Patent | Date |
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Methods and systems for laser processing a workpiece using a plurality of tailored laser pulse shapes Grant 8,598,490 - Hooper , et al. December 3, 2 | 2013-12-03 |
Methods and systems for dynamically generating tailored laser pulses Grant 8,526,473 - Baird , et al. September 3, 2 | 2013-09-03 |
Methods and systems for semiconductor structure processing using multiple laser beam spots Grant 8,383,982 - Bruland , et al. February 26, 2 | 2013-02-26 |
Photonic clock stabilized laser comb processing Grant 8,358,671 - Baird , et al. January 22, 2 | 2013-01-22 |
Methods And Systems For Link Processing Using Laser Pulses With Optimized Temporal Power Profiles And Polarizations App 20120160814 - Osako; Yasu ;   et al. | 2012-06-28 |
Photonic milling using dynamic beam arrays Grant 8,178,818 - Baird , et al. May 15, 2 | 2012-05-15 |
Semiconductor structure processing using multiple laser beam spots spaced on-axis delivered simultaneously Grant 8,148,211 - Bruland , et al. April 3, 2 | 2012-04-03 |
Systems and methods for distinguishing reflections of multiple laser beams for calibration for semiconductor structure processing Grant 8,110,775 - Lo , et al. February 7, 2 | 2012-02-07 |
Systems and methods for adapting parameters to increase throughput during laser-based wafer processing Grant 8,076,605 - Bruland , et al. December 13, 2 | 2011-12-13 |
Methods And Systems For Laser Processing A Workpiece Using A Plurality Of Tailored Laser Pulse Shapes App 20110298156 - Hooper; Andrew ;   et al. | 2011-12-08 |
Photonic Clock Stabilized Laser Comb Processing App 20110272388 - Baird; Brian W. ;   et al. | 2011-11-10 |
Systems and methods for alignment of laser beam(s) for semiconductor link processing Grant 8,049,135 - Bruland , et al. November 1, 2 | 2011-11-01 |
Systems and methods for processing semiconductor structures using laser pulses laterally distributed in a scanning window Grant 8,026,158 - Bruland , et al. September 27, 2 | 2011-09-27 |
Systems And Methods For Processing Semiconductor Structures Using Laser Pulses Laterally Distributed In A Scanning Window App 20110210103 - Bruland; Kelly J. ;   et al. | 2011-09-01 |
System For Semiconductor Structure Processing Using Multiple Laser Beam Spots App 20110186555 - Bruland; Kelly J. ;   et al. | 2011-08-04 |
Photonic clock stabilized laser comb processing Grant 7,982,160 - Baird , et al. July 19, 2 | 2011-07-19 |
Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target Grant 7,964,819 - Bruland June 21, 2 | 2011-06-21 |
Semiconductor structure processing using multiple laser beam spots spaced on-axis on non-adjacent structures Grant 7,935,941 - Bruland , et al. May 3, 2 | 2011-05-03 |
Semiconductor structure processing using multiple laser beam spots Grant 7,923,306 - Bruland , et al. April 12, 2 | 2011-04-12 |
Semiconductor Structure Processing Using Multiple Laterally Spaced Laser Beam Spots With Joint Velocity Profiling App 20100133651 - Bruland; Kelly J. | 2010-06-03 |
Semiconductor Structure Processing Using Multiple Laterally Spaced Laser Beam Spots Delivering Multiple Blows App 20100089881 - Bruland; Kelly J. ;   et al. | 2010-04-15 |
Semiconductor Structure Processing Using Multiple Laser Beam Spots Overlapping Lengthwise On A Structure App 20100084662 - Bruland; Kelly J. ;   et al. | 2010-04-08 |
Semiconductor structure processing using multiple laterally spaced laser beam spots delivering multiple blows Grant 7,687,740 - Bruland , et al. March 30, 2 | 2010-03-30 |
Semiconductor structure processing using multiple laser beam spots overlapping lengthwise on a structure Grant 7,633,034 - Bruland , et al. December 15, 2 | 2009-12-15 |
Semiconductor structure processing using multiple laterally spaced laser beam spots with joint velocity profiling Grant 7,629,234 - Bruland December 8, 2 | 2009-12-08 |
