Brown; Daniel J. W.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Brown; Daniel J. W..The latest application filed is for "euv light source with subsystem(s) for maintaining lpp drive laser output during euv non-output periods".
Company Profile
2.53.57
- Brown; Daniel J. W. - San Diego CA
Patent Activity
| Patent | Date |
|---|---|
| EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods Grant 10,966,308 - Partlo , et al. March 30, 2 | 2021-03-30 |
| Euv Light Source With Subsystem(s) For Maintaining Lpp Drive Laser Output During Euv Non-output Periods App 20180184509 - Partlo; William N. ; et al. | 2018-06-28 |
| Euv Light Source With Subsystem(s) For Maintaining Lpp Drive Laser Output During Euv Non-output Periods App 20180020532 - Partlo; William N. ; et al. | 2018-01-18 |
| EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods Grant 9,390,827 - Partlo , et al. July 12, 2 | 2016-07-12 |
| Adaptive laser system for an extreme ultraviolet light source Grant 9,380,691 - Tao , et al. June 28, 2 | 2016-06-28 |
| Extreme ultraviolet light source Grant 9,338,870 - Tao , et al. May 10, 2 | 2016-05-10 |
| Regenerative ring resonator Grant RE45,957 - Ye , et al. March 29, 2 | 2016-03-29 |
| Target for extreme ultraviolet light source Grant 9,155,179 - Tao , et al. October 6, 2 | 2015-10-06 |
| Adaptive Laser System For An Extreme Ultraviolet Light Source App 20150250045 - Tao; Yezheng ; et al. | 2015-09-03 |
| Extreme Ultraviolet Light Source App 20150189728 - Tao; Yezheng ; et al. | 2015-07-02 |
| High power seed/amplifier laser system with beam shaping intermediate the seed and amplifier Grant 9,018,561 - Sandstrom , et al. April 28, 2 | 2015-04-28 |
| Target For Extreme Ultraviolet Light Source App 20150076374 - Tao; Yezheng ; et al. | 2015-03-19 |
| Master oscillator--power amplifier drive laser with pre-pulse for EUV light source Grant 8,958,143 - Hou , et al. February 17, 2 | 2015-02-17 |
| Target for extreme ultraviolet light source Grant 8,912,514 - Tao , et al. December 16, 2 | 2014-12-16 |
| Laser system Grant 8,908,735 - Ershov , et al. December 9, 2 | 2014-12-09 |
| Extreme ultraviolet light source Grant 8,866,110 - Tao , et al. October 21, 2 | 2014-10-21 |
| Target For Extreme Ultraviolet Light Source App 20140299791 - Tao; Yezheng ; et al. | 2014-10-09 |
| Extreme Ultraviolet Light Source App 20140264092 - Tao; Yezheng ; et al. | 2014-09-18 |
| Target for extreme ultraviolet light source Grant 8,791,440 - Tao , et al. July 29, 2 | 2014-07-29 |
| EUV Light Source With Subsystem(s) For Maintaining LPP Drive Laser Output During EUV Non-Output Periods App 20140145096 - Partlo; William N. ; et al. | 2014-05-29 |
| Master Oscillator-Power Amplifier Drive Laser With Pre-Pulse for EUV Light Source App 20140146387 - Hou; Kai-Chung ; et al. | 2014-05-29 |
| Extreme ultraviolet light source Grant 8,680,495 - Tao , et al. March 25, 2 | 2014-03-25 |
| EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods Grant 8,653,437 - Partlo , et al. February 18, 2 | 2014-02-18 |
| Master oscillator-power amplifier drive laser with pre-pulse for EUV light source Grant 8,654,438 - Hou , et al. February 18, 2 | 2014-02-18 |
| Oscillator-amplifier drive laser with seed protection for an EUV light source Grant 8,462,425 - Hou , et al. June 11, 2 | 2013-06-11 |
| Method and system for managing light source operation Grant 8,295,316 - Akins , et al. October 23, 2 | 2012-10-23 |
| Laser system Grant 8,170,078 - Ershov , et al. May 1, 2 | 2012-05-01 |
| Oscillator-amplifier Drive Laser With Seed Protection For An Euv Light Source App 20120092746 - Hou; Kai-Chung ; et al. | 2012-04-19 |
| Laser System App 20120087386 - Brown; Daniel J.W. ; et al. | 2012-04-12 |
| Euv Light Source With Subsystem(s) For Maintaining Lpp Drive Laser Output During Euv Non-output Periods App 20120080584 - Partlo; William N. ; et al. | 2012-04-05 |
