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Patent applications and USPTO patent grants for Bruns; Angelika.The latest application filed is for "method of manufacturing a mask for radiation lithography".
Patent | Date |
---|---|
Method of manufacturing a mask for radiation lithography Grant 4,946,751 - Bruns , et al. August 7, 1 | 1990-08-07 |
Mask for the formation of patterns in lacquer layers by means of X-ray lithography and method of manufacturing same Grant 4,555,460 - Harms , et al. November 26, 1 | 1985-11-26 |
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