| Patent | Date |
|---|
Frame Reveals With Maskless Lithography In The Manufacture Of Integrated Circuits
App 20220165677 - Kloster; Grant ; et al. | 2022-05-26 |
EUV phase-shift SRAF masks by means of embedded phase shift layers
Grant 11,300,885 - Bristol , et al. April 12, 2 | 2022-04-12 |
Chemical Compositions & Methods Of Patterning Microelectronic Device Structures
App 20210371566 - Han; Eungnak ; et al. | 2021-12-02 |
Metal Oxycarbide Resists As Leave Behind Plugs
App 20200335434 - KRYSAK; Marie ; et al. | 2020-10-22 |
Chain Scission Photoresists And Methods For Forming Chain Scission Photoresists
App 20200103754 - BRISTOL; Robert ; et al. | 2020-04-02 |
Euv Phase-shift Sraf Masks By Means Of Embedded Phase Shift Layers
App 20200033736 - BRISTOL; Robert ; et al. | 2020-01-30 |
Directed self assembly of block copolymers to form vias aligned with interconnects
Grant 9,530,688 - Nyhus , et al. December 27, 2 | 2016-12-27 |
Directed Self Assembly Of Block Copolymers To Form Vias Aligned With Interconnects
App 20150348839 - Nyhus; Paul A. ; et al. | 2015-12-03 |
Directed self assembly of block copolymers to form vias aligned with interconnects
Grant 9,153,477 - Nyhus , et al. October 6, 2 | 2015-10-06 |
Reducing Line Edge Roughness by Particle Beam Exposure
App 20100096566 - Bristol; Robert ; et al. | 2010-04-22 |
Plasma-based debris mitigation for extreme ultraviolet (EUV) light source
Grant 7,652,272 - Ruzic , et al. January 26, 2 | 2010-01-26 |
Technique to prevent tin contamination of mirrors and electrodes in an EUV lithography system
Grant 7,567,379 - Bristol , et al. July 28, 2 | 2009-07-28 |
Active hardmask for lithographic patterning
Grant 7,527,920 - Goldstein , et al. May 5, 2 | 2009-05-05 |
Erosion resistance of EUV source electrodes
Grant 7,446,329 - Bristol , et al. November 4, 2 | 2008-11-04 |
Enhancing photoresist performance using electric fields
App 20080220380 - Bristol; Robert ; et al. | 2008-09-11 |
Erosion mitigation for collector optics using electric and magnetic fields
Grant 7,423,275 - Lee , et al. September 9, 2 | 2008-09-09 |
In-tool and out-of-tool protection of extreme ultraviolet (EUV) reticles
Grant 7,413,586 - Ramamoorthy , et al. August 19, 2 | 2008-08-19 |
In-tool and Out-of-Tool Protection of Extreme Ultraviolet (EUV) Reticles
App 20080174749 - Ramamoorthy; Arun ; et al. | 2008-07-24 |
Enhancing photoresist performance using electric fields
Grant 7,374,867 - Bristol , et al. May 20, 2 | 2008-05-20 |
Debris mitigation device
Grant 7,355,190 - Bristol April 8, 2 | 2008-04-08 |
Plasma-Based Debris Mitigation for Extreme Ultraviolet (EUV) Light Source
App 20070235666 - Ruzic; David ; et al. | 2007-10-11 |
Plasma-based debris mitigation for extreme ultraviolet (EUV) light source
Grant 7,230,258 - Ruzic , et al. June 12, 2 | 2007-06-12 |
In-situ cleaning of light source collector optics
Grant 7,195,021 - Chan , et al. March 27, 2 | 2007-03-27 |
Extreme ultraviolet pellicle using a thin film and supportive mesh
Grant 7,153,615 - Bristol , et al. December 26, 2 | 2006-12-26 |
Pre-oxidized protective layer for lithography
App 20060175616 - Chandhok; Manish ; et al. | 2006-08-10 |
Optics for extreme ultraviolet lithography
Grant 7,078,700 - Chandhok , et al. July 18, 2 | 2006-07-18 |
Protective coatings for radiation source components
Grant 7,041,993 - Chandhok , et al. May 9, 2 | 2006-05-09 |
Active hardmask for lithographic patterning
App 20060093972 - Goldstein; Michael ; et al. | 2006-05-04 |
Active hardmask for lithographic patterning
Grant 7,033,739 - Goldstein , et al. April 25, 2 | 2006-04-25 |
Debris mitigation device
App 20060017027 - Bristol; Robert | 2006-01-26 |
In-situ cleaning of light source collector optics
App 20060000489 - Chan; Michael ; et al. | 2006-01-05 |
Optics for extreme ultraviolet lithography
App 20060000985 - Chandhok; Manish ; et al. | 2006-01-05 |
In-situ cleaning of light source collector optics
Grant 6,968,850 - Chan , et al. November 29, 2 | 2005-11-29 |
Debris mitigation device
Grant 6,963,071 - Bristol November 8, 2 | 2005-11-08 |
Technique to prevent tin contamination of mirrors and electrodes in an EUV lithography system
App 20050244572 - Bristol, Robert ; et al. | 2005-11-03 |
In-tool and out-of-tool protection of extreme ultraviolet (EUV) reticles
App 20050191565 - Ramamoorthy, Arun ; et al. | 2005-09-01 |
Erosion mitigation for collector optics using electric and magnetic fields
App 20050155624 - Lee, Sang Hun ; et al. | 2005-07-21 |
Enhancing photoresist performance using electric fields
App 20050074706 - Bristol, Robert ; et al. | 2005-04-07 |
Absorptive resists in an extreme ultraviolet (EUV) imaging layer
App 20050069818 - Bristol, Robert ; et al. | 2005-03-31 |
Extreme ultraviolet pellicle using a thin film and supportive mesh
App 20050042153 - Bristol, Robert ; et al. | 2005-02-24 |
Erosion resistance of EUV source electrodes
App 20050031502 - Bristol, Robert ; et al. | 2005-02-10 |
Protective coatings for radiation source components
App 20050019492 - Chandhok, Manish ; et al. | 2005-01-27 |
Plasma-based debris mitigation for extreme ultraviolet (EUV) light source
App 20050016679 - Ruzic, David ; et al. | 2005-01-27 |
Pattern transfer of an extreme ultraviolet imaging layer via flood exposure of contact mask layer (EUV CML)
App 20040265748 - Bristol, Robert ; et al. | 2004-12-30 |
Etched silicon diffraction gratings for use as EUV spectral purity filters
Grant 6,825,988 - Bristol November 30, 2 | 2004-11-30 |
Active hardmask for lithographic patterning
App 20040214113 - Goldstein, Michael ; et al. | 2004-10-28 |
Protective coatings for radiation source components
Grant 6,809,328 - Chandhok , et al. October 26, 2 | 2004-10-26 |
EUV source box
Grant 6,809,327 - Bristol October 26, 2 | 2004-10-26 |
Protective coatings for radiation source components
App 20040120461 - Chandhok, Manish ; et al. | 2004-06-24 |
Debris mitigation device
App 20040099820 - Bristol, Robert | 2004-05-27 |
EUV source box
App 20040079902 - Bristol, Robert | 2004-04-29 |
Etched Silicon Diffraction Gratings For Use As Euv Spectral Purity Filters
App 20040051954 - Bristol, Robert | 2004-03-18 |
In-situ cleaning of light source collector optics
App 20040007246 - Chan, Michael ; et al. | 2004-01-15 |
| 