Patent | Date |
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System and method for enhanced removal of metal hardmask using ultra violet treatment Grant 10,828,680 - Brown November 10, 2 | 2020-11-10 |
Uv-assisted Stripping Of Hardened Photoresist To Create Chemical Templates For Directed Self-assembly App 20200066509 - Somervell; Mark H. ;   et al. | 2020-02-27 |
Systems and methodologies for vapor phase hydroxyl radical processing of substrates Grant 10,490,399 - Brown , et al. Nov | 2019-11-26 |
Method and hardware for enhanced removal of post etch polymer and hardmask removal Grant 10,347,503 - Brown , et al. July 9, 2 | 2019-07-09 |
Substrate cleaning method and system using atmospheric pressure atomic oxygen Grant 10,249,509 - Brown | 2019-04-02 |
Process gas generation for cleaning of substrates Grant 9,966,280 - Brown May 8, 2 | 2018-05-08 |
Method of stripping photoresist on a single substrate system Grant 9,875,916 - Brown January 23, 2 | 2018-01-23 |
Etch system and method for single substrate processing Grant 9,852,920 - Brown , et al. December 26, 2 | 2017-12-26 |
System Of Controlling Treatment Liquid Dispense For Spinning Substrates App 20170301567 - BROWN; IAN J | 2017-10-19 |
Polymer Removal Using Chromophores And Light Exposure App 20170278695 - BROWN; Ian J. | 2017-09-28 |
Systems And Methodologies For Vapor Phase Hydroxyl Radical Processing Of Substrates App 20170263436 - BROWN; Ian J. ;   et al. | 2017-09-14 |
Controlling cleaning of a layer on a substrate using nozzles Grant 9,735,026 - Brown , et al. August 15, 2 | 2017-08-15 |
Method And Apparatus For Drying Semiconductor Substrates Using Liquid Carbon Dioxide App 20170092484 - Brown; Ian J. ;   et al. | 2017-03-30 |
Line Pattern Collapse Mitigation Through Gap-fill Material Application App 20160363868 - SOMERVELL; Mark H. ;   et al. | 2016-12-15 |
Techniques for Spin-on-Carbon Planarization App 20160358786 - Hooge; Joshua S. ;   et al. | 2016-12-08 |
Method and system of process chemical temperature control using an injection nozzle Grant 9,513,556 - Brown , et al. December 6, 2 | 2016-12-06 |
Line pattern collapse mitigation through gap-fill material application Grant 9,454,081 - Somervell , et al. September 27, 2 | 2016-09-27 |
Etch System And Method For Single Substrate Processing App 20160155647 - Brown; Ian J. ;   et al. | 2016-06-02 |
Sonic energy to generate active species for surface preparation, cleaning, and etching Grant 9,327,322 - Brown May 3, 2 | 2016-05-03 |
Etch system and method for single substrate processing Grant 9,257,292 - Brown , et al. February 9, 2 | 2016-02-09 |
Sequential stage mixing for a resist batch strip process Grant 9,075,318 - Brown , et al. July 7, 2 | 2015-07-07 |
System For Processing Substrates With Two Or More Ultraviolet Light Sources That Provide Different Wavelengths Of Light App 20150136186 - Brown; Ian J. | 2015-05-21 |
System Of Controlling Treatment Liquid Dispense For Spinning Substrates App 20150136183 - BROWN; IAN J | 2015-05-21 |
Method and Hardware for Enhanced Removal of Post Etch Polymer and Hardmask Removal App 20150128991 - Brown; Ian J. ;   et al. | 2015-05-14 |
System and Method for Enhanced Removal of Metal Hardmask Using Ultra Violet Treatment App 20150128990 - Brown; Ian J. | 2015-05-14 |
Line Pattern Collapse Mitigation Through Gap-fill Material Application App 20150125791 - SOMERVELL; Mark H. ;   et al. | 2015-05-07 |
Sequential stage mixing for single substrate strip processing Grant 8,940,103 - Brown January 27, 2 | 2015-01-27 |
Line pattern collapse mitigation through gap-fill material application Grant 8,795,952 - Somervell , et al. August 5, 2 | 2014-08-05 |
Controlling Cleaning Of A Layer On A Substrate Using Nozzles App 20140144463 - Brown; Ian J. ;   et al. | 2014-05-29 |
Method And System Of Process Chemical Temperature Control Using An Injection Nozzle App 20140137892 - Brown; Ian J. ;   et al. | 2014-05-22 |
Substrate Cleaning Method And System Using Atmospheric Pressure Atomic Oxygen App 20140130825 - BROWN; IAN J. | 2014-05-15 |
Process Gas Generation For Cleaning Of Substrates App 20140096792 - BROWN; IAN J. | 2014-04-10 |
Method Of Stripping Photoresist On A Single Substrate System App 20140007902 - BROWN; IAN J | 2014-01-09 |
Method And System For Rapid Mixing Of Process Chemicals Using An Injection Nozzle App 20130319465 - Brown; Ian J. | 2013-12-05 |
Sonic Energy To Generate Active Species For Surface Preparation, Cleaning, And Etching App 20130319459 - BROWN; IAN J | 2013-12-05 |
Sequential Stage Mixing For Single Substrate Strip Processing App 20130233343 - BROWN; IAN J. | 2013-09-12 |
Sequential Stage Mixing For A Resist Batch Strip Process App 20130233351 - BROWN; IAN J. | 2013-09-12 |
Increasing Masking Layer Etch Rate And Selectivity App 20120248061 - BROWN; IAN J. ;   et al. | 2012-10-04 |
Etch System And Method For Single Substrate Processing App 20120247505 - BROWN; IAN J. ;   et al. | 2012-10-04 |
Method and system for monitoring contamination on a substrate Grant 8,083,862 - Brown December 27, 2 | 2011-12-27 |
Line Pattern Collapse Mitigation Through Gap-fill Material Application App 20110205505 - SOMERVELL; Mark H. ;   et al. | 2011-08-25 |
Method for removing damaged dielectric material Grant 7,795,148 - Brown September 14, 2 | 2010-09-14 |
Method for selective removal of damaged multi-stack bilayer films Grant 7,723,237 - Hyland , et al. May 25, 2 | 2010-05-25 |
Method And System For Monitoring Contamination On A Substrate App 20080216871 - Brown; Ian J. | 2008-09-11 |
Method For Selective Removal Of Damaged Multi-stack Bilayer Films App 20080142988 - Hyland; Sandra ;   et al. | 2008-06-19 |
Method and system for patterning a dielectric film Grant 7,288,483 - Brown October 30, 2 | 2007-10-30 |
Method for removing damaged dielectric material App 20070235411 - Brown; Ian J. | 2007-10-11 |
Method And System For Patterning A Dielectric Film App 20070238298 - Brown; Ian J. | 2007-10-11 |
Leak detection apparatus and method Grant 6,820,016 - Brown , et al. November 16, 2 | 2004-11-16 |
Leak detection apparatus and method App 20030167847 - Brown, Ian J. ;   et al. | 2003-09-11 |
Magnet assembly for use in NMR apparatus Grant RE36,782 - Brown , et al. July 18, 2 | 2000-07-18 |
Magnet assembly for use in NMR apparatus Grant 4,587,504 - Brown , et al. May 6, 1 | 1986-05-06 |
Magnet system Grant 4,584,549 - Brown , et al. April 22, 1 | 1986-04-22 |