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Patent applications and USPTO patent grants for Bukhman; Yefim.The latest application filed is for "laser assisted plasma chemical etching method".
Patent | Date |
---|---|
Laser assisted plasma chemical etching method Grant 5,795,493 - Bukhman , et al. August 18, 1 | 1998-08-18 |
Distributed polishing head Grant 5,230,184 - Bukhman July 27, 1 | 1993-07-27 |
Method for selectively etching a feature Grant 5,116,460 - Bukhman May 26, 1 | 1992-05-26 |
Magnetically enhanced plasma system Grant 4,740,268 - Bukhman April 26, 1 | 1988-04-26 |
Self-aligned transistor method Grant 4,728,606 - Bukhman , et al. March 1, 1 | 1988-03-01 |
Process for etching tapered polyimide vias Grant 4,560,436 - Bukhman , et al. December 24, 1 | 1985-12-24 |
Method for forming semiconductor devices Grant 4,523,976 - Bukhman June 18, 1 | 1985-06-18 |
Process for fabricating semiconductor device Grant 4,523,372 - Balda , et al. June 18, 1 | 1985-06-18 |
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