Patent | Date |
---|
Apparatus for and method of in-situ particle removal in a lithography apparatus Grant 11,333,984 - Bruls , et al. May 17, 2 | 2022-05-17 |
Particle suppression systems and methods Grant 11,137,694 - Huang , et al. October 5, 2 | 2021-10-05 |
Particle Suppression Systems And Methods App 20210173315 - HUANG; Yang-Shan ;   et al. | 2021-06-10 |
Mask assembly Grant 11,009,803 - Kruizinga , et al. May 18, 2 | 2021-05-18 |
Apparatus For and Method of In-Situ Particle Removal in a Lithography Apparatus App 20210041795 - BRULS; Richard Joseph ;   et al. | 2021-02-11 |
Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process Grant 10,613,445 - Hauptmann , et al. | 2020-04-07 |
Mask Assembly App 20200057394 - KRUIZINGA; Matthias ;   et al. | 2020-02-20 |
Mask assembly Grant 10,558,129 - Kruizinga , et al. Feb | 2020-02-11 |
Lithographic Apparatus And Device Manufacturing Method App 20190324374 - STREEFKERK; Bob ;   et al. | 2019-10-24 |
Lithographic apparatus and a method of operating the apparatus Grant 10,429,741 - Bruijstens , et al. O | 2019-10-01 |
Methods & Apparatus For Obtaining Diagnostic Information Relating To A Lithographic Manufacturing Process App 20190219929 - Hauptmann; Marc ;   et al. | 2019-07-18 |
Lithographic apparatus and device manufacturing method Grant 10,345,712 - Streefkerk , et al. July 9, 2 | 2019-07-09 |
Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus Grant 10,241,418 - Hauptmann , et al. | 2019-03-26 |
Lithographic Apparatus And A Method Of Operating The Apparatus App 20190086814 - Bruijstens; Jeroen Peter Johannes ;   et al. | 2019-03-21 |
Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method Grant 10,222,701 - Zhao , et al. | 2019-03-05 |
Lithographic apparatus and a method of operating the apparatus Grant 10,151,984 - Bruijstens , et al. Dec | 2018-12-11 |
Mask Assembly App 20180329314 - KRUIZINGA; Matthias ;   et al. | 2018-11-15 |
Lithographic Apparatus And Device Manufacturing Method App 20180203364 - STREEFKERK; Bob ;   et al. | 2018-07-19 |
Lithographic apparatus and device manufacturing method Grant 9,952,515 - Streefkerk , et al. April 24, 2 | 2018-04-24 |
Method & Apparatus For Obtaining Diagnostic Information Relating To A Lithographic Manufacturing Process, Lithographic Processing System Including Diagnostic Apparatus App 20170363969 - HAUPTMANN; Marc ;   et al. | 2017-12-21 |
Lithographic apparatus, device manufacturing method and method of clamping an object Grant 9,740,113 - Janssen , et al. August 22, 2 | 2017-08-22 |
Lithographic Apparatus, Device Manufacturing Method And Method Of Clamping An Object App 20170131643 - JANSSEN; Paul ;   et al. | 2017-05-11 |
Radiation Source, Lithographic Apparatus Device Manufacturing Method, Sensor System And Sensing Method App 20160209753 - ZHAO; Chuangxin ;   et al. | 2016-07-21 |
Lithographic Apparatus And A Method Of Operating The Apparatus App 20160124319 - Bruijstens; Jeroen Peter Johannes ;   et al. | 2016-05-05 |
Lithographic apparatus, excimer laser and device manufacturing method Grant 9,316,924 - De Kruif , et al. April 19, 2 | 2016-04-19 |
Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device Grant 9,298,110 - Steinhoff , et al. March 29, 2 | 2016-03-29 |
Lithographic Apparatus And Device Manufacturing Method App 20160004171 - STREEFKERK; Bob ;   et al. | 2016-01-07 |
Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure Grant 9,176,371 - Bruijstens , et al. November 3, 2 | 2015-11-03 |
Radiation source, lithographic apparatus and device manufacturing method Grant 9,164,403 - Kempen , et al. October 20, 2 | 2015-10-20 |
Lithographic apparatus and device manufacturing method Grant 9,134,623 - Streefkerk , et al. September 15, 2 | 2015-09-15 |
Lithographic apparatus and device manufacturing method Grant 9,134,622 - Streefkerk , et al. September 15, 2 | 2015-09-15 |
Lithographic Apparatus And Device Manufacturing Method App 20140233004 - Streefkerk; Bob ;   et al. | 2014-08-21 |
Lithographic apparatus and device manufacturing method Grant 8,780,321 - Knaapen , et al. July 15, 2 | 2014-07-15 |
Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure Grant 8,730,447 - Bruijstens , et al. May 20, 2 | 2014-05-20 |
Lithographic Apparatus And Device Manufacturing Method App 20140098357 - STREEFKERK; Bob ;   et al. | 2014-04-10 |
Lithographic apparatus and device manufacturing method Grant 8,634,056 - Streefkerk , et al. January 21, 2 | 2014-01-21 |
Lithographic apparatus and a method of operating the apparatus Grant 8,564,757 - Jansen , et al. October 22, 2 | 2013-10-22 |
Lithographic apparatus and device manufacturing method Grant 8,547,519 - Streefkerk , et al. October 1, 2 | 2013-10-01 |