| Laser system Grant 8,144,740 - Brown , et al. March 27, 2 | 2012-03-27 |
| Multi-chamber gas discharge laser bandwidth control through discharge timing Grant 8,102,889 - Jacques , et al. January 24, 2 | 2012-01-24 |
| Laser System App 20120002687 - Ershov; Alexander I. ; et al. | 2012-01-05 |
| Master Oscillator-power Amplifier Drive Laser With Pre-pulse For Euv Light Source App 20110317256 - Hou; Kai-Chung ; et al. | 2011-12-29 |
| Method and System for Managing Light Source Operation App 20110235663 - Akins; Robert P. ; et al. | 2011-09-29 |
| Regenerative ring resonator Grant 8,014,432 - Ye , et al. September 6, 2 | 2011-09-06 |
| Laser system Grant 7,999,915 - Ershov , et al. August 16, 2 | 2011-08-16 |
| Gas discharge laser chamber Grant 7,995,637 - Sandstrom , et al. August 9, 2 | 2011-08-09 |
| High Power High Pulse Repetition Rate Gas Discharge Laser System App 20110122901 - Sandstrom; Richard L. ; et al. | 2011-05-26 |
| Laser System App 20110102759 - Ershov; Alexander I. ; et al. | 2011-05-05 |
| Laser system Grant 7,920,616 - Brown , et al. April 5, 2 | 2011-04-05 |
| Regenerative Ring Resonator App 20110069733 - Ye; Hong ; et al. | 2011-03-24 |
| Laser system Grant 7,885,309 - Ershov , et al. February 8, 2 | 2011-02-08 |
| Multi-chamber gas discharge laser bandwidth control through discharge timing App 20100309939 - Jacques; Robert N. ; et al. | 2010-12-09 |
| Multi-chamber gas discharge laser bandwidth control through discharge timing Grant 7,830,934 - Jacques , et al. November 9, 2 | 2010-11-09 |
| Laser system Grant 7,822,092 - Ershov , et al. October 26, 2 | 2010-10-26 |
| Laser system Grant 7,778,302 - Ershov , et al. August 17, 2 | 2010-08-17 |
| Laser system Grant 7,746,913 - Ershov , et al. June 29, 2 | 2010-06-29 |
| Gas Discharge Laser Chamber App 20100142582 - Sandstrom; Richard L. ; et al. | 2010-06-10 |
| Laser system Grant 7,715,459 - Brown , et al. May 11, 2 | 2010-05-11 |
| Laser system App 20100108913 - Ershov; Alexander I. ; et al. | 2010-05-06 |
| Immersion lithography laser light source with pulse stretcher App 20100074295 - Partlo; William N. ; et al. | 2010-03-25 |
| Laser system Grant 7,643,529 - Brown , et al. January 5, 2 | 2010-01-05 |
| Immersion lithography laser light source with pulse stretcher Grant 7,643,528 - Partlo , et al. January 5, 2 | 2010-01-05 |
| Laser system Grant 7,630,424 - Ershov , et al. December 8, 2 | 2009-12-08 |
| Laser system App 20090296755 - Brown; Daniel J. W. ; et al. | 2009-12-03 |
| Laser system App 20090296758 - Brown; Daniel J.W. ; et al. | 2009-12-03 |
| Very narrow band, two chamber, high rep-rate gas discharge laser system Grant 7,567,607 - Knowles , et al. July 28, 2 | 2009-07-28 |
| Laser system App 20090122825 - Ershov; Alexander I. ; et al. | 2009-05-14 |
| High power seed/amplifier laser system with beam shaping intermediate the seed and amplifier App 20090116530 - Sandstrom; Richard L. ; et al. | 2009-05-07 |
| Immersion lithography laser light source with pulse stretcher App 20090080476 - Partlo; William N. ; et al. | 2009-03-26 |
| Laser system App 20090067468 - Brown; Daniel J.W. ; et al. | 2009-03-12 |
| Laser system App 20080267241 - Brown; Daniel J.W. ; et al. | 2008-10-30 |
| Laser system App 20080267242 - Ershov; Alexander I. ; et al. | 2008-10-30 |
| Laser system App 20080225904 - Brown; Daniel J.W. ; et al. | 2008-09-18 |
| Laser system App 20080225908 - Ershov; Alexander I. ; et al. | 2008-09-18 |
| Laser system App 20080165337 - Ershov; Alexander I. ; et al. | 2008-07-10 |
| Laser system App 20080144671 - Ershov; Alexander I. ; et al. | 2008-06-19 |
| LPP EUV light source Grant 7,317,196 - Partlo , et al. January 8, 2 | 2008-01-08 |
| Line selected F.sub.2 two chamber laser system Grant 7,218,661 - Knowles , et al. May 15, 2 | 2007-05-15 |
| Laser output beam wavefront splitter for bandwidth spectrum control Grant 7,154,928 - Sandstrom , et al. December 26, 2 | 2006-12-26 |
