| Patent | Date |
|---|
Metrology And Process Control For Semiconductor Manufacturing
App 20220036218 - ROTHSTEIN; EITAN ; et al. | 2022-02-03 |
Metrology and process control for semiconductor manufacturing
Grant 11,093,840 - Rothstein , et al. August 17, 2 | 2021-08-17 |
Accuracy Improvements In Optical Metrology
App 20210175132 - Bringoltz; Barak ; et al. | 2021-06-10 |
Metrology And Process Control For Semiconductor Manufacturing
App 20210150387 - ROTHSTEIN; EITAN ; et al. | 2021-05-20 |
Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology
Grant 10,831,108 - Marciano , et al. November 10, 2 | 2020-11-10 |
Symmetric target design in scatterometry overlay metrology
Grant 10,591,406 - Bringoltz , et al. | 2020-03-17 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
Grant 10,533,940 - Manassen , et al. Ja | 2020-01-14 |
Estimating and eliminating inter-cell process variation inaccuracy
Grant 10,415,963 - Marciano , et al. Sept | 2019-09-17 |
Near field metrology
Grant 10,261,014 - Sapiens , et al. | 2019-04-16 |
Scanning in Angle-Resolved Reflectometry and Algorithmically Eliminating Diffraction from Optical Metrology
App 20190094142 - Manassen; Amnon ; et al. | 2019-03-28 |
Reflection symmetric scatterometry overlay targets and methods
Grant 10,234,280 - Bringoltz , et al. | 2019-03-19 |
Analyzing root causes of process variation in scatterometry metrology
Grant 10,203,200 - Marciano , et al. Feb | 2019-02-12 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
Grant 10,126,238 - Manassen , et al. November 13, 2 | 2018-11-13 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
Grant 9,958,385 - Manassen , et al. May 1, 2 | 2018-05-01 |
Scanning In Angle-resolved Reflectometry And Algorithmically Eliminating Diffraction From Optical Metrology
App 20180106723 - Manassen; Amnon ; et al. | 2018-04-19 |
Pupil plane calibration for scatterometry overlay measurement
Grant 9,909,982 - Bringoltz , et al. March 6, 2 | 2018-03-06 |
Feed forward of metrology data in a metrology system
Grant 9,903,711 - Levy , et al. February 27, 2 | 2018-02-27 |
Accuracy Improvements In Optical Metrology
App 20180047646 - Bringoltz; Barak ; et al. | 2018-02-15 |
Analyzing Root Causes of Process Variation in Scatterometry Metrology
App 20180023950 - Marciano; Tal ; et al. | 2018-01-25 |
Removing process-variation-related inaccuracies from scatterometry measurements
Grant 9,874,527 - Amit , et al. January 23, 2 | 2018-01-23 |
Reducing algorithmic inaccuracy in scatterometry overlay metrology
Grant 9,869,543 - Bringoltz , et al. January 16, 2 | 2018-01-16 |
Decreasing inaccuracy due to non-periodic effects on scatterometric signals
Grant 9,851,300 - Bringoltz , et al. December 26, 2 | 2017-12-26 |
Apodization for pupil imaging scatterometry
Grant 9,784,987 - Hill , et al. October 10, 2 | 2017-10-10 |
Symmetric target design in scatterometry overlay metrology
Grant 9,739,702 - Bringoltz , et al. August 22, 2 | 2017-08-22 |
Aperture alignment in scatterometry metrology systems
Grant 9,726,984 - Bringoltz , et al. August 8, 2 | 2017-08-08 |
Phase characterization of targets
Grant 9,581,430 - Manassen , et al. February 28, 2 | 2017-02-28 |
Methods Of Analyzing And Utilizing Landscapes To Reduce Or Eliminate Inaccuracy In Overlay Optical Metrology
App 20160313658 - Marciano; Tal ; et al. | 2016-10-27 |
Feed Forward of Metrology Data in a Metrology System
App 20160290796 - Levy; Ady ; et al. | 2016-10-06 |
Symmetric Target Design In Scatterometry Overlay Metrology
App 20160216197 - Bringoltz; Barak ; et al. | 2016-07-28 |
Removing Process-variation-related Inaccuracies From Scatterometry Measurements
App 20150316490 - Amit; Eran ; et al. | 2015-11-05 |
Apodization for Pupil Imaging Scatterometry
App 20150316783 - Hill; Andrew V. ; et al. | 2015-11-05 |
Estimating And Eliminating Inter-cell Process Variation Inaccuracy
App 20150292877 - Marciano; Tal ; et al. | 2015-10-15 |
Reducing Algorithmic Inaccuracy In Scatterometry Overlay Metrology
App 20150233705 - Bringoltz; Barak ; et al. | 2015-08-20 |
Reflection Symmetric Scatterometry Overlay Targets And Methods
App 20150219449 - Bringoltz; Barak ; et al. | 2015-08-06 |
Apodization for pupil imaging scatterometry
Grant 9,091,650 - Hill , et al. July 28, 2 | 2015-07-28 |
Symmetric Target Design In Scatterometry Overlay Metrology
App 20150204664 - Bringoltz; Barak ; et al. | 2015-07-23 |
Near Field Metrology
App 20150198524 - Sapiens; Noam ; et al. | 2015-07-16 |
Scanning In Angle-resolved Reflectometry And Algorithmically Eliminating Diffraction From Optical Metrology
App 20150116717 - MANASSEN; Amnon ; et al. | 2015-04-30 |
Aperture Alignment In Scatterometry Metrology Systems
App 20150015883 - Bringoltz; Barak ; et al. | 2015-01-15 |
Pupil Plane Calibration For Scatterometry Overlay Measurement
App 20140257734 - Bringoltz; Barak ; et al. | 2014-09-11 |
Apodization for Pupil Imaging Scatterometry
App 20140146322 - Hill; Andrew V. ; et al. | 2014-05-29 |
Analytic Continuations To The Continuum Limit In Numerical Simulations Of Wafer Response
App 20140136164 - Bringoltz; Barak | 2014-05-15 |
Phase Characterization Of Targets
App 20140111791 - Manassen; Amnon ; et al. | 2014-04-24 |
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