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Equipment front end module for transferring wafers and method of transferring wafers Grant 9,818,633 - Lill , et al. November 14, 2 | 2017-11-14 |
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Methods and Systems for Determining a Critical Dimension and Overlay of a Specimen App 20130314710 - Levy; Ady ;   et al. | 2013-11-28 |
Methods and systems for determining a critical dimension and overlay of a specimen Grant 8,502,979 - Levy , et al. August 6, 2 | 2013-08-06 |
Methods And Systems For Determining A Critical Dimension And Overlay Of A Specimen App 20130039460 - Levy; Ady ;   et al. | 2013-02-14 |
Methods and systems for determining a critical dimension and overlay of a specimen Grant 8,179,530 - Levy , et al. May 15, 2 | 2012-05-15 |
Methods And Systems For Determining A Critical Dimension And Overlay Of A Specimen App 20100271621 - Levy; Ady ;   et al. | 2010-10-28 |
Methods and systems for determining a critical dimension and overlay of a specimen Grant 7,751,046 - Levy , et al. July 6, 2 | 2010-07-06 |
Methods and systems for determining a presence of macro and micro defects on a specimen Grant 7,460,981 - Bultman , et al. December 2, 2 | 2008-12-02 |
Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography Grant 7,349,090 - Wack , et al. March 25, 2 | 2008-03-25 |
Methods and systems for determining a thin film characteristic and an electrical property of a specimen Grant 7,196,782 - Fielden , et al. March 27, 2 | 2007-03-27 |
Methods and systems for determining a composition and a thickness of a specimen Grant 7,139,083 - Fielden , et al. November 21, 2 | 2006-11-21 |
Methods and systems for determining an adhesion characteristic and a thickness of a specimen Grant 7,130,029 - Wack , et al. October 31, 2 | 2006-10-31 |
Methods and systems for determining a presence of defects and a thin film characteristic of a specimen Grant 7,106,425 - Bultman , et al. September 12, 2 | 2006-09-12 |
Methods and systems for determining a presence of macro and micro defects on a specimen App 20060072807 - Bultman; Gary ;   et al. | 2006-04-06 |
Methods and systems for determining overlay and flatness of a specimen Grant 7,006,235 - Levy , et al. February 28, 2 | 2006-02-28 |
Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen Grant 6,950,196 - Fielden , et al. September 27, 2 | 2005-09-27 |
Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process Grant 6,946,394 - Fielden , et al. September 20, 2 | 2005-09-20 |
Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen Grant 6,919,957 - Nikoonahad , et al. July 19, 2 | 2005-07-19 |
Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen Grant 6,917,419 - Fielden , et al. July 12, 2 | 2005-07-12 |
Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process Grant 6,917,433 - Levy , et al. July 12, 2 | 2005-07-12 |
Methods and systems for determining an implant characteristic and a presence of defects on a specimen Grant 6,891,610 - Nikoonahad , et al. May 10, 2 | 2005-05-10 |
Methods and systems for determining a critical dimension and overlay of a specimen Grant 6,891,627 - Levy , et al. May 10, 2 | 2005-05-10 |
Methods and systems for determining a presence of macro and micro defects on a specimen Grant 6,829,559 - Bultman , et al. December 7, 2 | 2004-12-07 |
Methods and systems for determining a critical dimension and overlay of a specimen App 20040235205 - Levy, Ady ;   et al. | 2004-11-25 |
Methods and systems for determining a presence of macro defects and overlay of a specimen Grant 6,818,459 - Wack , et al. November 16, 2 | 2004-11-16 |
Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation Grant 6,812,045 - Nikoonahad , et al. November 2, 2 | 2004-11-02 |
Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen Grant 6,806,951 - Wack , et al. October 19, 2 | 2004-10-19 |
Methods and systems for determining a critical dimension an a presence of defects on a specimen Grant 6,782,337 - Wack , et al. August 24, 2 | 2004-08-24 |
Methods and systems for determining a presence of macro defects and overlay of a specimen App 20040115843 - Wack, Dan ;   et al. | 2004-06-17 |
Methods and systems for determining a presence of macro and micro defects on a specimen App 20040092045 - Bultman, Gary ;   et al. | 2004-05-13 |
Methods and systems for determining a critical dimension and a thin film characteristic of a specimen App 20040073398 - Nikoonahad, Mehrdad ;   et al. | 2004-04-15 |
Methods and systems for determining at least four properties of a specimen Grant 6,694,284 - Nikoonahad , et al. February 17, 2 | 2004-02-17 |
Methods and systems for determining a presence of macro defects and overlay of a specimen Grant 6,673,637 - Wack , et al. January 6, 2 | 2004-01-06 |
Methods and systems for determining a critical dimension and a thin film characteristic of a specimen Grant 6,633,831 - Nikoonahad , et al. October 14, 2 | 2003-10-14 |
Methods and systems for determining overlay and flatness of a specimen App 20030011786 - Levy, Ady ;   et al. | 2003-01-16 |
Methods and systems for determining a characteristic of micro defects on a specimen App 20020190207 - Levy, Ady ;   et al. | 2002-12-19 |
Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process App 20020188417 - Levy, Ady ;   et al. | 2002-12-12 |
Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen App 20020180985 - Wack, Dan ;   et al. | 2002-12-05 |
Methods and systems for determining a thin film characteristic and an electrical property of a specimen App 20020179864 - Fielden, John ;   et al. | 2002-12-05 |
Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen App 20020179867 - Fielden, John ;   et al. | 2002-12-05 |
Methods and systems for determining a presence of macro defects and overlay of a specimen App 20020182760 - Wack, Dan ;   et al. | 2002-12-05 |
Methods and systems for determining an adhesion characteristic and a thickness of a specimen App 20020180961 - Wack, Dan ;   et al. | 2002-12-05 |
Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen App 20020180986 - Nikoonahad, Mehrdad ;   et al. | 2002-12-05 |
Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography App 20020106848 - Wack, Dan ;   et al. | 2002-08-08 |
Methods and systems for determining a critical dimension and a presence of defects on a specimen App 20020107650 - Wack, Dan ;   et al. | 2002-08-08 |
Methods and systems for determining a critical dimension and a thin film characteristic of a specimen App 20020107660 - Nikoonahad, Mehrdad ;   et al. | 2002-08-08 |
Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process App 20020102749 - Fielden, John ;   et al. | 2002-08-01 |
Methods and systems for determining a composition and a thickness of a specimen App 20020103564 - Fielden, John ;   et al. | 2002-08-01 |
Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen App 20020097406 - Fielden, John ;   et al. | 2002-07-25 |
Methods and systems for determining an implant characterstic and a presence of defects on a specimen App 20020093648 - Nikoonahad, Mehrdad ;   et al. | 2002-07-18 |