Budiarto; Edward
Patent Applications and Registrations
Patent applications and USPTO patent grants for Budiarto; Edward.The latest application filed is for "optical metrology models for in-line film thickness measurements".
- Budiarto; Edward - Fremont CA
| Patent | Date |
|---|---|
| Optical Metrology Models For In-line Film Thickness Measurements App 20220290974 - Ng; Eric Chin Hong ; et al. | 2022-09-15 |
| Optical stack deposition and on-board metrology Grant 10,886,155 - Zhu , et al. January 5, 2 | 2021-01-05 |
| Pecvd Process App 20200399756 - RAJAGOPALAN; Nagarajan ; et al. | 2020-12-24 |
| PECVD process Grant 10,793,954 - Rajagopalan , et al. October 6, 2 | 2020-10-06 |
| Optical Stack Deposition And On-board Metrology App 20200227294 - ZHU; Mingwei ; et al. | 2020-07-16 |
| In-situ metrology method for thickness measurement during PECVD processes Grant 10,527,407 - Paul , et al. J | 2020-01-07 |
| Methods, Apparatuses And Systems For Conductive Film Layer Thickness Measurements App 20190390949 - WU; KAI ; et al. | 2019-12-26 |
| In-situ Metrology Method For Thickness Measurement During Pecvd Processes App 20190212128 - PAUL; Khokan C. ; et al. | 2019-07-11 |
| In-situ metrology method for thickness measurement during PECVD processes Grant 10,281,261 - Paul , et al. | 2019-05-07 |
| Pecvd Process App 20180258535 - RAJAGOPALAN; Nagarajan ; et al. | 2018-09-13 |
| PECVD process Grant 10,060,032 - Rajagopalan , et al. August 28, 2 | 2018-08-28 |
| PECVD apparatus and process Grant 10,030,306 - Rajagopalan , et al. July 24, 2 | 2018-07-24 |
| Enhanced Illumination Efficiency In Maskless, Programmable Optical Lithography Systems App 20180074311 - BUDIARTO; Edward ; et al. | 2018-03-15 |
| Pecvd Process App 20180066364 - RAJAGOPALAN; Nagarajan ; et al. | 2018-03-08 |
| Endpoint Detection For A Chamber Cleaning Process App 20180057935 - BUDIARTO; Edward ; et al. | 2018-03-01 |
| PECVD process Grant 9,816,187 - Rajagopalan , et al. November 14, 2 | 2017-11-14 |
| Pecvd Process App 20170016118 - RAJAGOPALAN; Nagarajan ; et al. | 2017-01-19 |
| In-situ Metrology Method For Thickness Measurement During Pecvd Processes App 20160370173 - PAUL; Khokan C. ; et al. | 2016-12-22 |
| PECVD process Grant 9,458,537 - Rajagopalan , et al. October 4, 2 | 2016-10-04 |
| Pecvd Process App 20160017497 - RAJAGOPALAN; NAGARAJAN ; et al. | 2016-01-21 |
| PECVD process Grant 9,157,730 - Rajagopalan , et al. October 13, 2 | 2015-10-13 |
| Pecvd Apparatus And Process App 20150226540 - Rajagopalan; Nagarajan ; et al. | 2015-08-13 |
| Measurement Of Film Thickness On An Arbitrary Substrate App 20150203966 - BUDIARTO; Edward ; et al. | 2015-07-23 |
| Pecvd Process App 20140118751 - RAJAGOPALAN; Nagarajan ; et al. | 2014-05-01 |
| Metrology system for imaging workpiece surfaces at high robot transfer speeds Grant 8,698,889 - Ravid , et al. April 15, 2 | 2014-04-15 |
| Method And Apparatus For The Formation Of Solar Cells With Selective Emitters App 20130095579 - Egan; Todd ; et al. | 2013-04-18 |
| Metrology System For Imaging Workpiece Surfaces At High Robot Transfer Speeds App 20110199476 - Ravid; Abraham ; et al. | 2011-08-18 |
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