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Patent applications and USPTO patent grants for Brodie; Alan.The latest application filed is for "field curvature correction for multi-beam inspection systems".
Patent | Date |
---|---|
Field curvature correction for multi-beam inspection systems Grant 11,302,511 - Brodie , et al. April 12, 2 | 2022-04-12 |
Light-emitting device test systems Grant 9,874,597 - McCord , et al. January 23, 2 | 2018-01-23 |
Field Curvature Correction for Multi-Beam Inspection Systems App 20170229279 - Brodie; Alan ;   et al. | 2017-08-10 |
Light-emitting Device Test Systems App 20150316604 - MCCORD; Mark ;   et al. | 2015-11-05 |
Electron microscope assembly for viewing the wafer plane image of an electron beam lithography tool Grant 8,642,981 - Petric , et al. February 4, 2 | 2014-02-04 |
Non-shot-noise-limited source for electron beam lithography or inspection Grant 8,063,365 - Standiford , et al. November 22, 2 | 2011-11-22 |
Contamination pinning for auger analysis Grant 7,855,362 - Brodie , et al. December 21, 2 | 2010-12-21 |
Sharpening metal carbide emitters Grant 7,828,622 - Brodie , et al. November 9, 2 | 2010-11-09 |
NCAGE Code | 3GX26 | BRODIE, ALAN!DBA BEO SYSTEMS |
CAGE Code | 3GX26 | BRODIE, ALAN BEO SYSTEMS |
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