Broodbakker; Petrus Johannes Maria
Patent Applications and Registrations
Patent applications and USPTO patent grants for Broodbakker; Petrus Johannes Maria.The latest application filed is for "lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby".
- Broodbakker; Petrus Johannes Maria - Eindhoven NL
| Patent | Date |
|---|---|
| Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby Grant 7,646,471 - Teunissen , et al. January 12, 2 | 2010-01-12 |
| Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby App 20080036988 - Teunissen; Paulus Antonius Andreas ; et al. | 2008-02-14 |
| Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby Grant 7,248,337 - Teunissen , et al. July 24, 2 | 2007-07-24 |
| Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby App 20040165169 - Teunissen, Paulus Antonius Andreas ; et al. | 2004-08-26 |
| Off-axis levelling in lithographic projection apparatus App 20040130691 - Boonman, Marcus Emile Joannes ; et al. | 2004-07-08 |
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