System For Removing Contaminant Particles, Lithographic Apparatus, Method For Removing Contaminant Particles And Method For Manufacturing A Device App 20130070218 - Ivanov; Vladimir Vitalevich ;   et al. | 2013-03-21 |
Radiation Source, Lithographic Apparatus and Device Manufacturing Method App 20120295205 - Kempen; Antonius Theodorus Wilhelmus ;   et al. | 2012-11-22 |
Lithographic Apparatus, Excimer Laser And Device Manufacturing Method App 20120057144 - DE KRUIF; Robertus Cornelis Martinus ;   et al. | 2012-03-08 |
Lithographic apparatus, excimer laser and device manufacturing method Grant 8,089,613 - De Kruif , et al. January 3, 2 | 2012-01-03 |
Lithographic Apparatus And Device Manufacturing Method App 20110273679 - Knaapen; Thijs Egidius Johannes ;   et al. | 2011-11-10 |
Lithographic Apparatus And Device Manufacturing Method App 20110273677 - STREEFKERK; Bob ;   et al. | 2011-11-10 |
Radiation Source Apparatus, Lithographic Apparatus, Method Of Generating And Delivering Radiation And Method For Manufacturing A Device App 20110222040 - STEINHOFF; Jens Arno ;   et al. | 2011-09-15 |
Lithographic Apparatus, Excimer Laser And Device Manufacturing Method App 20100329290 - DE KRUIF; Robertus Cornelis Martinus ;   et al. | 2010-12-30 |
Lithographic Apparatus And A Method Of Operating The Apparatus App 20100328634 - Jansen; Bauke ;   et al. | 2010-12-30 |
Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto Grant 7,843,552 - Bruls , et al. November 30, 2 | 2010-11-30 |
Lithographic apparatus, excimer laser and device manufacturing method Grant 7,817,247 - De Kruif , et al. October 19, 2 | 2010-10-19 |
Lithographic Apparatus And Device Manufacturing Method App 20100157260 - KNAAPEN; Thijs Egidius Johannes ;   et al. | 2010-06-24 |
Lithographic Apparatus And A Method Of Operating The Apparatus App 20100066987 - BRUIJSTENS; Jeroen Peter Johannes ;   et al. | 2010-03-18 |
Lithographic Apparatus And Method Of Generating The Apparatus App 20100066988 - Bruijstens; Jeroen Peter Johannes ;   et al. | 2010-03-18 |
Lithographic apparatus, excimer laser and device manufacturing method Grant 7,595,863 - Kruif , et al. September 29, 2 | 2009-09-29 |
Lithographic Apparatus And Device Manufacturing Method App 20090207397 - Streefkerk; Bob ;   et al. | 2009-08-20 |
Lithographic apparatus and device manufacturing method Grant 7,534,552 - De Kruif , et al. May 19, 2 | 2009-05-19 |
Lithographic apparatus and device manufacturing method Grant 7,528,929 - Streefkerk , et al. May 5, 2 | 2009-05-05 |
Substrates and methods of using those substrates App 20090014030 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al. | 2009-01-15 |
Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle App 20080137049 - Jasper; Johannes Christiaan Maria ;   et al. | 2008-06-12 |
Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle Grant 7,379,154 - Bruls , et al. May 27, 2 | 2008-05-27 |
Lithographic apparatus and lithographic apparatus cleaning method App 20080049201 - Stavenga; Marco Koert ;   et al. | 2008-02-28 |
Lithographic apparatus and device manufacturing method Grant 7,239,370 - Jansen , et al. July 3, 2 | 2007-07-03 |
Method of imaging using lithographic projection apparatus Grant 7,199,863 - Bruls , et al. April 3, 2 | 2007-04-03 |
Method for bonding a pellicle to a patterning device and patterning device comprising a pellicle Grant 7,136,152 - Bruls , et al. November 14, 2 | 2006-11-14 |
Lithographic apparatus, excimer laser and device manufacturing method App 20060170899 - De Kruif; Robertus Cornelis Martinus ;   et al. | 2006-08-03 |
Lithographic apparatus, excimer laser and device manufacturing method App 20060146310 - De Kruif; Robertus Cornelis Martinus ;   et al. | 2006-07-06 |
Lithographic apparatus and device manufacturing method App 20060139606 - De Kruif; Robertus Cornelis Martinus ;   et al. | 2006-06-29 |
Lithographic apparatus and device manufacturing method App 20060139607 - Bruls; Richard Joseph ;   et al. | 2006-06-29 |
Lithographic apparatus and device manufacturing method App 20060139610 - Bruls; Richard Joseph ;   et al. | 2006-06-29 |
Method of imaging using lithographic projection apparatus App 20060132749 - Bruls; Richard Joseph ;   et al. | 2006-06-22 |
Method for bonding a pellicle to a patterning device and patterning device comprising a pellicle App 20060109448 - Bruls; Richard Joseph ;   et al. | 2006-05-25 |
Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto App 20050280789 - Bruls, Richard Joseph ;   et al. | 2005-12-22 |
Lithographic apparatus and device manufacturing method App 20050175776 - Streefkerk, Bod ;   et al. | 2005-08-11 |
Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle App 20050140949 - Jasper, Johannes Christiaan Maria ;   et al. | 2005-06-30 |
Lithographic apparatus and device manufacturing method App 20040174509 - Jansen, Albert Johannes Maria ;   et al. | 2004-09-09 |