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Patent applications and USPTO patent grants for BROOKS AUTOMATION (GERMANY) GmbH.The latest application filed is for "automatic handling buffer for bare stocker".
Patent | Date |
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Tool compiler Grant 11,372,625 - Tanguy , et al. June 28, 2 | 2022-06-28 |
Cleaning systems and methods for semiconductor substrate storage articles Grant 11,167,322 - Rebstock November 9, 2 | 2021-11-09 |
Semiconductor cleaner systems and methods Grant 11,152,203 - Rebstock October 19, 2 | 2021-10-19 |
Method for controlling a PLC using a PC program Grant 11,137,735 - Li , et al. October 5, 2 | 2021-10-05 |
Semiconductor stocker systems and methods Grant 11,107,715 - Rebstock August 31, 2 | 2021-08-31 |
Robot with gas flow sensor coupled to robot arm Grant 11,024,526 - Rebstock June 1, 2 | 2021-06-01 |
Automatic Handling Buffer For Bare Stocker App 20210057255 - Rebstock; Lutz | 2021-02-25 |
Workpiece stocker with circular configuration Grant 10,930,536 - Rebstock February 23, 2 | 2021-02-23 |
Inspection System App 20210050237 - REBSTOCK; Lutz | 2021-02-18 |
Semiconductor cleaner systems and methods Grant 10,892,155 - Rebstock January 12, 2 | 2021-01-12 |
Semiconductor stocker systems and methods Grant 10,872,796 - Rebstock December 22, 2 | 2020-12-22 |
Automatic handling buffer for bare stocker Grant 10,741,431 - Rebstock A | 2020-08-11 |
Reticle compartment and diffusor plate Grant 10,727,098 - Rebstock | 2020-07-28 |
Method For Inspecting A Container And Inspection System App 20200203201 - WENDEL; Alexander | 2020-06-25 |
Removable compartments for workpiece stocker Grant 10,643,878 - Rebstock | 2020-05-05 |
Inspection system Grant 10,593,576 - Rebstock | 2020-03-17 |
Tool Compiler App 20200050435 - TANGUY; Francois ;   et al. | 2020-02-13 |
Semiconductor Stocker Systems And Methods App 20200051845 - REBSTOCK; Lutz | 2020-02-13 |
Method For Cleaning A Synthetic Surface App 20200043766 - REBSTOCK; Lutz ;   et al. | 2020-02-06 |
Container storage add-on for bare workpiece stocker Grant 10,529,609 - Rebstock J | 2020-01-07 |
Semiconductor stocker systems and methods Grant 10,453,722 - Rebstock Oc | 2019-10-22 |
Tool compiler Grant 10,452,362 - Tanguy , et al. Oc | 2019-10-22 |
Semiconductor Cleaner Systems And Methods App 20190148133 - Rebstock; Lutz | 2019-05-16 |
Semiconductor Stocker Systems And Methods App 20190139803 - Rebstock; Lutz | 2019-05-09 |
Workpiece Stocker With Circular Configuration App 20190019709 - REBSTOCK; Lutz | 2019-01-17 |
Cleaning Systems And Methods For Semiconductor Substrate Storage Articles App 20180369885 - REBSTOCK; Lutz | 2018-12-27 |
Semiconductor Cleaner Systems And Methods App 20180350589 - Rebstock; Lutz | 2018-12-06 |
Simultaneous wafer ID reading Grant 10,096,500 - Barker October 9, 2 | 2018-10-09 |
Semiconductor cleaner systems and methods Grant 10,096,461 - Rebstock October 9, 2 | 2018-10-09 |
Cleaning systems and methods for semiconductor substrate storage articles Grant 10,065,222 - Rebstock September 4, 2 | 2018-09-04 |
Tool Compiler App 20180239594 - TANGUY; Francois ;   et al. | 2018-08-23 |
Semiconductor cleaner systems and methods Grant 10,043,651 - Rebstock August 7, 2 | 2018-08-07 |
Semiconductor cleaner systems and methods Grant 10,026,604 - Rebstock July 17, 2 | 2018-07-17 |
Clean transfer robot Grant 9,943,969 - Barker , et al. April 17, 2 | 2018-04-17 |
Buffer station for stocker system Grant 9,919,871 - Rebstock March 20, 2 | 2018-03-20 |
Recirculation substrate container purging systems Grant 9,868,140 - Rebstock January 16, 2 | 2018-01-16 |
Automatic Handling Buffer For Bare Stocker App 20170338139 - REBSTOCK; Lutz | 2017-11-23 |
Semiconductor Stocker Systems And Methods App 20170162413 - REBSTOCK; Lutz | 2017-06-08 |
Semiconductor Cleaner Systems And Methods App 20170025288 - Rebstock; Lutz | 2017-01-26 |
Inventory monitoring of live-storage systems by means of RFID Grant 8,955,748 - Dittrich , et al. February 17, 2 | 2015-02-17 |
Inventory Monitoring Of Live-storage Systems By Means Of Rfid App 20130075470 - Dittrich; Gerald ;   et al. | 2013-03-28 |
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