Patent | Date |
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Thermal gradient enhanced CVD deposition at low pressure App 20050013937 - Cook, Robert C. ;   et al. | 2005-01-20 |
Thermal gradient enhanced CVD deposition at low pressure Grant 6,780,464 - Cook , et al. August 24, 2 | 2004-08-24 |
High rate deposition at low pressures in a small batch reactor App 20030049372 - Cook, Robert C. ;   et al. | 2003-03-13 |
Thermal gradient enhanced CVD deposition at low pressure App 20020028290 - Cook, Robert C. ;   et al. | 2002-03-07 |
Mini-batch process chamber Grant 6,352,593 - Brors , et al. March 5, 2 | 2002-03-05 |
Method and apparatus for improved chemical vapor deposition processes using tunable temperature controlled gas injectors Grant 6,352,594 - Cook , et al. March 5, 2 | 2002-03-05 |
Method And Apparatus For Improved Chemical Vapor Deposition Processes Using Tunable Temperature Controlled Gas Injectors App 20010047764 - COOK, ROBERT C. ;   et al. | 2001-12-06 |
Vertical plasma enhanced process apparatus and method Grant 6,321,680 - Cook , et al. November 27, 2 | 2001-11-27 |
High Rate Silicon Nitride Deposition Method At Low Pressures App 20010041218 - COOK, ROBERT C. ;   et al. | 2001-11-15 |
Vertical Plasma Enhanced Process Apparatus & Method App 20010029892 - COOK, ROBERT C. ;   et al. | 2001-10-18 |
High rate silicon deposition method at low pressures Grant 6,287,635 - Cook , et al. September 11, 2 | 2001-09-11 |
Method and apparatus for cold wall chemical vapor deposition Grant RE36,957 - Brors , et al. November 21, 2 | 2000-11-21 |
Method and apparatus for cold wall chemical vapor deposition Grant 5,551,985 - Brors , et al. September 3, 1 | 1996-09-03 |
Optoelectronic detector for chemical reactions Grant 5,291,030 - Brors March 1, 1 | 1994-03-01 |
Method and apparatus for deposition of tungsten silicides Grant 4,920,908 - Brors , et al. May 1, 1 | 1990-05-01 |
Low resistivity tungsten silicon composite film Grant 4,851,295 - Brors July 25, 1 | 1989-07-25 |
Rapid thermal CVD apparatus Grant 4,796,562 - Brors , et al. January 10, 1 | 1989-01-10 |
Process for depositing a low resistivity tungsten silicon composite film on a substrate Grant 4,629,635 - Brors December 16, 1 | 1986-12-16 |
Method and apparatus for deposition of tungsten silicides Grant 4,565,157 - Brors , et al. January 21, 1 | 1986-01-21 |
Mask structure for X-ray lithography and method for making same Grant 4,539,278 - Williams , et al. September 3, 1 | 1985-09-03 |
Magnetron sputter cathode assembly Grant 4,169,031 - Brors September 25, 1 | 1979-09-25 |