; et al. | 2004-03-18 |
| Sputtering apparatus Grant 6,660,140 - Buchanan , et al. December 9, 2 | 2003-12-09 |
| Barrier layer and method of depositing a barrier layer App 20030162391 - Donohue, Hilke ; et al. | 2003-08-28 |
| Method of forming a patterned metal layer App 20030091937 - O'Sullivan, James Francis ; et al. | 2003-05-15 |
| Sputtering Apparatus App 20020000374 - BUCHANAN, KEITH EDWARD ; et al. | 2002-01-03 |
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