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Method of measuring an alignment mark or an alignment mark assembly, alignment system, and lithographic tool
Grant 11,442,372 - Bijnen , et al. September 13, 2 | 2022-09-13 |
Method For Controlling A Semiconductor Manufacturing Process
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Method Of Measuring An Alignment Mark Or An Alignment Mark Assembly, Alignment System, And Lithographic Tool
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Lithographic method
Grant 11,029,610 - Tinnemans , et al. June 8, 2 | 2021-06-08 |
Lithographic method
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Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
Grant 10,901,326 - Hulsebos , et al. January 26, 2 | 2021-01-26 |
Lithographic Method
App 20200272061 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2020-08-27 |
Method Of Controlling A Lithographic Apparatus And Device Manufacturing Method, Control System For A Lithographic Apparatus And
App 20200201194 - Hulsebos; Edo Maria ; et al. | 2020-06-25 |
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
Grant 10,620,549 - Hulsebos , et al. | 2020-04-14 |
Lithographic Method
App 20200081356 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2020-03-12 |
Lithographic method
Grant 10,527,958 - Tinnemans , et al. J | 2020-01-07 |
Position measuring method of an alignment target
Grant 10,416,577 - Brinkhof , et al. Sept | 2019-09-17 |
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
Grant 10,331,040 - Hulsebos , et al. | 2019-06-25 |
Lithographic Method
App 20190094721 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2019-03-28 |
Position Measuring Method Of An Alignment Target
App 20180329307 - BRINKHOF; Ralph ; et al. | 2018-11-15 |
Method Of Controlling A Lithographic Apparatus And Device Manufacturing Method, Control System For A Lithographic Apparatus And Lithographic Apparatus
App 20180284621 - HULSEBOS; Edo Maria ; et al. | 2018-10-04 |
Level sensor arrangement for lithographic apparatus and device manufacturing method
Grant 8,842,293 - Den Boef , et al. September 23, 2 | 2014-09-23 |
Level sensor, lithographic apparatus, and substrate surface positioning method
Grant 8,675,210 - Den Boef , et al. March 18, 2 | 2014-03-18 |
Level Sensor, Lithographic Apparatus, And Substrate Surface Positioning Method
App 20130077079 - DEN BOEF; Arie Jeffrey ; et al. | 2013-03-28 |
Method for determining exposure settings, lithographic exposure apparatus, computer program and data carrier
Grant 8,208,118 - Burry , et al. June 26, 2 | 2012-06-26 |
Method For Positioning A Target Portion Of A Substrate With Respect To A Focal Plane Of A Projection System
App 20110109889 - VAN DE VIN; CORNELIS HENRICUS ; et al. | 2011-05-12 |
Method for positioning a target portion of a substrate with respect to a focal plane of a projection system
Grant 7,889,357 - Van De Vin , et al. February 15, 2 | 2011-02-15 |
Method For Positioning A Target Portion Of A Substrate With Respect To A Focal Plane Of A Projection System
App 20100245798 - VAN DE VIN; Cornelis Henricus ; et al. | 2010-09-30 |
Level Sensor Arrangement For Lithographic Apparatus And Device Manufacturing Method
App 20100233600 - DEN BOEF; Arie Jeffrey ; et al. | 2010-09-16 |
Method for positioning a target portion of a substrate with respect to a focal plane of a projection system
Grant 7,746,484 - Van De Vin , et al. June 29, 2 | 2010-06-29 |
Method for determining a map, device manufacturing method, and lithographic apparatus
Grant 7,649,635 - Schoonewelle , et al. January 19, 2 | 2010-01-19 |
Method for Determining Exposure Settings, Lithographic Exposure Apparatus, Computer Program and Data Carrier
App 20090201473 - BURRY; David Warren ; et al. | 2009-08-13 |
Method for positioning a target portion of a substrate with respect to a focal plane of a projection system
App 20080151265 - Vin; Cornelis Henricus Van De ; et al. | 2008-06-26 |
Method for positioning a target portion of a substrate with respect to a focal plane of a projection system
App 20080151204 - Van De Vin; Cornelis Henricus ; et al. | 2008-06-26 |
Method for determining a map, device manufacturing method, and lithographic apparatus
App 20080046183 - Schoonewelle; Hielke ; et al. | 2008-02-21 |
Method for imaging a pattern onto a target portion of a substrate
App 20070262268 - De Nivelle; Martin Jules Marie-Emile ; et al. | 2007-11-15 |
Method for determining a map, device manufacturing method, and lithographic apparatus
Grant 7,292,351 - Schoonewelle , et al. November 6, 2 | 2007-11-06 |
Using unflatness information of the substrate table or mask table for decreasing overlay
Grant 7,239,368 - Oesterholt , et al. July 3, 2 | 2007-07-03 |
Assembly comprising a sensor for determining at least one of tilt and height of a substrate, a method therefor and a lithographic projection apparatus
Grant 7,113,257 - Brinkhof , et al. September 26, 2 | 2006-09-26 |
Using unflatness information of the substrate table or mask table for decreasing overlay
App 20060114436 - Oesterholt; Rene ; et al. | 2006-06-01 |
Method for determining a map, device manufacturing method, and lithographic apparatus
App 20050186483 - Schoonewelle, Hielke ; et al. | 2005-08-25 |
Method for determining a map, device manufacturing method, and lithographic apparatus
App 20050134865 - Schoonewelle, Hielke ; et al. | 2005-06-23 |
Assembly comprising a sensor for determining at least one of tilt and height of a substrate, a method therefor and a lithographic projection apparatus
App 20040257545 - Brinkhof, Ralph ; et al. | 2004-12-23 |
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