Methods And Systems For Dynamically Generating Tailored Laser Pulses App 20090245302 - Baird; Brian W. ;   et al. | 2009-10-01 |
Photonic Milling Using Dynamic Beam Arrays App 20090242522 - Baird; Brian W. ;   et al. | 2009-10-01 |
Photonic Clock Stabilized Laser Comb Processing App 20090242531 - Baird; Brian W. ;   et al. | 2009-10-01 |
Reconfigurable Semiconductor Structure Processing Using Multiple Laser Beam Spots App 20090011614 - Bruland; Kelly J. ;   et al. | 2009-01-08 |
Systems And Methods For Adapting Parameters To Increase Throughput During Laser-based Wafer Processing App 20080314879 - Bruland; Kelly J. ;   et al. | 2008-12-25 |
Systems And Methods For Processing Semiconductor Structures Using Laser Pulses Laterally Distributed In A Scanning Window App 20080299783 - Bruland; Kelly J. ;   et al. | 2008-12-04 |
Semiconductor link processing using multiple laterally spaced laser beam spots with on-axis offset Grant 7,435,927 - Bruland , et al. October 14, 2 | 2008-10-14 |
Semiconductor structure processing using multiple laser beam spots spaced on-axis with cross-axis offset Grant 7,425,471 - Bruland , et al. September 16, 2 | 2008-09-16 |
Methods and systems for semiconductor structure processing using multiple laser beam spots App 20080121627 - Bruland; Kelly J. ;   et al. | 2008-05-29 |
Systems and methods for semiconductor structure processing using multiple laser beam spots App 20080124816 - Bruland; Kelly J. ;   et al. | 2008-05-29 |
Methods And Systems For Positioning A Laser Beam Spot Relative To A Semiconductor Integrated Circuit Using A Processing Target As A Metrology Target App 20080035618 - BRULAND; Kelly J. | 2008-02-14 |
Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as an alignment target Grant 7,315,038 - Bruland January 1, 2 | 2008-01-01 |
Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target Grant 7,297,972 - Bruland November 20, 2 | 2007-11-20 |
Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as an alignment target App 20070045574 - Bruland; Kelly J. | 2007-03-01 |
Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target App 20070045575 - Bruland; Kelly J. | 2007-03-01 |
Systems and methods for alignment of laser beam(s) for semiconductor link processing App 20070020785 - Bruland; Kelly J. ;   et al. | 2007-01-25 |
Systems and methods for distinguishing reflections of multiple laser beams for calibration for semiconductor structure processing App 20070008534 - Lo; Ho Wai ;   et al. | 2007-01-11 |
Semiconductor structure processing using multiple laterally spaced laser beam spots with on-axis offset App 20050281101 - Bruland, Kelly J. ;   et al. | 2005-12-22 |
Semiconductor structure processing using multiple laser beam spots spaced on-axis with cross-axis offset App 20050279736 - Bruland, Kelly J. ;   et al. | 2005-12-22 |
Semiconductor structure processing using multiple laterally spaced laser beam spots with joint velocity profiling App 20050281102 - Bruland, Kelly J. | 2005-12-22 |
Semiconductor structure processing using multiple laser beam spots spaced on-axis to increase single-blow throughput App 20050279739 - Bruland, Kelly J. ;   et al. | 2005-12-22 |
Semiconductor structure processing using multiple laser beam spots spaced on-axis delivered simultaneously App 20050282407 - Bruland, Kelly J. ;   et al. | 2005-12-22 |
Semiconductor structure processing using multiple laterally spaced laser beam spots delivering multiple blows App 20050282406 - Bruland, Kelly J. ;   et al. | 2005-12-22 |
Semiconductor structure processing using multiple laser beam spots spaced on-axis on non-adjacent structures App 20050282367 - Bruland, Kelly J. ;   et al. | 2005-12-22 |
Semiconductor structure processing using multiple laser beam spots overlapping lengthwise on a structure App 20050282319 - Bruland, Kelly J. ;   et al. | 2005-12-22 |