Budach; Michael

Patent Applications and Registrations

Patent applications and USPTO patent grants for Budach; Michael.The latest application filed is for "method, device and computer program for repairing a mask defect".

Company Profile

7.21.30

Budach; Michael - Hanau DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method, Device And Computer Program For Repairing A Mask Defect App 20220308443 - Schoneberg; Johannes ; et al.	2022-09-29
Method And Apparatuses For Disposing Of Excess Material Of A Photolithographic Mask App 20220299864 - Budach; Michael ; et al.	2022-09-22
Apparatus and method for determining a position of an element on a photolithographic mask Grant 11,385,540 - Budach , et al. July 12, 2	2022-07-12
Apparatus And Method For Examining And/or Processing A Sample App 20220178965 - Baur; Christof ; et al.	2022-06-09
Apparatus and method for examining and/or processing a sample Grant 11,262,378 - Baur , et al. March 1, 2	2022-03-01
Apparatus and method for repairing a photolithographic mask Grant 11,256,168 - Budach , et al. February 22, 2	2022-02-22
Methods and devices for examining an electrically charged specimen surface Grant 11,170,970 - Budach , et al. November 9, 2	2021-11-09
Method and apparatus for analyzing a defective location of a photolithographic mask Grant 11,150,552 - Budach , et al. October 19, 2	2021-10-19
Device And Method For Analysing A Defect Of A Photolithographic Mask Or Of A Wafer App 20210247336 - Baralia; Gabriel ; et al.	2021-08-12
Devices And Methods For Examining And/or Processing An Element For Photolithography App 20210132594 - Budach; Michael ; et al.	2021-05-06
Device and method for analysing a defect of a photolithographic mask or of a wafer Grant 10,983,075 - Baralia , et al. April 20, 2	2021-04-20
Apparatus And Method For Examining And/or Processing A Sample App 20210109126 - Baur; Christof ; et al.	2021-04-15
Apparatus And Method For Repairing A Photolithographic Mask App 20200249564 - Kind Code	2020-08-06
Apparatus And Method For Determining A Position Of An Element On A Photolithographic Mask App 20200233299 - Budach; Michael ; et al.	2020-07-23
Method And Apparatuses For Disposing Of Excess Material Of A Photolithographic Mask App 20200103751 - Budach; Michael ; et al.	2020-04-02
Method And Apparatus For Analyzing A Defective Location Of A Photolithographic Mask App 20200004138 - Budach; Michael ; et al.	2020-01-02
Beam blanker and method for blanking a charged particle beam Grant 10,410,820 - Budach , et al. Sept	2019-09-10
Methods And Devices For Examining An Electrically Charged Specimen Surface App 20190035601 - Budach; Michael ; et al.	2019-01-31
Methods and devices for examining an electrically charged specimen surface Grant 10,068,747 - Budach , et al. September 4, 2	2018-09-04
Method and apparatus for analyzing and for removing a defect of an EUV photomask Grant 10,060,947 - Budach , et al. August 28, 2	2018-08-28
Beam Blanker And Method For Blanking A Charged Particle Beam App 20180151327 - Budach; Michael ; et al.	2018-05-31
Method And Apparatus For Analyzing And For Removing A Defect Of An Euv Photomask App 20180106831 - Budach; Michael ; et al.	2018-04-19
Apparatus and method for examining a surface of a mask Grant 9,910,065 - Budach , et al. March 6, 2	2018-03-06
Method and device for determining a reference point of an orientation marking on a substrate of a photolithographic mask in an automated manner Grant 9,863,760 - Budach , et al. January 9, 2	2018-01-09
Device And Method For Analysing A Defect Of A Photolithographic Mask Or Of A Wafer App 20170292923 - Baralia; Gabriel ; et al.	2017-10-12
Methods And Devices For Examining An Electrically Charged Specimen Surface App 20170062180 - Budach; Michael ; et al.	2017-03-02
Apparatus And Method For Examining A Surface Of A Mask App 20160341763 - Budach; Michael ; et al.	2016-11-24
Method for determining the performance of a photolithographic mask Grant 9,431,212 - Waiblinger , et al. August 30, 2	2016-08-30
Method And Device For Determining A Reference Point Of An Orientation Marking On A Substrate Of A Photolithographic Mask In An Automated Manner App 20160138907 - Budach; Michael ; et al.	2016-05-19
Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope Grant 9,336,983 - Budach , et al. May 10, 2	2016-05-10
Scanning Particle Microscope And Method For Determining A Position Change Of A Particle Beam Of The Scanning Particle Microscope App 20150380210 - Budach; Michael ; et al.	2015-12-31
Apparatus and method for investigating an object Grant 9,115,981 - Baur , et al. August 25, 2	2015-08-25
Method And Apparatus For Protecting A Substrate During Processing By A Particle Beam App 20140255831 - Hofmann; Thorsten ; et al.	2014-09-11
Method And Apparatus For Analyzing And For Removing A Defect Of An Euv Photomask App 20140165236 - Budach; Michael ; et al.	2014-06-12
Method and apparatus for analyzing and/or repairing of an EUV mask defect Grant 8,674,329 - Budach , et al. March 18, 2	2014-03-18
Apparatus And Method For Investigating An Object App 20140027512 - Baur; Christof ; et al.	2014-01-30
Method And Apparatus For Analyzing And/or Repairing Of An Euv Mask Defect App 20130156939 - Budach; Michael ; et al.	2013-06-20
Method For Determining The Performance Of A Photolithographic Mask App 20130126728 - Waiblinger; Markus ; et al.	2013-05-23
Determining a repairing form of a defect at or close to an edge of a substrate of a photo mask Grant 8,316,698 - Budach November 27, 2	2012-11-27
Apparatus and method for investigating and/or modifying a sample Grant 8,247,782 - Edinger , et al. August 21, 2	2012-08-21
Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof Grant 8,058,614 - Bihr , et al. November 15, 2	2011-11-15
Apparatus And Method For Investigating And/or Modifying A Sample App 20110210181 - Edinger; Klaus ; et al.	2011-09-01
Method For Processing An Object With Miniaturized Structures App 20100297362 - Budach; Michael ; et al.	2010-11-25
Determining a Repairing Form of a Defect at or Close to an Edge of a Substrate of a Photo Mask App 20100154521 - Budach; Michael	2010-06-24
Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof App 20100119698 - Bihr; Johannes ; et al.	2010-05-13
Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof Grant 7,645,989 - Bihr , et al. January 12, 2	2010-01-12
Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof App 20080099674 - Bihr; Johannes ; et al.	2008-05-01

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