Buckley; Peter Harold
Patent Applications and Registrations
Patent applications and USPTO patent grants for Buckley; Peter Harold.The latest application filed is for "thermal activation of fluorine for use in a semiconductor chamber".
- Buckley; Peter Harold - Salem NH
| Patent | Date |
|---|---|
| Thermal activation of fluorine for use in a semiconductor chamber Grant 6,818,566 - Leeson , et al. November 16, 2 | 2004-11-16 |
| Sub-atmospheric supply of fluorine to semiconductor process chamber App 20040074516 - Hogle, Richard A. ; et al. | 2004-04-22 |
| Thermal activation of fluorine for use in a semiconductor chamber App 20040077162 - Leeson, Noel James ; et al. | 2004-04-22 |
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