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Broeke; Doug Van Den Patent Filings

Broeke; Doug Van Den

Patent Applications and Registrations

Patent applications and USPTO patent grants for Broeke; Doug Van Den.The latest application filed is for "method of achieving cd linearity control for full-chip cpl manufacturing".

Company Profile
0.2.5
  • Broeke; Doug Van Den - Sunnyvale CA
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Method of achieving CD linearity control for full-chip CPL manufacturing
App 20070148562 - Broeke; Doug Van Den ;   et al.
2007-06-28
Method of achieving CD linearity control for full-chip CPL manufacturing
Grant 7,211,815 - Broeke , et al. May 1, 2
2007-05-01
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography
App 20050125765 - Broeke, Doug Van Den ;   et al.
2005-06-09
Method of achieving CD linearity control for full-chip CPL manufacturing
App 20040115539 - Broeke, Doug Van Den ;   et al.
2004-06-17
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography
App 20040010770 - Broeke, Doug Van Den ;   et al.
2004-01-15
Method and apparatus for making photomasks with improved inside corner resolution
App 20020051913 - Broeke, Doug Van Den
2002-05-02
Use of intersecting subresolution features for microlithography
Grant 6,139,994 - Broeke , et al. October 31, 2
2000-10-31

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