Brown; Stuart E.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Brown; Stuart E..The latest application filed is for "phase-shift photomask for patterning high density features".
- Brown; Stuart E. - Austin TX
| Patent | Date |
|---|---|
| Phase-shift photomask for patterning high density features Grant 6,780,568 - Nistler , et al. August 24, 2 | 2004-08-24 |
| Phase-shift photomask for patterning high density features Grant 6,410,191 - Nistler , et al. June 25, 2 | 2002-06-25 |
| Method and apparatus for programmed latency for improving wafer-to-wafer uniformity Grant 6,405,144 - Toprac , et al. June 11, 2 | 2002-06-11 |
| Method for reducing the susceptibility to chemical-mechanical polishing damage of an alignment mark formed in a semiconductor substrate Grant 6,271,602 - Ackmann , et al. August 7, 2 | 2001-08-07 |
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