Brusic; Vlasta
Patent Applications and Registrations
Patent applications and USPTO patent grants for Brusic; Vlasta.The latest application filed is for "method for polishing aluminum/copper and titanium in damascene structures".
- Brusic; Vlasta - Geneva IL US
| Patent | Date |
|---|---|
| Compositions for polishing aluminum/copper and titanium in damascene structures Grant 9,343,330 - Brusic , et al. May 17, 2 | 2016-05-17 |
| Method for polishing aluminum/copper and titanium in damascene structures Grant 8,623,767 - Brusic , et al. January 7, 2 | 2014-01-07 |
| Method For Polishing Aluminum/copper And Titanium In Damascene Structures App 20130224955 - BRUSIC; Vlasta ; et al. | 2013-08-29 |
| Metal-passivating CMP compositions and methods Grant 8,435,421 - Keleher , et al. May 7, 2 | 2013-05-07 |
| Compositions for polishing aluminum/copper and titanium in damascene structures Grant 8,425,797 - Brusic , et al. April 23, 2 | 2013-04-23 |
| Polishing slurry for aluminum and aluminum alloys Grant 8,251,777 - Moeggenborg , et al. August 28, 2 | 2012-08-28 |
| Chemical-mechanical polishing composition and method for using the same Grant 8,101,093 - de Rege Thesauro , et al. January 24, 2 | 2012-01-24 |
| Use of CMP for aluminum mirror and solar cell fabrication Grant 8,062,096 - Brusic , et al. November 22, 2 | 2011-11-22 |
| Controlled electrochemical polishing method Grant 7,998,335 - Feeney , et al. August 16, 2 | 2011-08-16 |
| Metal-passivating Cmp Compositions And Methods App 20110100956 - KELEHER; Jason ; et al. | 2011-05-05 |
| Compositions For Polishing Aluminum/copper And Titanium In Damascene Structures App 20090236559 - Brusic; Vlasta ; et al. | 2009-09-24 |
| Chemical-mechanical Polishing Composition And Method For Using The Same App 20090152240 - de Rege Thesauro; Francesco ; et al. | 2009-06-18 |
| Polishing Slurry For Aluminum And Aluminum Alloys App 20080200098 - Moeggenborg; Kevin ; et al. | 2008-08-21 |
| CMP method for gold-containing substrates App 20080156774 - Brusic; Vlasta ; et al. | 2008-07-03 |
| Compositions for polishing aluminum/copper and titanium in damascene structures App 20080134585 - Brusic; Vlasta ; et al. | 2008-06-12 |
| CMP of copper/ruthenium/tantalum substrates App 20080105652 - Brusic; Vlasta ; et al. | 2008-05-08 |
| Gold CMP composition and method Grant 7,368,066 - Brusic , et al. May 6, 2 | 2008-05-06 |
| Gold CMP composition and method App 20070278184 - Brusic; Vlasta ; et al. | 2007-12-06 |
| Chemical-mechanical polishing of metals in an oxidized form Grant 7,288,021 - De Rege Thesauro , et al. October 30, 2 | 2007-10-30 |
| CMP of copper/ruthenium substrates Grant 7,265,055 - Thompson , et al. September 4, 2 | 2007-09-04 |
| CMP of copper/ruthenium substrates App 20070090094 - Thompson; Christopher ; et al. | 2007-04-26 |
| Use of CMP for aluminum mirror and solar cell fabrication App 20070010098 - Brusic; Vlasta ; et al. | 2007-01-11 |
| Polishing composition for noble metals Grant 7,161,247 - De Rege Thesauro , et al. January 9, 2 | 2007-01-09 |
| CMP of noble metals Grant 7,160,807 - De Rege Thesauro , et al. January 9, 2 | 2007-01-09 |
| Controlled electrochemical polishing method App 20060281196 - Feeney; Paul M. ; et al. | 2006-12-14 |
| CMP method for noble metals Grant 7,097,541 - DeRege Thesauro , et al. August 29, 2 | 2006-08-29 |
| CMP systems and methods utilizing amine-containing polymers Grant 7,004,819 - Moeggenborg , et al. February 28, 2 | 2006-02-28 |
| Polishing composition for noble metals App 20060024967 - De Rege Thesauro; Francesco ; et al. | 2006-02-02 |
| Electrochemical-mechanical polishing composition and method for using the same App 20050263407 - Brusic, Vlasta ; et al. | 2005-12-01 |
| Chemical-mechanical polishing composition and method for using the same App 20050211950 - de Rege Thesauro, Francesco ; et al. | 2005-09-29 |
| ECMP system App 20050167266 - Brusic, Vlasta ; et al. | 2005-08-04 |
| Chemical-mechanical polishing of metals in an oxidized form App 20050148290 - De Rege Thesauro, Francesco ; et al. | 2005-07-07 |
| Process for fabricating optical switches Grant 6,853,474 - Yu , et al. February 8, 2 | 2005-02-08 |
| CMP of noble metals App 20040266196 - De Rege Thesauro, Francesco ; et al. | 2004-12-30 |
| Chemical-mechanical planarization of metallurgy Grant 6,632,377 - Brusic , et al. October 14, 2 | 2003-10-14 |
| Process for fabricating optical switches App 20030189025 - Yu, Chris C. ; et al. | 2003-10-09 |
| CMP method for noble metals App 20030181142 - De Rege Thesauro, Francesco ; et al. | 2003-09-25 |
| CMP systems and methods utilizing amine-containing polymers App 20030139116 - Moeggenborg, Kevin J. ; et al. | 2003-07-24 |
| CMP method for noble metals Grant 6,527,622 - Brusic , et al. March 4, 2 | 2003-03-04 |
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