| Patent | Date |
|---|
Spatial monitoring and control of plasma processing environments
Grant 11,437,221 - Carter , et al. September 6, 2 | 2022-09-06 |
Systems And Methods For Monitoring Faults, Anomalies, And Other Characteristics Of A Switched Mode Ion Energy Distribution System
App 20220157555 - Carter; Daniel ; et al. | 2022-05-19 |
Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system
Grant 11,189,454 - Carter , et al. November 30, 2 | 2021-11-30 |
System, Method, And Apparatus For Ion Current Compensation
App 20210327679 - Carter; Daniel ; et al. | 2021-10-21 |
Spatial Monitoring And Control Of Plasma Processing Environments
App 20210241996 - Carter; Daniel ; et al. | 2021-08-05 |
System, method, and apparatus for controlling ion energy distribution in plasma processing systems
Grant 11,011,349 - Brouk , et al. May 18, 2 | 2021-05-18 |
Machine Learning Based Tenant-specific Chatbots For Performing Actions In A Multi-tenant System
App 20210141865 - Machado; Michael ; et al. | 2021-05-13 |
Ion Energy Bias Control With Plasma-source Pulsing
App 20200090905 - Brouk; Victor ; et al. | 2020-03-19 |
System, Method, And Apparatus For Controlling Ion Energy Distribution In Plasma Processing Systems
App 20190180982 - Brouk; Victor ; et al. | 2019-06-13 |
Impedance matching system and method of operating the same
Grant 10,269,540 - Carter , et al. | 2019-04-23 |
System, Method, And Apparatus For Controlling Ion Energy Distribution In Plasma Processing Systems
App 20180019100 - Brouk; Victor ; et al. | 2018-01-18 |
Systems And Methods For Monitoring Faults, Anomalies, And Other Characteristics Of A Switched Mode Ion Energy Distribution System
App 20170278665 - Carter; Daniel ; et al. | 2017-09-28 |
Method of controlling the switched mode ion energy distribution system
Grant 9,767,988 - Brouk , et al. September 19, 2 | 2017-09-19 |
Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system
Grant 9,685,297 - Carter , et al. June 20, 2 | 2017-06-20 |
Systems, methods, and apparatus for minimizing cross coupled wafer surface potentials
Grant 9,589,767 - Hoffman , et al. March 7, 2 | 2017-03-07 |
Electrostatic remote plasma source system and method
Grant 9,524,854 - Hoffman , et al. December 20, 2 | 2016-12-20 |
Wafer chucking system for advanced plasma ion energy processing systems
Grant 9,435,029 - Brouk , et al. September 6, 2 | 2016-09-06 |
Method of controlling the switched mode ion energy distribution system
Grant 9,362,089 - Brouk , et al. June 7, 2 | 2016-06-07 |
System, method and apparatus for controlling ion energy distribution of a projected plasma
Grant 9,309,594 - Hoffman , et al. April 12, 2 | 2016-04-12 |
Method and apparatus for controlling ion energy distribution
Grant 9,287,092 - Brouk , et al. March 15, 2 | 2016-03-15 |
System, method and apparatus for controlling ion energy distribution
Grant 9,287,086 - Brouk , et al. March 15, 2 | 2016-03-15 |
Ion Energy Bias Control Apparatus
App 20160020072 - Brouk; Victor ; et al. | 2016-01-21 |
Systems and methods for calibrating a switched mode ion energy distribution system
Grant 9,210,790 - Hoffman , et al. December 8, 2 | 2015-12-08 |
Method for controlling ion energy distribution
Grant 9,208,992 - Brouk , et al. December 8, 2 | 2015-12-08 |
Electrostatic Remote Plasma Source System And Method
App 20150279631 - Hoffman; Daniel J. ; et al. | 2015-10-01 |
Capacitively coupled remote plasma source
Grant 9,142,388 - Hoffman , et al. September 22, 2 | 2015-09-22 |
Wide dynamic range ion energy bias control; fast ion energy switching; ion energy control and a pulsed bias supply; and a virtual front panel
Grant 9,105,447 - Brouk , et al. August 11, 2 | 2015-08-11 |
Method For Controlling Ion Energy Distribution
App 20150144596 - Brouk; Victor ; et al. | 2015-05-28 |
Systems, Methods, And Apparatus For Minimizing Cross Coupled Wafer Surface Potentials
App 20150024515 - Hoffman; Daniel J. ; et al. | 2015-01-22 |
Passive power distribution for multiple electrode inductive plasma source
Grant 8,742,669 - Carter , et al. June 3, 2 | 2014-06-03 |
Electrostatic remote plasma source
Grant 8,723,423 - Hoffman , et al. May 13, 2 | 2014-05-13 |
Detecting and preventing instabilities in plasma processes
Grant 8,674,606 - Carter , et al. March 18, 2 | 2014-03-18 |
Wide Dynamic Range Ion Energy Bias Control; Fast Ion Energy Switching; Ion Energy Control And A Pulsed Bias Supply; And A Virtual Front Panel
App 20140061156 - Brouk; Victor ; et al. | 2014-03-06 |
Systems And Methods For Monitoring Faults, Anomalies, And Other Characteristics Of A Switched Mode Ion Energy Distribution System
App 20140062495 - Carter; Daniel ; et al. | 2014-03-06 |
Systems And Methods For Calibrating A Switched Mode Ion Energy Distribution System
App 20140062303 - Hoffman; Daniel J. ; et al. | 2014-03-06 |
Passive Power Distribution For Multiple Electrode Inductive Plasma Source
App 20130320853 - Carter; Daniel ; et al. | 2013-12-05 |
Method Of Controlling The Switched Mode Ion Energy Distribution System
App 20120318456 - Brouk; Victor ; et al. | 2012-12-20 |
Method Of Controlling The Switched Mode Ion Energy Distribution System
App 20120319584 - Brouk; Victor ; et al. | 2012-12-20 |
System, Method And Apparatus For Controlling Ion Energy Distribution Of A Projected Plasma
App 20120217221 - Hoffman; Daniel J. ; et al. | 2012-08-30 |
Electrostatic Remote Plasma Source
App 20120187844 - Hoffman; Daniel J. ; et al. | 2012-07-26 |
Wafer Chucking System for Advanced Plasma Ion Energy Processing Systems
App 20120052599 - Brouk; Victor ; et al. | 2012-03-01 |
System, Method And Apparatus For Controlling Ion Energy Distribution
App 20110259851 - Brouk; Victor ; et al. | 2011-10-27 |
Method And Apparatus For Controlling Ion Energy Distribution
App 20100276273 - Heckman; Randy ; et al. | 2010-11-04 |
Detecting and Preventing Instabilities in Plasma Processes
App 20100270141 - Carter; Daniel ; et al. | 2010-10-28 |
System, method, and apparatus for monitoring characteristics of RF power
Grant 7,822,565 - Brouk , et al. October 26, 2 | 2010-10-26 |
System, Method, And Apparatus For Monitoring Characteristics Of Rf Power
App 20090167290 - Brouk; Victor ; et al. | 2009-07-02 |
| 