loadpatents
name:-0.035696983337402
name:-0.028632164001465
name:-0.0033860206604004
Brown; Ian J. Patent Filings

Brown; Ian J.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Brown; Ian J..The latest application filed is for "uv-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly".

Company Profile
3.27.33
  • Brown; Ian J. - Austin TX
  • Brown; Ian J. - Portland OR
  • Brown; Ian J - Austin TX
  • Brown; Ian J. - Cwmbran GB
  • Brown; Ian J. - Oxon GB
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
System and method for enhanced removal of metal hardmask using ultra violet treatment
Grant 10,828,680 - Brown November 10, 2
2020-11-10
Uv-assisted Stripping Of Hardened Photoresist To Create Chemical Templates For Directed Self-assembly
App 20200066509 - Somervell; Mark H. ;   et al.
2020-02-27
Systems and methodologies for vapor phase hydroxyl radical processing of substrates
Grant 10,490,399 - Brown , et al. Nov
2019-11-26
Method and hardware for enhanced removal of post etch polymer and hardmask removal
Grant 10,347,503 - Brown , et al. July 9, 2
2019-07-09
Substrate cleaning method and system using atmospheric pressure atomic oxygen
Grant 10,249,509 - Brown
2019-04-02
Process gas generation for cleaning of substrates
Grant 9,966,280 - Brown May 8, 2
2018-05-08
Method of stripping photoresist on a single substrate system
Grant 9,875,916 - Brown January 23, 2
2018-01-23
Etch system and method for single substrate processing
Grant 9,852,920 - Brown , et al. December 26, 2
2017-12-26
System Of Controlling Treatment Liquid Dispense For Spinning Substrates
App 20170301567 - BROWN; IAN J
2017-10-19
Polymer Removal Using Chromophores And Light Exposure
App 20170278695 - BROWN; Ian J.
2017-09-28
Systems And Methodologies For Vapor Phase Hydroxyl Radical Processing Of Substrates
App 20170263436 - BROWN; Ian J. ;   et al.
2017-09-14
Controlling cleaning of a layer on a substrate using nozzles
Grant 9,735,026 - Brown , et al. August 15, 2
2017-08-15
Method And Apparatus For Drying Semiconductor Substrates Using Liquid Carbon Dioxide
App 20170092484 - Brown; Ian J. ;   et al.
2017-03-30
Line Pattern Collapse Mitigation Through Gap-fill Material Application
App 20160363868 - SOMERVELL; Mark H. ;   et al.
2016-12-15
Techniques for Spin-on-Carbon Planarization
App 20160358786 - Hooge; Joshua S. ;   et al.
2016-12-08
Method and system of process chemical temperature control using an injection nozzle
Grant 9,513,556 - Brown , et al. December 6, 2
2016-12-06
Line pattern collapse mitigation through gap-fill material application
Grant 9,454,081 - Somervell , et al. September 27, 2
2016-09-27
Etch System And Method For Single Substrate Processing
App 20160155647 - Brown; Ian J. ;   et al.
2016-06-02
Sonic energy to generate active species for surface preparation, cleaning, and etching
Grant 9,327,322 - Brown May 3, 2
2016-05-03
Etch system and method for single substrate processing
Grant 9,257,292 - Brown , et al. February 9, 2
2016-02-09
Sequential stage mixing for a resist batch strip process
Grant 9,075,318 - Brown , et al. July 7, 2
2015-07-07
System For Processing Substrates With Two Or More Ultraviolet Light Sources That Provide Different Wavelengths Of Light
App 20150136186 - Brown; Ian J.
2015-05-21
System Of Controlling Treatment Liquid Dispense For Spinning Substrates
App 20150136183 - BROWN; IAN J
2015-05-21
Method and Hardware for Enhanced Removal of Post Etch Polymer and Hardmask Removal
App 20150128991 - Brown; Ian J. ;   et al.
2015-05-14
System and Method for Enhanced Removal of Metal Hardmask Using Ultra Violet Treatment
App 20150128990 - Brown; Ian J.
2015-05-14
Line Pattern Collapse Mitigation Through Gap-fill Material Application
App 20150125791 - SOMERVELL; Mark H. ;   et al.
2015-05-07
Sequential stage mixing for single substrate strip processing
Grant 8,940,103 - Brown January 27, 2
2015-01-27
Line pattern collapse mitigation through gap-fill material application
Grant 8,795,952 - Somervell , et al. August 5, 2
2014-08-05
Controlling Cleaning Of A Layer On A Substrate Using Nozzles
App 20140144463 - Brown; Ian J. ;   et al.
2014-05-29
Method And System Of Process Chemical Temperature Control Using An Injection Nozzle
App 20140137892 - Brown; Ian J. ;   et al.
2014-05-22
Substrate Cleaning Method And System Using Atmospheric Pressure Atomic Oxygen
App 20140130825 - BROWN; IAN J.
2014-05-15
Process Gas Generation For Cleaning Of Substrates
App 20140096792 - BROWN; IAN J.
2014-04-10
Method Of Stripping Photoresist On A Single Substrate System
App 20140007902 - BROWN; IAN J
2014-01-09
Method And System For Rapid Mixing Of Process Chemicals Using An Injection Nozzle
App 20130319465 - Brown; Ian J.
2013-12-05
Sonic Energy To Generate Active Species For Surface Preparation, Cleaning, And Etching
App 20130319459 - BROWN; IAN J
2013-12-05
Sequential Stage Mixing For Single Substrate Strip Processing
App 20130233343 - BROWN; IAN J.
2013-09-12
Sequential Stage Mixing For A Resist Batch Strip Process
App 20130233351 - BROWN; IAN J.
2013-09-12
Increasing Masking Layer Etch Rate And Selectivity
App 20120248061 - BROWN; IAN J. ;   et al.
2012-10-04
Etch System And Method For Single Substrate Processing
App 20120247505 - BROWN; IAN J. ;   et al.
2012-10-04
Method and system for monitoring contamination on a substrate
Grant 8,083,862 - Brown December 27, 2
2011-12-27
Line Pattern Collapse Mitigation Through Gap-fill Material Application
App 20110205505 - SOMERVELL; Mark H. ;   et al.
2011-08-25
Method for removing damaged dielectric material
Grant 7,795,148 - Brown September 14, 2
2010-09-14
Method for selective removal of damaged multi-stack bilayer films
Grant 7,723,237 - Hyland , et al. May 25, 2
2010-05-25
Method And System For Monitoring Contamination On A Substrate
App 20080216871 - Brown; Ian J.
2008-09-11
Method For Selective Removal Of Damaged Multi-stack Bilayer Films
App 20080142988 - Hyland; Sandra ;   et al.
2008-06-19
Method and system for patterning a dielectric film
Grant 7,288,483 - Brown October 30, 2
2007-10-30
Method for removing damaged dielectric material
App 20070235411 - Brown; Ian J.
2007-10-11
Method And System For Patterning A Dielectric Film
App 20070238298 - Brown; Ian J.
2007-10-11
Leak detection apparatus and method
Grant 6,820,016 - Brown , et al. November 16, 2
2004-11-16
Leak detection apparatus and method
App 20030167847 - Brown, Ian J. ;   et al.
2003-09-11
Magnet assembly for use in NMR apparatus
Grant RE36,782 - Brown , et al. July 18, 2
2000-07-18
Magnet assembly for use in NMR apparatus
Grant 4,587,504 - Brown , et al. May 6, 1
1986-05-06
Magnet system
Grant 4,584,549 - Brown , et al. April 22, 1
1986-04-22

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