| Relax gas discharge laser lithography light source Grant 7,088,758 - Sandstrom , et al. August 8, 2 | 2006-08-08 |
| Multi-chamber gas discharge laser bandwidth control through discharge timing App 20060146900 - Jacques; Robert N. ; et al. | 2006-07-06 |
| LLP EUV drive laser App 20060146906 - Brown; Daniel J.W. ; et al. | 2006-07-06 |
| Very narrow band, two chamber, high rep-rate gas discharge laser system App 20060126697 - Knowles; David S. ; et al. | 2006-06-15 |
| Very narrow band, two chamber, high rep-rate gas discharge laser system Grant 7,061,961 - Knowles , et al. June 13, 2 | 2006-06-13 |
| Line selected F2 two chamber laser system Grant 7,058,107 - Knowles , et al. June 6, 2 | 2006-06-06 |
| High power high pulse repetition rate gas discharge laser system bandwidth management App 20060114956 - Sandstrom; Richard L. ; et al. | 2006-06-01 |
| Very narrow band, two chamber, high reprate gas discharge laser system Grant 6,985,508 - Knowles , et al. January 10, 2 | 2006-01-10 |
| Laser output beam wavefront splitter for bandwidth spectrum control App 20050286598 - Sandstrom, Richard L. ; et al. | 2005-12-29 |
| Very Narrow Band, Two Chamber, High Rep-rate Gas Discharge Laser System App 20050271109 - Knowles, David S. ; et al. | 2005-12-08 |
| LPP EUV light source App 20050205811 - Partlo, William N. ; et al. | 2005-09-22 |
| Relax gas discharge laser lithography light source App 20050083983 - Sandstrom, Richard L. ; et al. | 2005-04-21 |
| Optical elements with protective undercoating App 20050025882 - Partlo, William N. ; et al. | 2005-02-03 |
| Line selected F2 two chamber laser system App 20040258122 - Knowles, David S. ; et al. | 2004-12-23 |
| Line selected F2 two chamber laser system Grant 6,801,560 - Knowles , et al. October 5, 2 | 2004-10-05 |
| Line selected F2 two chamber laser system App 20040174919 - Knowles, David S. ; et al. | 2004-09-09 |
| High resolution spectral measurement device Grant 6,713,770 - Sandstrom , et al. March 30, 2 | 2004-03-30 |
| Very narrow band, two chamber, high reprate gas discharge laser system App 20040047385 - Knowles, David S. ; et al. | 2004-03-11 |
| Lithography laser system with in-place alignment tool Grant 6,704,340 - Ershov , et al. March 9, 2 | 2004-03-09 |
| Automatic gas control system for a gas discharge laser App 20040022293 - Rule, John A. ; et al. | 2004-02-05 |
| Very narrow band, two chamber, high rep rate gas discharge laser system Grant 6,625,191 - Knowles , et al. September 23, 2 | 2003-09-23 |
| Very narrow band, two chamber, high rep rate gas discharge laser system Grant 6,567,450 - Myers , et al. May 20, 2 | 2003-05-20 |
| Lithography laser system with in-place alignment tool App 20030091087 - Ershov, Alexander I. ; et al. | 2003-05-15 |
| High resolution etalon-grating spectrometer Grant 6,538,737 - Sandstrom , et al. March 25, 2 | 2003-03-25 |
| Laser wavelength control unit with piezoelectric driver Grant 6,532,247 - Spangler , et al. March 11, 2 | 2003-03-11 |
| Very narrow band, two chamber, high rep rate gas discharge laser system App 20020154668 - Knowles, David S. ; et al. | 2002-10-24 |
| Line selected F2 two chamber laser system App 20020154671 - Knowles, David S. ; et al. | 2002-10-24 |
| Large diffraction grating for gas discharge laser App 20020127497 - Brown, Daniel J. W. ; et al. | 2002-09-12 |
| High resolution spectral measurement device App 20020121608 - Sandstrom, Richard L. ; et al. | 2002-09-05 |
| High resolution etalon-grating spectrometer App 20020101589 - Sandstrom, Richard L. ; et al. | 2002-08-01 |
| Very narrow band, two chamber, high rep rate gas discharge laser system App 20020044586 - Myers, David W. ; et al. | 2002-04-18 |
| Laser wavelength control unit with piezoelectric driver App 20020006149 - Spangler, Ronald L. ; et al. | 2002-01-17 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 