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Chamber Body Design Architecture For Next Generation Advanced Plasma Technology App 20220213959 - HOWARD; Bradley J. ;   et al. | 2022-07-07 |
Chamber body design architecture for next generation advanced plasma technology Grant 11,333,246 - Nguyen , et al. May 17, 2 | 2022-05-17 |
Uniform Wafer Temperature Achievement In Unsymmetric Chamber Environment App 20170178758 - HA; Sungwon ;   et al. | 2017-06-22 |
Chamber Body Design Architecture For Next Generation Advanced Plasma Technology App 20160215883 - NGUYEN; ANDREW ;   et al. | 2016-07-28 |
Post etch treatment (PET) of a low-K dielectric film Grant 8,871,650 - Nemani , et al. October 28, 2 | 2014-10-28 |
Post Etch Treatment (pet) Of A Low-k Dielectric Film App 20130109187 - Nemani; Srinivas D. ;   et al. | 2013-05-02 |
Methods for making dual-damascene dielectric structures Grant 7,501,339 - Uglow , et al. March 10, 2 | 2009-03-10 |
Method and apparatus for real time metal film thickness measurement Grant 7,309,618 - Gotkis , et al. December 18, 2 | 2007-12-18 |
Enhancement of eddy current based measurement capabilities Grant 7,084,621 - Gotkis , et al. August 1, 2 | 2006-08-01 |
Methods for making dual-damascene dielectric structures App 20060166485 - Uglow; Jay E. ;   et al. | 2006-07-27 |
Methods for making dual-damascene dielectric structures Grant 7,060,605 - Uglow , et al. June 13, 2 | 2006-06-13 |
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection Grant 7,010,468 - Gotkis , et al. March 7, 2 | 2006-03-07 |
Method and apparatus of arrayed sensors for metrological control Grant 6,951,624 - Gotkis , et al. October 4, 2 | 2005-10-04 |
Complementary sensors metrological process and method and apparatus for implementing the same Grant 6,922,053 - Gotkis , et al. July 26, 2 | 2005-07-26 |
Dual-damascene dielectric structures Grant 6,909,190 - Uglow , et al. June 21, 2 | 2005-06-21 |
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection App 20050125202 - Gotkis, Yehiel ;   et al. | 2005-06-09 |
Method and apparatus for metrological process control implementing complementary sensors Grant 6,894,491 - Gotkis , et al. May 17, 2 | 2005-05-17 |
Method and apparatus for wafer mechanical stress monitoring and wafer thermal stress monitoring App 20050066739 - Gotkis, Yehiel ;   et al. | 2005-03-31 |
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection Grant 6,859,765 - Gotkis , et al. February 22, 2 | 2005-02-22 |
Complementary sensors metrological process and method and apparatus for implementing the same App 20050007107 - Gotkis, Yehiel ;   et al. | 2005-01-13 |
Method and apparatus of arrayed sensors for metrological control App 20050000653 - Gotkis, Yehiel ;   et al. | 2005-01-06 |
Method and apparatus of arrayed sensors for metrological control Grant 6,808,590 - Gotkis , et al. October 26, 2 | 2004-10-26 |
Method And Apparatus For Metrological Process Control Implementing Complimentary Sensors App 20040119468 - Gotkis, Yehiel ;   et al. | 2004-06-24 |
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection App 20040117054 - Gotkis, Yehiel ;   et al. | 2004-06-17 |
Enhancement of eddy current based measurement capabilities App 20040058545 - Gotkis, Yehiel ;   et al. | 2004-03-25 |
Method and apparatus for applying differential removal rates to a surface of a substrate App 20040011462 - Gotkis, Yehiel ;   et al. | 2004-01-22 |
Method and apparatus for real time metal film thickness measurement App 20040002171 - Gotkis, Yehiel ;   et al. | 2004-01-01 |
Dual - Damascene Dielectric Structures App 20010010970 - Uglow, Jay E. ;   et al. | 2001-08-02 |
Methods for making dual-damascene dielectric structures App 20010009803 - Uglow, Jay E. ;   et al. | 2001-07-26 |
Dual-damascene dielectric structures and methods for making the same Grant 6,251,770 - Uglow , et al. June 26, 2 | 2001-06-26 |
Plasma etch apparatus with heated scavenging surfaces Grant 5,770,099 - Rice , et al. June 23, 1 | 1998-06-23 |
Electrostatic chuck usable in high density plasma Grant 5,583,737 - Collins , et al. December 10, 1 | 1996-12-10 |
Electrostatic chuck usable in high density plasma Grant 5,539,609 - Collins , et al. July 23, 1 | 1996-07-23 |
Plasma etch apparatus with heated scavenging surfaces Grant 5,477,975 - Rice , et al. December 26, 1 | 1995-12-26 |
Electrostatic chuck for high power plasma processing Grant 5,350,479 - Collins , et al. September 27, 1 | 1994-09-27 |