Patent | Date |
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Polymeric polishing pad having continuously regenerated work surface App 20050221741 - Reinhardt, Heinz F. ;   et al. | 2005-10-06 |
Method of polishing a semiconductor device Grant 6,903,021 - Reinhardt , et al. June 7, 2 | 2005-06-07 |
Polishing pad for a semiconductor device having a dissolvable substance Grant 6,899,611 - Reinhardt , et al. May 31, 2 | 2005-05-31 |
Window portion with an adjusted rate of wear Grant 6,860,793 - Budinger , et al. March 1, 2 | 2005-03-01 |
Method of polishing a semiconductor device App 20040224142 - Reinhardt, Heinz F. ;   et al. | 2004-11-11 |
Polymeric polishing pad having continuously regenerated work surface App 20030068960 - Reinhardt, Heinz F. ;   et al. | 2003-04-10 |
Polishing pad with a transparent portion Grant 6,517,417 - Budinger , et al. February 11, 2 | 2003-02-11 |
Method relating to a polishing system having a multi-phase polishing layer Grant 6,488,570 - James , et al. December 3, 2 | 2002-12-03 |
Polymeric polishing pad having continuously regenerated work surface Grant 6,439,989 - Reinhardt , et al. August 27, 2 | 2002-08-27 |
Apparatus and methods for chemical-mechanical polishing of semiconductor wafers App 20020020495 - James, David B. ;   et al. | 2002-02-21 |
Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like Grant 6,337,281 - James , et al. January 8, 2 | 2002-01-08 |
Window portion with an adjusted rate of wear App 20010053658 - Budinger, William D. ;   et al. | 2001-12-20 |
System for ordering and manufacturing a tangible device App 20010032111 - Jensen, Elmer W. JR. ;   et al. | 2001-10-18 |
Polishing pad with a transparent portion App 20010031610 - Budinger, William D. ;   et al. | 2001-10-18 |
Apparatus and methods for chemical-mechanical polishing of semiconductor wafers Grant 6,245,679 - Cook , et al. June 12, 2 | 2001-06-12 |
Apparatus and methods for chemical-mechanical polishing of semiconductor wafers Grant 6,210,525 - James , et al. April 3, 2 | 2001-04-03 |
Method of manufacturing a polymeric polishing pad having photolithographically induced surface pattern(s) Grant 6,210,254 - Cook , et al. April 3, 2 | 2001-04-03 |
Polishing system having a multi-phase polishing substrate and methods relating thereto Grant 6,099,394 - James , et al. August 8, 2 | 2000-08-08 |
Polishing slurry compositions capable of providing multi-modal particle packing and methods relating thereto Grant 6,093,649 - Roberts , et al. July 25, 2 | 2000-07-25 |
Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like Grant 6,069,080 - James , et al. May 30, 2 | 2000-05-30 |
Polymeric polishing pad having photolithographically induced surface patterns(s) and methods relating thereto Grant 6,036,579 - Cook , et al. March 14, 2 | 2000-03-14 |
Polishing pad and methods relating thereto Grant 6,022,264 - Cook , et al. February 8, 2 | 2000-02-08 |
Apparatus and methods for recirculating chemical-mechanical polishing of semiconductor wafers Grant 5,932,486 - Cook , et al. August 3, 1 | 1999-08-03 |
Method for planarizing a semiconductor device surface with polymeric pad containing hollow polymeric microelements Grant 5,900,164 - Budinger , et al. May 4, 1 | 1999-05-04 |
Method and apparatus for determination and display of critical gas supply information Grant 5,016,483 - Budinger May 21, 1 | 1991-05-21 |
Method and apparatus for determination and display of gas consumption time Grant 4,970,897 - Budinger November 20, 1 | 1990-11-20 |
Method and apparatus for determination and display of critical gas supply information Grant 4,926,703 - Budinger May 22, 1 | 1990-05-22 |
Pad material for grinding, lapping and polishing Grant 4,927,432 - Budinger , et al. May 22, 1 | 1990-05-22 |
Method and apparatus for determination and display of critical gas supply information Grant 4,876,903 - Budinger October 31, 1 | 1989-10-31 |
Workpiece holder for polishing operation Grant 4,512,113 - Budinger April 23, 1 | 1985-04-23 |
Nip Pressure Measurement Grant 3,760,637 - Budinger , et al. September 25, 1 | 1973-09-25 |
Roller For Printing Press Grant 3,635,158 - Budinger January 18, 1 | 1972-01-18 |