Brugger; Michael

Patent Applications and Registrations

Patent applications and USPTO patent grants for Brugger; Michael.The latest application filed is for "ion implantation method, ion implantation apparatus and semiconductor device".

Company Profile

1.24.22

Brugger; Michael - Lieserbruecke AT
Brugger; Michael - Millstatt AT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Ion implantation method, ion implantation apparatus and semiconductor device Grant 11,195,695 - Jelinek , et al. December 7, 2	2021-12-07
Ion Implantation Method, Ion Implantation Apparatus and Semiconductor Device App 20190066977 - Jelinek; Moriz ; et al.	2019-02-28
Method for implanting ions into a semiconductor substrate and an implantation system Grant 10,037,887 - Brugger , et al. July 31, 2	2018-07-31
Method and apparatus for wafer wet processing Grant 9,997,379 - Kraus , et al. June 12, 2	2018-06-12
Apparatus for liquid treatment of wafer shaped articles Grant 9,972,514 - Hammer , et al. May 15, 2	2018-05-15
Spin Chuck Including Edge Ring App 20180096879 - Kon; Shih-Chung ; et al.	2018-04-05
Apparatus For Processing Wafer-shaped Articles App 20180040502 - KON; Shih-Chung ; et al.	2018-02-08
Apparatus for treating surfaces of wafer-shaped articles Grant 9,887,120 - Gleissner , et al. February 6, 2	2018-02-06
Apparatus For Liquid Treatment Of Wafer Shaped Articles App 20170256433 - HAMMER; Dietmar ; et al.	2017-09-07
Method for Implanting Ions into a Semiconductor Substrate and an Implantation System App 20170243747 - Brugger; Michael ; et al.	2017-08-24
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus Grant 9,685,358 - Plazonic , et al. June 20, 2	2017-06-20
Apparatus For Treating Surfaces Of Wafer-shaped Articles App 20170125281 - GLEISSNER; Andreas ; et al.	2017-05-04
Method and apparatus for liquid treatment of wafer shaped articles Grant 9,536,770 - Brugger , et al. January 3, 2	2017-01-03
Apparatus For Liquid Treatment Of Wafer Shaped Articles And Heating System For Use In Such Apparatus App 20160118278 - Plazonic; Ante ; et al.	2016-04-28
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus Grant 9,245,777 - Plazonic , et al. January 26, 2	2016-01-26
Grounded chuck Grant 9,190,310 - Brugger , et al. November 17, 2	2015-11-17
Method and apparatus for liquid treatment of wafer shaped articles Grant 9,093,482 - Brugger , et al. July 28, 2	2015-07-28
Method And Apparatus For Liquid Treatment Of Wafer Shaped Articles App 20150200123 - BRUGGER; Michael ; et al.	2015-07-16
Device and method for treating wafer-shaped articles Grant 8,974,632 - Tschinderle , et al. March 10, 2	2015-03-10
Device and method for wet treating plate-like-articles Grant 8,936,832 - Brugger , et al. January 20, 2	2015-01-20
Apparatus For Liquid Treatment Of Wafer Shaped Articles And Heating System For Use In Such Apparatus App 20140339215 - PLAZONIC; Ante ; et al.	2014-11-20
Apparatus for wet treatment of plate-like articles Grant 8,888,952 - Gigacher , et al. November 18, 2	2014-11-18
Method And Apparatus For Liquid Treatment Of Wafer Shaped Articles App 20140102637 - BRUGGER; Michael ; et al.	2014-04-17
High temperature chuck and method of using same Grant 8,613,288 - Brugger , et al. December 24, 2	2013-12-24
Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pin Grant 8,608,146 - Brugger , et al. December 17, 2	2013-12-17
Process And Apparatus For Treating Surfaces Of Wafer-shaped Articles App 20130233356 - OBWEGER; Rainer ; et al.	2013-09-12
Device And Method For Treating Wafer-shaped Articles App 20130134128 - TSCHINDERLE; Ulrich ; et al.	2013-05-30
Device and method for wet treating plate-like-articles Grant 8,231,939 - Brugger , et al. July 31, 2	2012-07-31
Method And Apparatus For Wafer Wet Processing App 20120131815 - KRAUS; Harald ; et al.	2012-05-31
Device And Method For Wet Treating Plate-like-articles App 20120085374 - BRUGGER; Michael ; et al.	2012-04-12
Grounded Chuck App 20110254236 - BRUGGER; Michael ; et al.	2011-10-20
Device and method for liquid treatment of wafer-shaped articles Grant 8,029,641 - Baldy , et al. October 4, 2	2011-10-04
High Temperature Chuck And Method Of Using Same App 20110146728 - BRUGGER; Michael ; et al.	2011-06-23
Reinforced Pin For Being Used In A Pin Chuck, And A Pin Chuck Using Such Reinforced Pin App 20110148022 - BRUGGER; Michael ; et al.	2011-06-23
Device And Method For Wet Treating Plate-like-articles App 20110059242 - Brugger; Michael ; et al.	2011-03-10
Apparatus For Wet Treatment Of Plate-like Articles App 20100206481 - Gigacher; Markus ; et al.	2010-08-19
Device and Method For Liquid Treatment of Wafer-Shaped Articles App 20080196835 - Baldy; Andreas ; et al.	2008-08-21

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