Burbank; Daniel Nathan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Burbank; Daniel Nathan.The latest application filed is for "particle suppression systems and methods".

Company Profile

3.12.12

Burbank; Daniel Nathan - Ridgefield CT
Burbank; Daniel Nathan - Wilton CT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Particle suppression systems and methods Grant 11,204,558 - Huang , et al. December 21, 2	2021-12-21
Reticle clamping device Grant 10,761,435 - Zordan , et al. Sep	2020-09-01
Particle Suppression Systems And Methods App 20200142326 - HUANG; Yang-Shan ; et al.	2020-05-07
Membrane assembly and particle trap Grant 10,585,359 - Albright , et al.	2020-03-10
Reticle cooling by non-uniform gas flow Grant 10,423,081 - Venturino , et al. Sept	2019-09-24
A Membrane Assembly and Particle Trap App 20190171119 - ALBRIGHT; Ronald Peter ; et al.	2019-06-06
Gas flow optimization in reticle stage environment Grant 10,031,428 - Cuypers , et al. July 24, 2	2018-07-24
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature Grant 9,977,351 - Ebert , et al. May 22, 2	2018-05-22
Patterning device manipulating system and lithographic apparatuses Grant 9,910,368 - Valentin , et al. March 6, 2	2018-03-06
Reticle Cooling by Non-Uniform Gas Flow App 20170363973 - VENTURINO; Thomas ; et al.	2017-12-21
Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature App 20170307986 - EBERT; Earl William ; et al.	2017-10-26
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature Grant 9,766,557 - Ebert , et al. September 19, 2	2017-09-19
Patterning device support and lithographic apparatus Grant 9,740,112 - Sinharoy , et al. August 22, 2	2017-08-22
Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature App 20170160652 - EBERT; Earl William ; et al.	2017-06-08
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature Grant 9,632,433 - Ebert, Jr. , et al. April 25, 2	2017-04-25
Reticle cooling system in a lithographic apparatus Grant 9,632,434 - Ebert, Jr. , et al. April 25, 2	2017-04-25
Determining position and curvature information directly from a surface of a patterning device Grant 9,377,700 - Schuster , et al. June 28, 2	2016-06-28
Gas Flow Optimization in Reticle Stage Environment App 20150355557 - CUYPERS; Koen ; et al.	2015-12-10
Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature App 20150301456 - EBERT, JR.; Earl William ; et al.	2015-10-22
Patterning Device Support and Lithographic Apparatus App 20150277240 - Sinharoy; Arindam ; et al.	2015-10-01
Patterning Device Manipulating System and Lithographic Apparatuses App 20150277241 - Valentin; Christiaan Louis ; et al.	2015-10-01
Reticle Cooling System In A Lithographic Apparatus App 20150241796 - EBERT, JR.; Earl William ; et al.	2015-08-27
Heating and Cooling Systems in a Lithographic Apparatus App 20150192856 - Onvlee; Johannes ; et al.	2015-07-09
Determining Position And Curvature Information Directly From A Surface Of A Patterning Device App 20140307246 - Schuster; Mark Josef ; et al.	2014-10-16

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.