Buis; Edwin Johan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Buis; Edwin Johan.The latest application filed is for "arrangement for the actuation of at least one element in an optical system".

Company Profile

0.29.22

Buis; Edwin Johan - Belfeld NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices Grant 9,785,051 - Van Schoot , et al. October 10, 2	2017-10-10
Arrangement for the actuation of at least one element in an optical system Grant 9,651,772 - Hauf , et al. May 16, 2	2017-05-16
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices Grant 9,494,878 - Buis , et al. November 15, 2	2016-11-15
Arrangement For The Actuation Of At Least One Element In An Optical System App 20150309305 - Hauf; Markus ; et al.	2015-10-29
Planar motor and lithographic apparatus comprising such planar motor Grant 9,172,294 - Hol , et al. October 27, 2	2015-10-27
Actuation Mechanism, Optical Apparatus, Lithography Apparatus And Method Of Manufacturing Devices App 20150277233 - Van Schoot; Jan Bernard Plechelmus ; et al.	2015-10-01
Actuation Mechanism, Optical Apparatus, Lithography Apparatus and Method of Manufacturing Devices App 20150261093 - Buis; Edwin Johan ; et al.	2015-09-17
Actuator Grant 9,136,151 - Van Der Blij , et al. September 15, 2	2015-09-15
Illumination system, lithographic apparatus and method of adjusting an illumination mode Grant 8,867,021 - De Vries , et al. October 21, 2	2014-10-21
Optical apparatus, and method of orienting a reflective element Grant 8,817,232 - Buis , et al. August 26, 2	2014-08-26
Mountings for rotation of array of reflective elements and lithographic apparatus incorporating same Grant 8,757,823 - Buis , et al. June 24, 2	2014-06-24
Lithographic apparatus and method Grant 8,724,081 - De Vries , et al. May 13, 2	2014-05-13
Actuator system, lithographic apparatus, method of controlling the position of a component and device manufacturing method Grant 8,634,062 - De Vries , et al. January 21, 2	2014-01-21
Planar Motor And Lithographic Apparatus Comprising Such Planar Motor App 20120249991 - HOL; Sven Antoin Johan ; et al.	2012-10-04
Object support positioning device and lithographic apparatus Grant 8,279,408 - Buis October 2, 2	2012-10-02
Actuator App 20120162628 - Van Der Blij; Fredrik Wilhelm ; et al.	2012-06-28
Illumination System, Lithographic Apparatus And Method Of Adjusting An Illumination Mode App 20120154777 - De Vries; Gosse Charles ; et al.	2012-06-21
Optical Apparatus, And Method Of Orienting A Reflective Element App 20120147345 - Buis; Edwin Johan ; et al.	2012-06-14
Mountings For Rotation Of Array Of Reflective Elements And Lithographic Apparatus Incorporating Same App 20120105989 - Buis; Edwin Johan ; et al.	2012-05-03
Lithographic Apparatus And Method App 20110205516 - De Vries; Gosse Charles ; et al.	2011-08-25
Actuator System, Lithographic Apparatus, Method of Controlling the Position of a Component and Device Manufacturing Method App 20100149506 - DE VRIES; Gosse Charles ; et al.	2010-06-17
Lithographic apparatus with rotation filter device Grant 7,700,930 - Buis , et al. April 20, 2	2010-04-20
Object Support Positioning Device And Lithographic Apparatus App 20090323038 - BUIS; Edwin Johan	2009-12-31
Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method Grant 7,629,593 - Buis , et al. December 8, 2	2009-12-08
Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device Grant 7,602,472 - Buis , et al. October 13, 2	2009-10-13
Lithographic apparatus and device manufacturing method Grant 7,518,705 - Verweij , et al. April 14, 2	2009-04-14
Lithographic apparatus with rotation filter device App 20090073401 - Buis; Edwin Johan ; et al.	2009-03-19
Lithographic apparatus and device manufacturing method Grant 7,492,440 - Zaal , et al. February 17, 2	2009-02-17
Lithographic support structure Grant 7,486,384 - Tinnemans , et al. February 3, 2	2009-02-03
Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method App 20090001288 - Buis; Edwin Johan ; et al.	2009-01-01
Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device App 20080309893 - Buis; Edwin Johan ; et al.	2008-12-18
Lithographic support structure App 20080297758 - Tinnemans; Patricius Aloysius Jacobus ; et al.	2008-12-04
Lithographic apparatus and device manufacturing method App 20080070353 - Verweij; Antonie Hendrik ; et al.	2008-03-20
Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing Grant 7,307,689 - Du Mee , et al. December 11, 2	2007-12-11
Lithographic apparatus, device manufacturing method and positioning system Grant 7,224,429 - Hol , et al. May 29, 2	2007-05-29
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method Grant 7,088,428 - Hol , et al. August 8, 2	2006-08-08
Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing App 20060139615 - Mee; Maurice Philippe Du ; et al.	2006-06-29
Lithographic apparatus and device manufacturing method App 20060049698 - Maria Zaal; Koen Jacobus Johannes ; et al.	2006-03-09
Lithographic apparatus, device manufacturing method and device manufactured thereby Grant 6,937,316 - Kemper , et al. August 30, 2	2005-08-30
Lithographic apparatus, device manufacturing method and positioning system App 20050146698 - Hol, Sven Antoin Johan ; et al.	2005-07-07
Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby Grant 6,831,285 - Hol , et al. December 14, 2	2004-12-14
Lithographic support structure App 20040246459 - Tinnemans, Patricius Aloysius Jacobus ; et al.	2004-12-09
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20030052284 - Hol, Sven Antoin Johan ; et al.	2003-03-20
Lithographic apparatus, device manufacturing method and device manufactured thereby App 20030048428 - Kemper, Nicolaas Rudolf ; et al.	2003-03-13

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