Buettner; Alexander

Patent Applications and Registrations

Patent applications and USPTO patent grants for Buettner; Alexander.The latest application filed is for "methods and systems for measurement of thick films and high aspect ratio structures".

Company Profile

6.10.14

Buettner; Alexander - Milpitas CA
Buettner; Alexander - Weilburg DE
Buettner; Alexander - Wetzlar DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Multi-spot analysis system with multiple optical probes Grant 11,441,893 - Dighe , et al. September 13, 2	2022-09-13
Methods and systems for measurement of thick films and high aspect ratio structures Grant 11,119,050 - Sapiens , et al. September 14, 2	2021-09-14
Semiconductor metrology based on hyperspectral imaging Grant 10,801,953 - Wang , et al. October 13, 2	2020-10-13
Methods And Systems For Measurement Of Thick Films And High Aspect Ratio Structures App 20200284733 - Sapiens; Noam ; et al.	2020-09-10
Semiconductor Metrology Based On Hyperspectral Imaging App 20200225151 - Wang; David Y. ; et al.	2020-07-16
Methods and systems for measurement of thick films and high aspect ratio structures Grant 10,690,602 - Sapiens , et al.	2020-06-23
Optical metrology with small illumination spot size Grant 10,648,796 - Sapiens , et al.	2020-05-12
Multi-Spot Analysis System with Multiple Optical Probes App 20190331592 - Dighe; Prasanna ; et al.	2019-10-31
Methods And Systems For Measurement Of Thick Films And High Aspect Ratio Structures App 20180238814 - Sapiens; Noam ; et al.	2018-08-23
Optical Metrology With Small Illumination Spot Size App 20180180406 - Sapiens; Noam ; et al.	2018-06-28
Simultaneous multi-angle spectroscopy Grant 9,921,104 - Krishnan , et al. March 20, 2	2018-03-20
Optical metrology with small illumination spot size Grant 9,915,524 - Sapiens , et al. March 13, 2	2018-03-13
Simultaneous Multi-Angle Spectroscopy App 20170356800 - Krishnan; Shankar ; et al.	2017-12-14
Optical Metrology With Small Illumination Spot Size App 20160334326 - Sapiens; Noam ; et al.	2016-11-17
System And Method For Determining The Position Of Defects On Objects, Coordinate Measuring Unit And Computer Program For Coordinate Measuring Unit App 20150226539 - ROETH; Klaus-Dieter ; et al.	2015-08-13
Method for focusing an object plane and optical assembly Grant 9,091,525 - Sulik , et al. July 28, 2	2015-07-28
Method for focusing an object plane and optical assembly App 20110205553 - Sulik; Wolfgang ; et al.	2011-08-25
Apparatus for illuminating and inspecting a surface Grant 7,561,263 - Danner , et al. July 14, 2	2009-07-14
Device and method for scanning the whole surface of a wafer App 20090034832 - Vollrath; Wolfgang ; et al.	2009-02-05
Apparatus for wafer inspection App 20080144014 - Vollrath; Wolfgang ; et al.	2008-06-19
Apparatus for wafer inspection App 20080144025 - Vollrath; Wolfgang ; et al.	2008-06-19
Apparatus and method for measuring the height profile of a structured substrate App 20080031509 - Heiden; Michael ; et al.	2008-02-07
Apparatus for illuminating and inspecting a surface App 20070159700 - Danner; Lambart ; et al.	2007-07-12

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