Brodie; Alan D.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Brodie; Alan D..The latest application filed is for "arrayed column detector".

Company Profile

4.26.16

Brodie; Alan D. - Palo Alto CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Defect inspection and review using transmissive current image of charged particle beam system Grant 11,410,830 - Xiao , et al. August 9, 2	2022-08-09
Multi-beam electron characterization tool with telecentric illumination Grant 11,373,838 - Brodie June 28, 2	2022-06-28
Arrayed column detector Grant 11,239,048 - Brodie , et al. February 1, 2	2022-02-01
Arrayed Column Detector App 20210280386 - Brodie; Alan D. ; et al.	2021-09-09
Plasmonic Photocathode Emitters At Ultraviolet And Visible Wavelengths App 20200266019 - Ioakeimidi; Katerina ; et al.	2020-08-20
Multi-Beam Electron Characterization Tool with Telecentric Illumination App 20200126752 - Brodie; Alan D.	2020-04-23
Apparatus and method for correcting arrayed astigmatism in a multi-column scanning electron microscopy system Grant 10,497,536 - Brodie De	2019-12-03
Position Feedback For Multi-beam Particle Detector App 20190227010 - Brodie; Alan D. ; et al.	2019-07-25
Position feedback for multi-beam particle detector Grant 10,338,013 - Brodie , et al.	2019-07-02
Reduced Coulomb interactions in a multi-beam column Grant 10,242,839 - Brodie	2019-03-26
Reduced Coulomb Interactions in a Multi-Beam Column App 20180323034 - Brodie; Alan D.	2018-11-08
Digital pattern generator having charge drain coating Grant 10,072,334 - Tong , et al. September 11, 2	2018-09-11
Apparatus and Method for Correcting Arrayed Astigmatism in a Multi-Column Scanning Electron Microscopy System App 20180068825 - Brodie; Alan D.	2018-03-08
Digital Pattern Generator Having Charge Drain Coating App 20180037993 - Tong; William M. ; et al.	2018-02-08
Charge drain coating for electron-optical MEMS Grant 9,824,851 - Tong , et al. November 21, 2	2017-11-21
Apparatus and methods for electron beam lithography using array cathode Grant 9,715,995 - Standiford , et al. July 25, 2	2017-07-25
Charge Drain Coating For Electron-optical Mems App 20160358742 - Tong; William M. ; et al.	2016-12-08
Pillar-supported array of micro electron lenses Grant 9,214,344 - Brodie , et al. December 15, 2	2015-12-15
Pillar-supported Array Of Micro Electron Lenses App 20150340195 - BRODIE; Alan D. ; et al.	2015-11-26
Electron beam lithography with linear column array and rotary stage Grant 9,040,942 - Standiford , et al. May 26, 2	2015-05-26
Compact high-voltage electron gun Grant 8,957,394 - Brodie , et al. February 17, 2	2015-02-17
Compact High-voltage Electron Gun App 20130134324 - BRODIE; Alan D. ; et al.	2013-05-30
Well-based dynamic pattern generator Grant 8,253,119 - Brodie , et al. August 28, 2	2012-08-28
Sampling feedback system Grant 7,615,747 - Brodie November 10, 2	2009-11-10
Method and apparatus for aberration-insensitive electron beam imaging Grant 7,405,402 - Vedula , et al. July 29, 2	2008-07-29
High current density particle beam system Grant 7,335,894 - Frosien , et al. February 26, 2	2008-02-26
Method and apparatus for beam current fluctuation correction Grant 7,091,486 - McCord , et al. August 15, 2	2006-08-15
High current density particle beam system App 20060151711 - Frosien; Juergen ; et al.	2006-07-13
Multi-beam multi-column electron beam inspection system Grant 6,977,375 - Yin , et al. December 20, 2	2005-12-20
Multi-beam multi-column electron beam inspection system Grant 6,844,550 - Yin , et al. January 18, 2	2005-01-18
Electron optics for multi-beam electron beam lithography tool App 20040119021 - Parker, N. William ; et al.	2004-06-24
Electron optics for multi-beam electron beam lithography tool Grant 6,617,587 - Parker , et al. September 9, 2	2003-09-09
Electron Optics For Multi-beam Electron Beam Lithography Tool App 20030085360 - Parker, N. William ; et al.	2003-05-08
Multi-beam multi-column electron beam inspection system App 20020015143 - Yin, Edward M. ; et al.	2002-02-07
Inspecting optical masks with electron beam microscopy Grant 5,717,204 - Meisburger , et al. February 10, 1	1998-02-10
Inspecting optical masks with electron beam microscopy Grant 5,665,968 - Meisburger , et al. September 9, 1	1997-09-09
Electron beam inspection system and method Grant 5,578,821 - Meisberger , et al. November 26, 1	1996-11-26
Electron beam inspection system and method Grant 5,502,306 - Meisburger , et al. March 26, 1	1996-03-26

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